Seal Type: S (Metal), Configuration: FG (2-position), Number of Solenoids: D (Double), Voltage: 1Z (100VAC/50Hz, 115VAC/60HZ), Pilot: Pilot Exhaust through Footprint, Subplate: A04T (Side 1/2)

Seal Type: S (Metal), Configuration: FG (2-position), Number of Solenoids: D (Double), Voltage: 3EZ (24VDC), Pilot: Pilot Exhaust through Footprint, Subplate: A03T (Side 3/8)

Seal Type: S (Metal), Configuration: FG (2-position), Number of Solenoids: D (Double), Voltage: 1Z (100VAC/50Hz, 115VAC/60HZ), Pilot: Pilot Exhaust through Footprint, Subplate: A03T (Side 3/8)

Seal Type: S (Metal), Configuration: FG (2-position), Number of Solenoids: D (Double), Voltage: 1Z (100VAC/50Hz, 115VAC/60HZ)

Speed Controller with Uni One-touch Fitting AS Series Push-lock type

AK Flow Rate and Sonic Conductance VCHC ASR ASQ Model AS22l1F-U01 AS23l1F-U01 AS22l1F-U02 AS23l1F-U02 AS32l1F AS33l1F AS42l1F AS43l1F Flow Direction Symbols on Body Meter-out Meter-in Metric size 3.2 4 6 8 10 3.2 4 6 8 10 6 8 10 12 10 12 16 Symbol Tubing O.D.

AS-FPQ/AS-FPG

AS-FPG/Stainless steel 304 ASP Release button color: Light blue ASN Flow Rate and Sonic Conductance AQ AS121FP-M5 4 6 100 0.28 0.2 0.4 0.25 0.2 0.3 0.3 0.25 0.2 0.25 0.3 AS221FP-01 AS421FP-04 AS221FP-02 AS321FP-03 Model 6 8 230 0.64 8 10 460 1.3 6 8 10 12 920 2.6 10 12 4 4 6 ASV Tubing O.D.

AS-FPQ/AS-FPG

AS-FPG/Stainless steel 304 ASP Release button color: Light blue ASN Flow Rate and Sonic Conductance AQ AS121FP-M5 4 6 100 0.28 0.2 0.4 0.25 0.2 0.3 0.3 0.25 0.2 0.25 0.3 AS221FP-01 AS421FP-04 AS221FP-02 AS321FP-03 Model 6 8 230 0.64 8 10 460 1.3 6 8 10 12 920 2.6 10 12 4 4 6 ASV Tubing O.D.

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil R Metal seal Double FJG Rubber seal 1 (P) 5

Speed Controller with

Metric size 3.2 4 6 4 6 6 8 6 8 10 12 10 12 Inch size 1/8" 5/32" 1/4" 5/32" 1/4" 1/4" 5/16" 1/4" 5/16" 3/8" 3/8" 1/2" Flow Direction Symbol on Body C values: Sonic conductance dm3/(sbar) Free flow 0.3 0.4 0.6 0.4 0.6 1.0 1.2 1.1 1.6 2.2 2.6 2.4 3.5 Symbol Controlled flow 0.3 0.4 0.6 1.0 1.2 1.3 1.9 2.7 3.3 2.8 4.1 pressure ratio Free flow 0.3 0.2 0.3 0.1 0.2 0.2 0.3 0.2 b values: Critical

Speed Controller with Uni One-touch Fitting AS Series

M Weight (g) AS AS221F-U01-23 AS221F-U01-04 AS221F-U01-06 AS221F-U01-08 AS221F-U01-10 AS221F-U02-04 AS221F-U02-06 AS221F-U02-08 AS221F-U02-10 AS321F-U02-06 AS321F-U02-08 AS321F-U02-10 AS321F-U02-12 AS321F-U03-06 AS321F-U03-08 AS321F-U03-10 AS321F-U03-12 AS421F-U04-10 AS421F-U04-12 3.2 4 6 8 10 4 6 8 10 6 8 10 12 6 8 10 12 10 12 7.8 8.9 11.0 15.2 18.5 8.9 11.0 15.2 18.5 11.0 15.2 18.5 20.9

Speed Controller with One-touch Fittings

Flow Rate and Sonic conductance AS1002F 3.2, 4, 6 1/8", 5/32" 1/4" 100 0.28 AS2002F 4 AS3002F AS2052F AS4002F 12 Series Metric size 8 1/4" 5/16" 460 1.3 6 10, 12 8 6 6 10 2 Flow Direction Symbol on Body Tube O.D.

EX510-GDN1.eng

Solenoid valve is not working SW2 OFF 1 6 5 4 3 2 1 ON ON Input setting (switch No.1 to 3), Output setting (switch No.4 to 6) The setting is as follows. All of the settings when shipped from plant are turned OFF, 64 I/O points.

EX510-GPR1.eng

The signal to PROFIBUS DP is transmitted by GW unit, and the signal to input/output device which is installed discretely is collected by GW unit. 5 6 FG terminal Used for grounding. 7 Mounting hole Used when an unit is mounted with two M4 screws.

LC-OM089xx

4-4 /1995 IEC61000-4-4 A /2000 to IEC61000-4-4 /1995 IEC61000-4-4 A2 /2001 to IEC61000-4-4 /1995 IEC61000-4-6 /2001 (4) (5) Fig.1 How to ground the DC motor (Type3) Shielded part (9) (13) (7) (7) (1) (10) (12) (7) (3) (7) (7) P-clip metal cylinder LC3F2 series (2) 100VAC Eart h Poi nt Sym bol Fram e G round ( FG ) (11) * Machinery layout Cable length or less (6) I N PU T PO W ER SU PPLY (

Seal: S (Metal), Size: 2 (Size 18mm), Configuration: FG (2-position), Number of Solenoids: S (Single), Voltage: 3 (24VDC), Light/Surge Voltage Suppressor: Z (Indicator Light, Surge Voltage Suppressor), Manual Override: Push Type, Internal/External Pilot: R (External Pilot)

Seal: S (Metal), Size: 2 (Size 18mm), Configuration: FG (2-position), Number of Solenoids: S (Single), Voltage: 3 (24VDC), Light/Surge Voltage Suppressor: Z (Indicator Light, Surge Voltage Suppressor)

Seal: S (Metal), Size: 4 (Size 26mm), Configuration: FG (2-position), Number of Solenoids: S (Single), Voltage: 3 (24VDC), Light/Surge Voltage Suppressor: Z (Indicator Light, Surge Voltage Suppressor), Manual Override: B (Locking Type, Tool Required)

Seal: S (Metal), Size: 4 (Size 26mm), Configuration: FG (2-position), Number of Solenoids: S (Single), Voltage: 3 (24VDC), Light/Surge Voltage Suppressor: Z (Indicator Light, Surge Voltage Suppressor), Manual Override: B (Locking Type, Tool Required), Internal/External Pilot: R (External Pilot)

Seal: S (Metal), Size: 4 (Size 26mm), Configuration: FG (2-position), Number of Solenoids: S (Single), Voltage: 3 (24VDC), Light/Surge Voltage Suppressor: Z (Indicator Light, Surge Voltage Suppressor)

Seal: S (Metal), Size: 4 (Size 26mm), Configuration: FG (2-position), Number of Solenoids: S (Single), Voltage: 3 (24VDC), Light/Surge Voltage Suppressor: Z (Indicator Light, Surge Voltage Suppressor), Manual Override: Push Type, Internal/External Pilot: R (External Pilot)