Air Slide Table

Increases flexibility of wiring and piping with piping ports and auto switch mounting grooves on both sides u u i i d d g g 30 27 30 23 e e 1 1 ! ! For MXQ12A For MXQ8B Page 67 Page 83 Single side-ported type Height interchangeable type ! ! 4 4 Better auto switch visibility. Indicator LED can be checked from one side when used with a short stroke.

Aluminum High Vacuum Angle Valve

A cm 2 7 Ultimate Pressure Cylinder conductance With length L (cm) and diameter D (cm) where L>>D, from the formula C=(2RT/M)0.5D3/6L, the conductance C=12.1 D3/L (L/sec) at an air temperature of 20C. Ultimate pressure P (Pa) is P=Q/S, where the sum of Weight flow rates for outgassing (Qg) and leakage Q(L) is Q(Pam3/s), and the exhaust speed is S(m3/s).

High Power Cylinder:

) Yes Q Relay PLC IC 24V H7NW Q q Q 5V 12V Diagnostic indication (2 color) 3 wire (PNP) H7PW Q q Q H7BW Q q Q 2 wire 12V Water resistant (2 color) Grommet H7BA q Q 3 wire (NPN) G5NT With timer q Q IC 5V 12V H7NF Q q With diagnostic output Q 4 wire (NPN) Latch with diagnostic output(2 color) H7LF Q q Q Lead wire length 0.5m (Example) C80C 5m Z (Example) C80CZ 3m L C80CL N

ZP

Model A B C Y D P Q R Model A B C D E F Flat Flat with ribs P Q R F F U C U C U C 1.2 1.6 2.6 4.8 7 9 ZPY20 20 25 32 23 14 28 5 4.5 2.3 1.8 1.7 N4 (Nylon tube 4/2.5) N4 (Nylon tube 4/2.5) 13.5 5 1.8 14.5 5 1.8 24 42 4 4 5 ZPY04U ZPY06U ZPY08U 8 35 6 0.8 ZPY25 14.5 24.5 42.5 N6 (Nylon tube 6/4) ZPY32 N6 (Nylon tube 6/4) 15.5 7 2.5 2.5 16.5 7 2.5 1 Deep U4 (Soft tube 4/2.5) U4 (Soft tube 4/

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

3 Port Solenoid Valve Base Mounted and Body Ported VQZ Series Choice of Rubber or Metal Seal Compact Design With Large Flow Long Life Interchangeable One-Touch Fittings P R O D U C T S Q Q Q Table of Contents Q Q Q Product Features .pages 4-5 Preferred Options Guide.page 7 Q Q Base Mounted Valves and Manifolds.page 9 Specifications.pages 10-11 How To Order .pages 12-15 Options

MY1

6 @7 @8 @9 #0 #1 #2 #3 #4 #5 #6 #7 No. q w e r t y u i o !

VFR

U side mounting D U 1 2 8 stations Option D side 3 4 3 4 Max: 8 stations Refer to page 3-5-8.

VFS

2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D) !2, Metal joint q, w, Gasket B r, Guard !

Auto Switch Guide

S Surge absorber (mm) Applicable bore size (mm) 40 50 63 80 100 C H' T T' HW H Z Auto switch model CV D-A3C-4, D-A44C-4 D-A3C-5, D-A44C-5 D-A3C-6, D-A44C-6 D-A3C-8, D-A44C-8 D-A3C-10, D-A44C-10 58 (67.5) 59 (68.5) 61.5 (71) 65 (74.5) 68 (77.5) 50.5 (60) 51.5 (61) 53 (62.5) 54.5 (64) 57.5 (67) 7.5 8.5 10.5 12.5 15.5 44 52 64 78 92 6.5 6.5 7.5 9.5 9.5 69 77 91 107 121 M5 x 0.8 x 16 MVGQ M5

Stopper Cylinder

Q D B 20 15 D L M9BW 20 to 50 y !

3 Port Solenoid Valve/

3(R) y t r y t r y t r w q e w q e w q e 3(R) 3(R) 3(R) 1(P) 1(P) 1(P) X X 6 VP500/700-X536 Dimensions Residual Pressure Release Valve (-X536) VP542(R)-5 D YZ1-03 -X536 VP542(R)-5 D YZ1-03 -M -X536 3/8" [2(A) port] Port size: 1/8" (Without check valve) Applicable tube O.D.: 6, 1/4" (With check valve) (External pilot port) 31 2 x 4.2 (For mounting) Safety limit switch Made by OMRON 3.5 7

C85

(mm) D-J79C 17 D-C7 D-C80 D-C73C D-C80C D-A73 D-A80 D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7W/J79W D-F7V D-F7WV D-J79C D-F7BAL D-F79F/A72 D-H7 D-H7C D-H7W D-H7BAL D-H7NF D-A79W Hs Bore D-F7V D-F7WV D-F7BAVL 1 7 A B 23 15 Hs B 2 (3) 4 (2) 5.5 (3.5) A 2 (3) 5 (3) 6.5 (4.5) B 1 2 (2.5) 3 (4) 3 (4) 5 (3) 6.5 (4.5) A 9 2 (2.5) 3 (4) 3 (4) 6 (4) 7.5 (5.5) B 3 4 (4.5) 5 (6) 5 (6) 7 (5) 8.5 (6.5) A

Pin Clamp Cylinders

side 2 x 6H7 Depth 10 4 x M8 x 1.25 Depth 12 2 x Rc1/8 D Clamp arm Port side C A 45 49.5 B Hole diameter of workpiece C D d K SR Q Model number Hole diameter of workpiece C D d K SR Q Model number Hole diameter of workpiece C D d K SR Q Model number 115 11.6 116 11.7 117 11.8 118 11.9 119 12.0 120 155 15.6 156 15.7 157 15.8 158 15.9 159 16.0 160 7.5 075 7.6 076 7.7 077 7.8 078 7.9 079 8.0

MGG

C 4-O D Q 2-P T U W E S K L B AA A X AB I J R AP Y + Stroke V Z + Stroke Non-locking type Locking type 8-AF AC AD AE With rod side locking Q Y + Stroke R With head side locking For standard strokes Dimensions not marked with an "" are the same as standard.

Air Fittings & Tubing

Thread NPT (1) Weight (g) Q A M D L P Ml 9.6 40.5 9.6 KQ2U01-34S KQ2U01-35S KQ2U03-34S KQ2U03-35S KQ2U05-34S KQ2U05-35S KQ2U07-34S KQ2U07-35S KQ2U07-36S KQ2U09-34S KQ2U09-35S KQ2U09-36S KQ2U11-35S KQ2U11-36S KQ2U11-37S KQ2U13-35S KQ2U13-36S KQ2U13-37S 1 8 1 4 1 8 1 4 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 12.7 14.29 12.7 14.29 12.7 14.9 9 36.5 38.5 38 40 40 42.5 42.5 43.5

RSQ

5 y q !4 r !6 e !0 !3 !2 !1 w o @0 !7 i !9 !

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

6 D-M9/D-F9W 5 4 D-Z7/Z80 9 9 11 A B D-Y59/Y7P D-Y7W 6 6 6 Switches cannot be mounted in some cases.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

(Including band and screw) MTS K79C D-H7/H7W/ 4 4 4.5 5 6 6.5 MY H7BAL/H7NF 7 8.5 9 10 9.5 10.5 D-H7C Bore size (mm) Auto switch model CY D-G5/K59 50 63 80 100 40 32 25 20 D-G5W/K59W 4 4 4.5 5 6 6.5 7 6.5 D-C7/C8 BMA2 -040 BMA2 -050 BMA2 -063 BMA2 -032 BMA2 -025 BMA2 -020 MG D-G5NTL/G5BAL Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office

2/3 Port Valve

MainPort Rc(PT) Pilot port Rc(PT) A Model B C D E F H J K L 1 8 1 4 1 4 105 120 140 77 96 113 53 60 74 26.5 30 37 120.5 137 160 20 24 24 129.5 147 170 229.5 247 270 197 214.5 237.5 55 63 74 1 4 1 2 1 1 2 VNC5-32A VNC6-40A VNC7-50A 4.2-24 VNC Port size: 32A, 40A, 50A Flange connection Applicable flange Pilot port Rc(PT) A Model B C D E F H J K L 32 40 50 1 8 1 4 1 4 130 150 180 210.5 226

Modular F.R.L. Unit

J Drain guide 1/4 Note 4) AFM30, 40 Nil Rc AFM20 to 40 1/8 1/4 3/8 1/2 3/4 01 02 03 04 06 R Flow direction: Right to left AFM20 to 40 N Note 1) NPT D Float type auto drain (N.O.)