ZP3

ZP3 B N 10 9 Model A B C q Pad dia.

smcmaintenancepartslist

Fit the grooved part of gasket w into the flange part of case q. b. Place element e in case q. Element e must be positioned at the center of case q. c. Set clamp ring t to case q. The tapered part of clamp ring t must be facing downward. d. Set seal part of the element e to the cover r while the flange part of case q is being placed on clamp ring t. e.

High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to

ZP

-A22 ZPT125 50-(B/N/T)01-A22 ZPT125 75-(B/N/T)01-A22 ZPT125 100-(B/N/T)01-A22 ZPB-T1 25-(B/N/T)01 ZPB-T1 50-(B/N/T)01 ZPB-T1 75-(B/N/T)01 ZPB-T1 25-(B/N/T)01 ZPB-T1 50-(B/N/T)01 ZPB-T1 75-(B/N/T)01 ZPB-T2 25-(B/N/T)01 ZPB-T2 50-(B/N/T)01 ZPB-T2 75-(B/N/T)01 ZPB-T2 25-(B/N/T)01 ZPB-T2 50-(B/N/T)01 ZPB-T2 75-(B/N/T)01 ZPB-T3 25-(B/N/T)01 ZPB-T3 50-(B/N/T)01 ZPB-T3 75-(B/N/T)01 ZPB-T3 100-(B

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

DL DM HR K Q Q M 20 20 21 28.5 40 B + Stroke L 25 21 21 29.5 41 E A + Stroke With rod end lock DM End lock mechanism Manual release Non-lock type ) ( 24 11 2-M5 x 0.8 4-N through D 1 Flat washer F Q B + Stroke L A + Stroke Rod end male thread H1 Bore size (mm) L1 H1 C1 X Standard stroke 18.5 10, 15, 20, 25 14 12 M8 x 1.25 28.5 20 50, 75, 100 32.5 M10 x 1.25 22.5 10, 15, 20, 25 C1 17.5 15

CQ2

SCQ2 Bore size B, #7.

Battery-less

7 @1 q B B !9 B-B !5 !8@8 e r t !2 !1 @3 @5 o A @4 A A-A !4 @2 @0 !0 w !3 @6 Component Parts No.

REA/REB

5 q !9 !8 @7 RE A B REC CX CY MQQ M RHC MK(2) RS Q G @2 !7 @6 #1 #0 @8 !0 @9 !1 @0 #2 i !6 @3 @1 @5 @4 RS H A RZQ MI W S CEP1 REAS10 CE1 Component Parts CE2 Material No. Description Note Material No. Description Note ML2B Stainless steel Cylinder tube q !7 Hard anodized Aluminum alloy Plate B Aluminum alloy External slider tube w !

REA/REB

Description Note Hard anodized Material Material Aluminum alloy Note Aluminum alloy Plate B q !

EX120/121/122

Internal Circuit (Brown) +5 V +24 V TD+ TD0 V q w e r VP R x D/T x D-N DGND R x D/T x D-P SHIELD q w e r t OUTPUT Internal circuit COM A +24 V RD+ RD0 V q w e r INPUT GND FG DC-DC converter (insulated) GND +24 V TD+ TD0 V q w e r OUTPUT Power supply for output +24 V 0 V q w COM D Power supply for the input and for the control unit of the Gateway +24 V 0 V q w +24 V RD+ RD0 V q w e r INPUT

CV/MVGQ

MK(2) RS Q G Width across flats Socket Bore size (mm) RS H A Nut JIS B 1181 Class 3 Intermediate M8 x 1.25 JIS B 1181 Class 3 Intermediate M10 x 1.25 JIS B 1181 Class 3 Intermediate M12 x 1.75 RZQ 40, 50 13 JIS B 4636 + 2 point angle socket 13 63 17 JIS B 4636 + 2 point angle socket 17 MI W S 80, 100 19 JIS B 4636 + 2 point angle socket 19 CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data

CV/MVGQ

MK(2) RS Q G Width across flats Socket Bore size (mm) RS H A Nut JIS B 1181 Class 3 Intermediate M8 x 1.25 JIS B 1181 Class 3 Intermediate M10 x 1.25 JIS B 1181 Class 3 Intermediate M12 x 1.75 RZQ 40, 50 13 JIS B 4636 + 2 point angle socket 13 63 17 JIS B 4636 + 2 point angle socket 17 MI W S 80, 100 19 JIS B 4636 + 2 point angle socket 19 CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data

Table of Contents

4 u t t q t u y !3 u e !3 !8 t y e !2 !1 !3 !6 r A A A A !4 i u q i !4 r y t y !2 o !5 r u t q !5 e i o !2 r Component Parts No. Description Material Note No. Description Material Note Body A O-ring PBT NBR q !3 Elbow body O-ring PBT NBR w !4 Body B O-ring Electroless nickel plated Brass NBR e !5 Body B O-ring Electroless nickel plated Brass NBR r !

Rotary Actuator/Vane Type

q END w END q A B A B B A Switch for rotation END q Switch for rotation END q Switch for rotation END w Switch for rotation END w Auto switch B port A port * Solid-lined curves indicate the rotation range of the output shaft with single flat (key).

ZP

width across flats 12 Hexagon width across flats 3 3 Y 2.5 2 A B A B Stroke 20 to 50 mm Stroke 20 to 50 mm Dimensions: 10 mm Stroke Dimensions: 10 mm Stroke (mm) (mm) Model A B C D F H I J K P Q: 6 Q: 8 Model A B C D F H I J K P Q: 6 Q: 8 Y K P K P ZPT20F10-0-A14 ZPT40F10-0-A14 18.5 39 51.5 118 136.5 13 140 5 12.5 20 22 40 43 13 15.5 36 48.5 50 115 13 133.5 13 137 12.5 52.5 50 ZPT25F10-0

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

DM1 M2 Body (B) N 20Body (A) 2-R A port J E2 H E1 F S N A port B port 2-R Y Y A1 M1 A2 P 6-Q X A1 For single vane: Above illustrations show actuators for 180 when B port is pressurized.

Table of Contents

DM1 M2 Body (B) N 20Body (A) 2-R A port J E2 H E1 F S N A port B port 2-R Y Y A1 M1 A2 P 6-Q X A1 For single vane: Above illustrations show actuators for 180 when B port is pressurized.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

DM1 M2 Body (B) N 20Body (A) 2-R A port J E2 H E1 F S N A port B port 2-R Y Y A1 M1 A2 P 6-Q X A1 For single vane: Above illustrations show actuators for 180 when B port is pressurized.

Hydraulic

+ l R J MM FY BB D E e Air release Width across flats G K F MA l C f Air release 10 NA FT A SS NB B SS+ Q + l + Stroke S + Stroke FX M H ZZ + Stroke ZZ + Q + l + Stroke FZ (mm) With rod boot Stroke range (mm) Bore size (mm) l e J B BB C F GA GB M NA NB P R S FD FT FX FY FZ SS f Q B-rod C-rod B-rod C-rod M10 x 1.25 32 58 62 38 16 21 15 11 37 31 3/8 39 130 11 11 88 40 109 30 21.5 15 52 25

Table of Contents

w No. q w e r t y u i o !