SMC Pneumatic Clean Series

47.3 37 37 30 6 6 5 108 82 80 80 11 8 8 8 1/8 36 31 31 31 16 13 13 13 125 46.5 37.5 33.5 28 7 5.5 5.5 5 M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 15 11.5 10.5 8.5 40 32 25 20 66 60 60 60 75 75 75 24 22 22 18 22 17 17 13 41 32 32 26 31 26 26 26 50 45 45 41 174 140 138 134 M26 x 1.5 M26 x 1.5 M20 x 1.5 21 19.5 19.5 15.5 17.5 17.5 35.5 35.5 26-0.033 0 14 12 10 16 13 13 7 7 7 5 4 4 1/4 1/8 1/8 163

High Pressure Coolant Valve

50 60 24 36 41 50 135 164.5 200 219 50 60 79 90 77 1 8 1 2 3 x 3 4 3 x 1 1 4 95.5 111 119 VNH VNH 1 4 VND Note) ( ): CE-compliant product (-Q) VCC Model J K L M N O P Q R S T U VNH1 -10A A B VNH2 -15A A B VNH3 -20A A B VNH4 -25A A B M5 x 0.8 depth 5.5 M6 x 1 depth 6 M8 x 1.25 depth 6 M8 x 1.25 depth 6 20 24 24 29 36 48 51 25 30 35 38 30 40 50 56 37 43 50.5 58.5 75 100 126 141 88 118 148 163

XM, XY

79 100 117 C 1 2 2 3 3 D 40 55 75 87 114 Fn 95 110 Fd 70 114 Fc 26 41 52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6 x 6.6 8 x 8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type XLA G Fd XL C XLQ (K flange) XM XY XM XY J K H B DS M XSA XVD 45 XGT CYV A Fn (KF flange) E K (mm) Model A 86.7 114 128 163

Compact Cylinder

.: C55B32-47 Example IN 113 189 264 25 Makes 47 stroke tube OUT 147 245 344 IN 181 302 422 Weight 32 OUT 241 402 563 IN 317 528 739 Unit: g Without Auto Swtich 40 OUT 377 628 880 Cylinder stroke (mm) Bore size (mm) IN 495 825 1150 10 60 80 100 125 150 5 15 20 25 30 35 40 45 50 50 OUT 589 982 1370 20 228 254 306 357 422 487 124 111 137 150 163 176 189 202 215 IN 841 1400 1960 25 292 323 386

LG1H

Maximum acceleration: 3000mm/s2 Positioning distance (mm) 400 200 100 10 1 10 40.4 20.4 10.4 1.4 0.5 100 4.5 2.5 1.5 0.6 0.5 Speed (mm/s) 250 2.1 1.3 0.9 0.6 0.5 500 1.4 1.0 0.8 0.6 0.5 A B C D Values will vary slightly depending on the operating conditions. 163 18 Series LG1H21 Standard Motor High Rigidity Direct Acting Guide With Coupling Motor Output Rolled Ball Screw 100W 15mm /20mm

06-rear-e

.: GR-S-010 (10 g) Scraper NBR Cushion seal Chromated NBR Magnetic shielding plate Clear anodized Rolled steel plate Switch rail 27 Aluminum alloy Magnet 28 Nickel plated Hexagon socket head cap screw 29 #0 Chromium steel Wear ring C Special resin 26 to 29 are non-replaceable parts, so they are not included in the seal kit. 163

0.5

Female thread mounting) 104 2 x 3.5, depth 1 12.5 35 25 139 155 (10.5) 20 16.6 40 Bracket IZF21-m-mBmm 122 (104) 2 x 25 90 (155) 4 x 4.5 171.5 143 124 107 47 3 x 5.5 2 x 5.5 40 45 30 30 16 IZF21/31 Series Dimensions IZF31-m-m 4 x M4 x 0.7, depth 6 (Female thread mounting) 2 x 3.5, depth 1 144 55 25 12.5 179 195 36.6 (10.5) 20 40 Bracket IZF31-m-mBmm 162 (144) 90 2 x 25 (195) 4 x 4.5 211.5 163

Peltier-type Chiller Thermo-con/ Compact Type

2.5 3 3.5 4 4.5 5 5.5 Circulating fluid flow rate [L/min] 7 Thermo-con/Compact Type Air-cooled HEF Series Dimensions (10) 150 27 115 43 Label 110 130 Circulating fluid OUT Rc1/4 Circulating fluid IN (drain) Rc1/4 Power connector 100 Power switch Tank lid Circulating fluid level gauge Display/ Operation panel 89 Alarm, RUN/STOP 25 Fluid fill port Communication connector PE (20) 148 40 185 163

With abrasion resistant packings and replaceable nose seals, the C85 offers exceptional service life.Single acting, single rod, spring return/spring extend, non-rotating, Conforms to ISO standard 6432, Bore sizes *: 8, 10, 12, 16, 20, 25, Standard strokes up to 150mm, Auto switch capable, Cylinder, ISO, Dbl Acting, ISO ROUND BODY CYLINDER, C82, C85, 163 lb

CQS, low friction type, Mountings: basic, foot, front and rear flange, double clevis, Bore sizes: 12, 16, 20, 25mm, Strokes up to 50mm, Auto switch capable, Cyl, Microspeed, Dbl Acting, COMPACT CYLINDER, 163 lb

LG1H

Maximum acceleration: 3000mm/s2 Positioning distance (mm) 400 200 100 10 1 10 40.4 20.4 10.4 1.4 0.5 100 4.5 2.5 1.5 0.6 0.5 Speed (mm/s) 250 2.1 1.3 0.9 0.6 0.5 500 1.4 1.0 0.8 0.6 0.5 C D A B Values will vary slightly depending on the operating conditions. 163 18 Series LG1H21 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200

ASR

ASR630F-03-10S,-F20 ASR630F-03-12S,-F20 ASR630F-04-10S,-F20 ASR630F-04-12S,-F20 89 111 17 34.9 57.7 6 63.7 21.5 20 17 R1/4 93 114 18.5 35.9 58.7 18.5 8 45.6 50.6 45.6 23 44.6 39.6 16.8 82 105 21 31 53.8 10 127 150 17 36.5 62.9 6 130 153 18.5 37.5 63.9 18.5 8 67.3 25.3 24.3 21 R1/4 49.2 55.8 50.8 25.9 49.8 44.8 18.8 120 143 21 32.6 59 10 122 146 22 34.4 60.8 20.9 12 137 160 17 36.5 62.9 6 140 163

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted 1

Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Thread type EXH port type Nil Rc Valve stations N NPT 1 Common EXH Bottom Side P Side Side A E T NPTF Side Side 1 0 G F Option 05 5 stations 10 10 stations Dimensions 65 (89.5) [68] 2-7 91 (115.5) [94] Mounting hole n-Rc 1 4 4-Rc 3 8 ( ): DC [ ]: AC, with indicator light n L L1 L2 2 87 100 3 125 138 4 163

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported 1

VS3135 VKF VQZ VZ Q Terminal dimensions Port size Rc VS A Model B C D E F G H J K L M N P U T S R VS3135-02 VS3135-03 VS3135-04 VS3145-04 VS3145-06 VFN 1 4, 3 8, 1 2 64 64 65 70 1 136 35 9 64 54 19 32 50 50 118 96 120 60 7 1 2, 3 4 82 68 88 92 1 181 53 12 81 70 35 36 66 52 133 96 140 66 9 DC C Model VS3135-02 VS3135-03 VS3135-04 VS3145-04 VS3145-06 A B Port size Rc 1 4, 3 8, 1 2 64 50.8 163

Compact Hydraulic Cylinder Series CH
KGB

CHKGB Bore size Rod end thread type Auto switch Quantity XC63 Stroke Intermediate stroke Applicable tube For 75mm stroke For 100mm stroke Strokes 55, 60, 65, 70 80, 85, 90, 95 Dimensions CHKGB--XC63 B A 55, 60, 65, 70 80, 85, 90, 95 Stroke Bore size (mm) A B A B 32 141 131 40 150 140 175 165 50 156 145 181 170 63 165 152 190 177 80 180 163 205 188 100 207 181 232 206 Note) Dimensions other

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

Rc(PT) 1/4 Exhaust center Closed center 61 68 3 position Pressure center Exhaust center 121 128 174 Pressure center Single 53 57 2 position C4 Single Double 68 75 132 135 158 2 position ( ) ( ) 4 One-touch fitting C8 SY360--C4 Double Closed center 148 155 201 3 position 8 One-touch fitting Closed center SY760--C8 Exhaust center 70 78 3 position Exhaust center Pressure center Single 156 163

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

L dimensions n (stations) Dimensions 3 8 9 2 6 10 4 7 5 L1 66 176 198 44 132 220 88 154 110 L2 75 185 207 53 141 229 97 163 119 L3 84 194 216 62 150 238 106 172 128 Manifold composition 3 stns. x 1 2 stns. + 3 stns. x 2 3 stns. x 3 2 stns. x 1 3 stns. x 2 2 stns. x 2 + 3 stns. x 2 2 stns. x 2 2 stns. x 2 + 3 stns. 2 stns. + 3 stns.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

G A (mm) Model A 123 170 183 217 256 B 48 66 79 100 117 C 1 2 2 3 3 D 40 55 75 87 114 Fn 95 110 Fd 70 114 Fc 26 41 52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6-6.6 8-8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type G Fd C (K flange) J K H B S M 45 A Fn (KF flange) E K (mm) Model A 86.7 114 128 163

VBA-OM-S001

No gap Booster regulator Air tank Booster regulator A B C D E F G H I J K L M Grooves There should be no damage or dust O-rings VBAT05A1 VBA10A VBA11A 150 374 370 307 163 160 100 200 Rc 3/8 257 60 Rc 1/4 20 Air tank There is a slight play on the diagonal parts.

VBA-OM-P018

VBATA1--X104 VBAT-V1 OUT 4 11 () 1 VBAT05A1-U-X104 VBAT10A1-U-X104 1.5MPa Q235B 5L 10L 075 6.6kg 11.5kg IN 3/8 VBAT-V1 OUT 3/8 1/2 1/4 VBA1 VBA1/VBA2 TSG R0003-2007 2 () IN (I) :VBA1 4VBA2 8 6 : OUT VBA2 (J) Rc3/8 VBA1 OUT IN Rc1/2 Rc3/8 () OUT VBA1 12~14Nm(R1/4) VBA2 22~24Nm(R3/8) OUT O Rc1/4 O A B C D E F G H I J K L M O VBAT05A1 VBA10A VBA11A 150 374 370 307 163