Ozone Resistant

80-VM230-02-00 80-VM430-01-00 80-VZM450-01-00 80-VZM550-01-00 80-VFM350-02-00 80-VHS400 80-VHS500 80-VHS2500 80-VHS3500 80-VHS4500 80-VHS2000 80-VHS3000 80-VHS4000 80-VEX12080-VEX13080-VEX15080-VEX170VEX1A33B VEX1B33B 80-VEX123380-VEX153380-VEX173380-VEX350 80-AR435 to 935 4, 5-port solenoid valve 3-port solenoid valve Directional control valves Mechanical valve 3-port residual pressure

VP4

Model Exhaust specifications P A, B Port size E Applicable valve model Series Common Individual Common Individual VP4154-00 VP4254-00 VP4354-00 VP4454-00 1 , 1 1 3 4 1 2 3 4 3 4 , VVP450 3 4 VVP460 Option Blanking plate assembly XT038N-4A With gaskets and bolts 3-6-9 10 Series VP450/470 Dimensions: VVP450/460 Common EXH: VVP450Station 1Port size VVP460Station 1Port size Grommet Conduit terminal

VQ7-6/7-8

P reduced pressure A B A B ARB250-00-P A reduced pressure ARB250-00-A B reduced pressure ARB250-00-B 3-10-17 18 Series VQ7-6 Control Unit Control equipment (filters, regulators, pressure switches, air release valves) has been made into standardized units which can be mounted on manifolds without any modifications.

VFM300

1 Urethane rubber Cushion 3.5-54 VFM200 Series VFM200 Basic/VFM250-02-00 JIS Symbol 16N F.O.F. 0.5MPa supply 1mm P.T. 2mm O.T. 3mm T.T. Roller Lever/VFM250-02-01, VFM250-02-01S JIS Symbol 8N F.O.F. 0.5MPa supply 2.2mm P.T. 4mm O.T. 6.2mm T.T.

Large Size Vacuum Module: Series ZR

AEP HEP Related Equipment Connector Lead wire Socket Hook 951 Series ZR Vacuum Pressure Switch Unit/Digital Pressure Switch for Vacuum: ZSE30A-00---X505 Refer to the separate catalog (CAT.ES100-70) for details.

VQ7-6/7-8

ARB250-00-P ARB250-00-A ARB250-00-B P reduced pressure A reduced pressure B reduced pressure A B A B 12 Series VQ7-6 Control Units Control equipment (filters, regulators, pressure switches, air release valves) has been made into standardized units which can be mounted on manifolds without any modifications.

VFM300

3 Stainless steel u POM Plunger 5-6-49 Series VFM300 Series VFM300 Basic VFM350-02-00 JIS Symbol Accessory mounting hole (Pilot exhaust port) 0.5 MPa supply 1.0 mm P.T. 16 N F.O.F. 2-4.2 mounting hole 2.0 mm O.T. (SUP CYL port) (EXH port) 3.0 mm T.T.

VS7-6

Note) Symbol EA and EB correspond to R1 and R2 respectively (R1=EA, R2=EB) 1.19-18 VS7-8 Interface Speed Control/Dimensions AXT510-32A Interface Speed Control SV SY SYJ Symbol SX VK Interface Regulator/Dimensions VZ P port regulation/ARB350-00-P Interface Regulator VF VFR VP7 VQC SQ VQ VQ4 Symbol VQ5 A port regulation/ARB350-00-A B port regulation/ARB350-00-B VQZ VQD P port regulation VFS

Modular F.R.L. Units

rate L/min (ANR) Flow rate L/min (ANR) AF40-A Rc1/2 AF40-06-A Rc3/4 0.10 0.10 P1=0.7 MPa P1=0.5 MPa 0.08 0.08 P1=0.3 MPa Pressure drop MPa Pressure drop MPa P1=0.7 MPa P1=0.5 MPa P1=0.3 MPa P1=0.1 MPa P1=0.1 MPa 0.06 0.06 0.04 0.04 0.02 0.02 00 2000 4000 6000 00 2000 4000 6000 Flow rate L/min (ANR) Flow rate L/min (ANR) 31 Air Filter Series AF20-A to AF40-A Specific Product Precautions AC

VQ7-6/7-8

P reduced pressure A B A B ARB250-00-P A reduced pressure ARB250-00-A B reduced pressure ARB250-00-B 3-10-17 Series VQ7-6 Control Unit Control equipment (filters, regulators, pressure switches, air release valves) has been made into standardized units which can be mounted on manifolds without any modifications.

NCM

Front matter 7 Air Cylinder: Standard Double Acting, Single/Double Rod Series NCM How to Order NC M B 056 01 00 M9BW Built-in magnet Option Note 10) Nil D None Built-in magnet with auto switch When ordering multiple options, refer to options compatibility page to ensure options availability.

VZM400

3 Stainless steel y POM u POM 5-6-42 5 Port Mechanical Valve Series VZM500 Series VZM500 Basic VZM550-01-00 Accessory mounting hole (Pilot exhaust port) SA JIS Symbol VA SA VA 0.5 MPa supply VM 1.0 mm P.T. 16 N F.O.F. VR 2-3.2 mounting hole 2.0 mm O.T. 3.0 mm T.T.

High Purity Fluoropolymer

Description Replacement parts Tubing outside diameter Metric sizes Inch sizes Body class Type LQ-GP J 3 03 03 4 04 04 04 04 6 06 06 06 8 08 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type

F

18.1 18.5 15.2 25.3 5/16 32.4 NAS221F-U02-09 19 17 8.9 23.3 14.5 1/4 5/32 18.5 17.2 32.5 NAS221F-U02-03 31.1 32 26.6 39.4 34.4 11.4 24.9 16.5 3/16 34.2 NAS221F-U02-05 32.4 17 13.2 25.2 1/4 34.5 NAS221F-U02-07 32.9 15.2 27.2 18.5 5/16 36.4 NAS221F-U02-09 33.6 19 17.9 33.9 21 3/8 3/8 23 19 43.2 NAS321F-U02-11 35.3 13.2 27.8 17 1/4 19.4 39.3 NAS321F-U03-07 53.9 37.6 32.6 45 40 15.2 29.5 18.5

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Description Body class Type LQ-GP J Type 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 6 06 06 06 8 08 4 04 04 04 04 Insert pin holder assembly (with the parts case) Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type only) Nil N Metric sizes Inch sizes Nil S Resin Stainless steel

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Port size AS-D U01 Uni 1/8 U02 Uni 1/4 U03 Uni 3/8 U04 Uni 1/2 AS-T ASP Needle Valve/Flow Rate Characteristics ASN AS2201FSl-U02, AS2211FSl-U02 AS2201FSl-U01, AS2211FSl-U01 300 600 AQ Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 500 ASV 06, 07, 08, 09, 10 08, 09, 10, 11 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 03, 04 06, 07 200 400 AK 01, 23 300 VCHC 03, 04 100 200 ASR ASQ 01, 23

Air cylinder

Grease pack part number: GR-S-010(10g) , GR-S-020 (20g) Wear ring number 32 CM-32-07-304B 40 C1A040-07-305B 50 C1A050-07-306B 63 CA1063-07-307B 80 C1A080-07-308B 100 C1A100-07-309B 125 C1S125-07-362 C a u t i o n The seal is not delivered in sealed packaging for storage independently, so it must be used within 1 year. 3-3-2.

Clean Regulator/Fluororesin Type SRF Series

SRF 1 07 11 0 S S 1 With nut Body size 1 3 5 Fitting type Pilot port thread type Made to Order (Refer to page 887 for details.)

Shuttle Valve/AND Valve, with One-Touch Fittings, SeriesVR12

F

Dimensions Model Metric size D2 D1 H1 H2 H3 H4 H5 L1 L2 L3 Inch size TMH-05 21 8.3 8.5 15.4 7.7 9.3 6.4 6.3 3.3 11.7 TMH-06 13.1 TMH-07 26.5 10.6 11 20 10 11 7.2 7.1 4.3 13.5 10 TMH-08 TMH-09 15.5 TMH-10 18.5 34 14.6 14.2 28 14 14 9.6 9.5 4.3 TMH-11 18.8 5

Air Suction Filter With One-touch Fittings ZFB Series

Note) PVF: polyvinyl formal Replacement Element Part No. eZFB200-06 ZFB201-07 Applicable filter model Element size mm Set description Element O-ring for cover Part no.