3] Response time See page 28 2.5 ms [F 4] Auto-preset See page 29 Manual [F 6] Fine adjustment of display value See page 31 0 [F11] Display resolution See page 32 1000-split [F80] Power saving mode See page 33 OFF [F81] Security code See page 34 OFF [F90] Setting of all functions See page 35 OFF [F96] Check of suction command condition See page 37 OFF [F98] Check of output See page 38 Normal
3] Response time See Page 27 2.5 ms [F 4] Auto-preset See Page 28 Manual [F 6] Fine adjustment of display value See Page 30 0 [F11] Display resolution See Page 31 1000-split [F80] Power saving mode See Page 32 OFF [F81] Security code See Page 33 OFF [F90] Setting of all functions See Page 34 OFF [F96] Check of suction command condition See Page 36 OFF [F98] Check of output See Page 37 Normal
Setting of [F 4] Auto-preset completed. Press button in measurement mode to set pressure.
0] [F] 2 2 [F 0] 22 SI kPa [F 1] OUT1 23 HYS ONOFF -70 kPa(P_1) 10 kPa(H_1) [F 2] OUT2 25 A ON ON 5 kPa(H_2) OFF OFF 0 kPa(H_3) ON 1 kPa(H_4) -20NO.ZK2-OM00801-B A [F 3] 27 2.5 ms [F 4] 28 [F 6] 30 0% [F11] 31 1000 [F80] 32 OFF [F81] 33 OFF [F90] 34 OFF [F96] 36 OFF [F98] 37 [F99] 39 OFF -21NO.ZK2-OM00801-B [F 0] (kPa/MPa) <> [F 0] [F 0] 2 bar psi InHg mmHg MPa
E E F G H G H I I J K L M N O J K L 8F7 through +0.028 +0.013 +0.028 +0.013 8F7 through M 11 through N O 12.5 300.05 250.03 300.025 300.025 300.025 300.025 300.025 300.025 300.025 300.025 300.025 300.025 300.025 300.025 250.03 12.5 11 through P P Q M8 x 1.25 R28 Q 150.03 180.03 M8 x 1.25 8.5 R50 4 33 12.5 8.5 20 550.05 3 22 22 12.5 R7 R27 20 22 22 R7 [mm] [mm] Model NAAMS code A B C D E F
Round head combination screw Thread type Nil Rc G F Plug Inserted into an unused cylinder port and SUP/EXH ports. Purchasing order is available in units of 10 pieces.
Electric actuators / Common precautions . 33 6.1 Design and selection . 33 6.2 Mounting . 34 6.3 Handling . 35 6.4 Operating environment . 36 6.5 Maintenance . 37 6.6 Precautions for actuator with lock . 37 7.
VQZ335 Rubber 21.6 (1.2) 25 or less 33 or less VQZ300 77 VQZ325 Metal 15.3 (0.85) 17 or less 22 or less N.O. VQZ345 Rubber 21.6 (1.2) 25 or less 33 or less Note 1) Value on sub-plate with maximum port size. Note 2) The response time is subject to the pressure and the air quality. The values are given for double solenoid types.
Linearity (77F) 0.15% F .S. Repeatability (77F) 0.6% F .S. 0.5% F .S.
339 H 323 352 I 10 15 15 32 15 32 15 32 589 to 614 633 to 673 564 to 589 542 to 581 579 to 605 571 to 610 MF -90 15 32 A G D Note 1) F D Note 1) D Note 1) F F Y C C C Y Y B G A 90 B 90 B G A D Note 1) 90 G A H X X X D Note 1) D Note 1) B B B F E F F E A H A G G RG RT RS B 296 305 C R310 R445 D 93 129 E 60 87 F 10 15 G 6 7 B 296 309 C R390 R495 D 93 129 E 60 87 F 10 15 G 6 7 B 299 307 C R350
(ZSE30AF (for compound pressure) 3.5% F .S.) Note) When the display calibration function is used, the set pressure value may change 1 digit. 41 ZSE30A(F)/ISE30A Series The F in ( ) shows the function code number. Refer to the Operation Manual for the details of operation procedures and function codes.
Note 2) They are not applicable in case the thread type is N or F.
(N) Allowable end load F (N) Allowable end load F (N) MGCM40Stroke -R (Slide bearing type) St: Stroke (mm) Allowable end load F (N) MGCM50Stroke -R (Slide bearing type) St: Stroke (mm) Allowable end load F (N) 8-22-8 9 Series MGC Guide Cylinder Compact Type Ball Bushing Bearing Allowable End Load and Deflection MGCL20Stroke -R MGCL25Stroke -R MGCL32Stroke -R (Ball busing bearing type) (Ball
Bellows seal C Double acting Bellows seal F Single acting (N.C.)
Black 0 V G Shield Connector pin arrangement A phase output pulse G A DB phase output pulse F B H E D C -X Counter value 0 1 2 3 4 3 2 1 699
Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K
Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K
(mm) A B C D E F G H J L Port size Bracket part no.
The VZM series is a 5 port mechanical valve. It is compact in design with a large flow capacity (VZM400 Cv 0.55, VZM500 Cv 0.6). The VZM is available in a metal or rubber spool style, with a variety of actuator choices and optional external pilot.Fluid: air, inert gas, Operating pressure: 0.15 to 0.7MPa, Ambient and fluid temp: -5° to 60°C (no freezing), Effective area (Cv): 0.6, Port size
G Pressure gauge*7 E Vacuum pressure switch (Vacuum 2 outputs) F Vacuum pressure switch (Compound pressure 2 outputs) !