Model: VP500, Pilot: External Pilot, Electrical Entry: DIN Terminal, Port Size: 3/8", Thread: Rc, Switch Electrical Entry: M12 Connection, OMRON, Check Valve: Applicable Tube O.D. ø6, Throttle: Variable Throttle, Max. Operating Pressure: 0.7 MPa
Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Drip-Proof / Lubrication Free, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: [Others] Other, Pipe Port Type: [Rc (R)] Rc, Port Size: 3/8, Pressure Rating(MPa): 0.25 to 0.7, Driving Type: Pilot
Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Drip-Proof / Lubrication Free, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: [Others] Other, Pipe Port Type: [Rc (R)] Rc, Port Size: 3/8, Pressure Rating(MPa): 0.25 to 0.7, Driving Type: Pilot
Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Drip-Proof / Lubrication Free, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: [Others] Other, Pipe Port Type: [Rc (R)] Rc, Port Size: 3/8, Pressure Rating(MPa): 0.25 to 0.7, Driving Type: Pilot
Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Drip-Proof / Lubrication Free, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: [Others] Other, Pipe Port Type: [Rc (R)] Rc, Port Size: 3/8, Pressure Rating(MPa): 0.25 to 0.7, Driving Type: Pilot
Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Drip-Proof / Lubrication Free, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: [Others] Other, Pipe Port Type: [Rc (R)] Rc, Port Size: 3/8, Pressure Rating(MPa): 0.25 to 0.7, Driving Type: Pilot
Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Drip-Proof / Lubrication Free, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: [Others] Other, Pipe Port Type: G, Port Size: 3/8, Pressure Rating(MPa): 0.25 to 0.7, Driving Type: Pilot Type Spool
Model: 5 (VP500), Pilot: R (External Pilot), Valve Electrical Entry: D (DIN Terminal w/Connector, w/Pitch 9.4mm Standard), Port: 03 (3/8, VP500), Thread: Rc, Switch Electrical Entry: M (M12 Connector, OMRON), Check Valve, External Pilot Only: A (Applicable Tube O.D. ø6)
Model: 5 (VP500), Pilot: R (External Pilot), Valve Electrical Entry: D (DIN Terminal w/Connector, w/Pitch 9.4mm Standard), Port: 03 (3/8, VP500), Thread: Rc, Switch Electrical Entry: G 1/2, OMRON, Check Valve, External Pilot Only: A (Applicable Tube O.D. ø6)
Model: 5 (VP500), Pilot: R (External Pilot), Valve Electrical Entry: D (DIN Terminal w/Connector, w/Pitch 9.4mm Standard), Port: 03 (3/8, VP500), Thread: F (G), Switch Electrical Entry: M (M12 Connector, OMRON), Check Valve, External Pilot Only: None
Model: 5 (VP500), Pilot: R (External Pilot), Valve Electrical Entry: D (DIN Terminal w/Connector, w/Pitch 9.4mm Standard), Port: 03 (3/8, VP500), Thread: Rc, Switch Electrical Entry: M (M12 Connector, OMRON), Check Valve, External Pilot Only: None
Model: 5 (VP500), Pilot: R (External Pilot), Valve Electrical Entry: D (DIN Terminal w/Connector, w/Pitch 9.4mm Standard), Port: 03 (3/8, VP500), Thread: Rc, Switch Electrical Entry: S1 (M12 Connector, Rockwell Automation), Check Valve, External Pilot Only: A (Applicable Tube O.D. ø6)
Model: 5 (VP500), Pilot: R (External Pilot), Electrical Entry: D (DIN Terminal), Port Size: 03 (3/8"), Thread: Rc, Switch Electrical Entry: M (M12 Connection, OMRON), Check Valve: None, Throttle: Variable Throttle, Max. Operating Pressure: X555 (0.7 MPa)
Model: 5 (VP500), Pilot: R (External Pilot), Electrical Entry: D (DIN Terminal), Port Size: 03 (3/8"), Thread: Rc, Switch Electrical Entry: M (M12 Connection, OMRON), Check Valve: A (Applicable Tube O.D. ø6), Throttle: Variable Throttle, Max. Operating Pressure: X555 (0.7 MPa)
Model: 5 (VP500), Pilot: R (External Pilot), Electrical Entry: D (DIN Terminal), Port Size: 03 (3/8"), Thread: Rc, Switch Electrical Entry: S1 (M12 Connection, Rockwell Automation), Check Valve: A (Applicable Tube O.D. ø6), Throttle: Variable Throttle, Max. Operating Pressure: X555 (0.7 MPa)
Model: VP500, Pilot: External Pilot, Valve Electrical Entry: DIN Terminal w/Connector, w/Pitch 9.4mm Standard, Port: 3/8, VP500, Thread: Rc, Switch Electrical Entry: M12 Connector, Rockwell Automation, Check Valve, External Pilot Only: Applicable Tube O.D. ø6
High Vacuum Angle Valve Nil FKM 1349-80*1 N1 EPDM 2101-80*1 P1 Barrel Perfluoro 70W Q1 Kalrez 4079 R1 Chemraz SS592 R2 SS630 R3 SSE38 S1 VMQ 1232-70*1 T1 FKM for Plasma 3310-75*1 *1 Values at normal temperature, excluding gas permeation *2 Refer to Construction on page 5 for changed part. Number corresponds with the parts number on the construction drawing.
A Controller type Motor type Power supply voltage Symbol Type AC servo motor (S2) Capacity Encoder LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSA2-S4 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 LECSB2-S8 AC servo motor (S2) 100 to 120 VAC 50/60 Hz S1 S3 S4 S5 S7 S8 100 W B Pulse input type (For absolute encoder) AC servo motor (S3) Pulse input type (For incremental encoder) Incremental AC servo
Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Drip-Proof / Lubrication Free, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Closed, Pipe Port Type: NPT, Port Size: 3/8, Pressure Rating(MPa): 0.25 to 0.7, Driving Type: Pilot
Model: VP500, Body: Body Ported, Pilot: External Pilot, Valve Electrical Entry: DIN Terminal w/Connector, w/Pitch 8mm Standard, Port: 3/8, VP500, Thread: NPT, Bracket: None, Switch Electrical Entry: M12 Connector, Rockwell Automation, Check Valve, External Pilot Only: Applicable Tube O.D. ø1/4"