Piping: 20 (Body Ported), Stations: 5 Stations, A, B Port: 00T (NPTF)

Piping: 20 (Body Ported), Stations: 6 Stations, A, B Port: 00T (NPTF)

Piping: 20 (Body Ported), Stations: 8 Stations, A, B Port: 00T (NPTF)

Piping: 20 (Body Ported), Stations: 9 Stations, A, B Port: 00T (NPTF)

Piping: 20 (Body Ported), Stations: 10 Stations, A, B Port: 00T (NPTF)

Piping: 20 (Body Ported), Stations: 12 Stations, A, B Port: 00T (NPTF)

Piping: 20 (Body Ported), Stations: 16 Stations, A, B Port: 00T (NPTF)

Piping: 20 (Body Ported), Stations: 18 Stations, A, B Port: 00T (NPTF)

Stations: 20 Stations, Option: D0 (DIN Rail Mount w/o DIN Rail), Port Size: 00T (NPTF)

Stations: 20 Stations, Option: D (DIN Rail Mounting), Port Size: 00T (NPTF)

Stations: 20 Stations, Option: None, Port Size: 00T (NPTF)

Air Cylinder

83 73 5 4 20 CDP-7A 100 4 x 36L Polished round 24 88 78 5 4 25 Split pins and flat washers are included.

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

e b d f h11 (Shaft) f H9 (Hole) l1 c (Min.) a (Max.) 32 GKM10-20 M10 x 1.25 10+0.5 +0.15 40 10 10 52 20 20 40 GKM12-24 M12 x 1.25 12+0.5 +0.15 48 12 12 62 24 24 50, 63 GKM16-32 M16 x 1.5 16+0.5 +0.15 64 16 16 83 32 32 80, 100 GKM20-40 M20 x 1.5 20+0.5 +0.15 80 20 20 105 40 40 * Supplied with clevis pin and clevis pin bracket.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

VVFS2000-30A-6 15 m VVZS3000-21A-6 15 m VVFS2000-30A-7 20 m VVZS3000-21A-7 30 m VVZS3000-21A-8 20 m Option Option Cable Color List of Each Terminal No.

Cylinder with Lock Series MNB

40 20 14 15.5 19 to 600 32 75 18 104.5 58.5 63 1/4 12 45 17.5 35 27 11 75 134.5 56.5 14 20 40 20 14 16.5 23 to 600 32 90 18 119.5 68 80 1/4 18 45 22 40 32 13 95 169 72 22 30 60 25 20 19 33 to 750 37 102 22 150 81 100 1/4 20 55 25 40 41 16 114 189 89 22 30 60 30 20 19 37.5 to 750 37 116 26 170 96 Bore size (mm) N S U V T P J MM GR GE GF K L Q RR H VA W Z ZZ 32 27 154 13 6.5 34 1/8 10.5 M6

One-touch Fittings

Refer to the round type (from page 101).

VCL

(mm) Electrical entry P Port size B C D E F H K L M N A Grommet: G Conduit: C Conduit terminat: T Model Q R Q R Q R S U 13.5 28 64 31 6.5 12.5 27 14 12.8 M4 4.5 22 59 44 50 99 50 66 83 1/8 VCS21 18 36 67.5 31 8.5 12.5 27 18 12.8 M4 6 22 62 44 53 99 53 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 1/4, 3/8 VCS31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101

High Vacuum Angle Valve

Valve size 16 25 40 50 63 80 Bellows assembly u XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 XL1A63-2-101 XL1A80-2-101 Nut assembly o XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 XL1A80-10-1 Bellows assembly * Bellows assembly includes the valve seal 1 (Standard material: FKM).

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

(mm) Electrical entry P Port size A B C D E F H K L M Model Grommet: G Conduit: C DIN connector: D Conduit terminal: T Q R Q R Q R S Q R S 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 22 45 44 43 58 40.5 46.5 99 43 66 1/8 VCW21 18 36 67 31 8.5 12.5 28 18 12.8 M4 22 46 44 44 58 41.5 46.5 99 44 66 1/4 22 40 80.5 36.5 11 15 32 20 19 M5 24 56.5 46 54.5 60 52 48.5 101 54.5 68 1/4, 3/8 VCW31 30 50 85.5

ZSM1-115/121

7.5006 x 103 1.4503 x 104 1 1.4503 x 101 1 x 103 1 x 103 1 x 102 1.0197 x 102 9.8692 x 103 1.0197 x 102 1 7.5006 1 x 106 1 x 103 1.0197 x 105 7.5006 x 103 1.4503 x 102 1 1 x 10 1.0197 x 10 9.8692 1 x 105 1 x 102 1 x 101 9.8692 x 101 1.0197 x 104 7.5006 x 102 1 1.0197 1.4503 x 10 9.8067 x 104 9.8067 x 101 9.6784 x 101 1 x 104 7.3556 x 102 9.8067 x 102 9.8067 x 10 1 1.4217 x 10 1.0133 x 105