High Vacuum Angle Valve, XL Series

.: 120C [248F]) Uniform baking temperature Excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. 3, 4, 5 3 120 120 Comparison with KF25 flange 100 100 Body 1 4 Temperature (C) Body 2 80 5 2 Temperature (C) Body 3 1 1, 2 Bellows 60 30 0 60 30 0 Time (minutes) Time (minutes) Valve F=(1.8xC

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

R 1/ 4NPT 1/4G 1/ 4 (with M5 male thread) URJ 1/4TSJ 1/ 4 Port size Leak rate 1 x 10 -5Pa. m 3/ s 1 x 10 -10Pam3/s 1MPa 1MPa 100kPa 100kPa Rated pressure range 0 0 0 0 -100kPa -100kPa Output Switch output 2 outputs NPN or PNP Analog output Output voltage 1 to 5V Features 2 For General Fluids High Precision Digital Pressure Switch Series ZSE50F/ISE50 How to Order M ISE50 02 22 L For positive

Air Cylinder RSQ Series Stopper Cylinder

Cylinder stroke (mm) 1 0 , 1 5 , 2 0 1 0 , 1 5 , 2 0 Solid state switch (see P.ll tordetails.) Rod end contiguration Auto switch mounting bracket o-Am H AEOH A-7trC A80C D F79 D J79 D J79C ' The leler model is applied only 10 bore siz$ i M 3 r 0 . 5 x S l The slandad ead w 6 anglh s 0.5m.'L' 5 added lor 3m Ltrdfl,#:"[ffi."

FSQ seies

Cylinder stroke (mm) 1 0 , 1 5 , 2 0 1 0 , 1 5 , 2 0 Solid state switch (see P.ll tordetails.) Rod end contiguration Auto switch mounting bracket o-Am H AEOH A-7trC A80C D F79 D J79 D J79C ' The leler model is applied only 10 bore siz$ i M 3 r 0 . 5 x S l The slandad ead w 6 anglh s 0.5m.'L' 5 added lor 3m Ltrdfl,#:"[ffi."

Digital Flow Switches, Series PF2A, Series PF2W

Note 6) The display unit is comformed to CE mark. 14 Series PF2W Flow Characteristics (Pressure Loss) PF2W720, PF2W520 PF2W740, PF2W540 PF2W704, PF2W504 0.030 0.05 0.07 0.025 0.06 Pressure loss (MPa) 0.04 Pressure loss (MPa) Pressure loss (MPa) 0.020 0.05 0.03 0.04 0.015 0.03 0.02 0.010 0.02 0.01 0.005 0.01 0 0 0 10 12 14 16 2 0 4 6 8 40 35 30 25 20 15 10 5 0 4.0 3.5 3.0 2.5 2.0 1.5 1.0

tTV2000/3000

0 5 I 0 5 -a o -1 0 50 75 100 5 0 0 1 0 0 0 0 25 50 75 100 Input signal %F S Input signal %F S Relief flow characteristics suppty pressure: o 2MPa Pressure characteristics set pressure:0 05MPa Flow rate characteristics supptv pressure:0 2MPa 1 0 a $ 0 5 s 3 0 0 o o = o 0 0 0 1 0 2 0 Supply pressure lvlPa tlectro-Pneulnatis Series lTv203tr Repeatability Hysteresis Linearity @ 0 5 f, I3 o o

Pneumatic Transfer System Series MF

339 H 323 352 I 10 15 15 32 15 32 15 32 589 to 614 633 to 673 564 to 589 542 to 581 579 to 605 571 to 610 MF -90 15 32 A G D Note 1) F D Note 1) D Note 1) F F Y C C C Y Y B G A 90 B 90 B G A D Note 1) 90 G A H X X X D Note 1) D Note 1) B B B F E F F E A H A G G RG RT RS B 296 305 C R310 R445 D 93 129 E 60 87 F 10 15 G 6 7 B 296 309 C R390 R495 D 93 129 E 60 87 F 10 15 G 6 7 B 299 307 C R350

I/O Configurator (NFC version)

The number of effective points is limited within the set range of the output size. 0 to 32 points (0 to 4 bytes) Increase and decrease by 8 points (1 byte). d) Valve manifold 32 points/ 4 bytes Available output size e) Wireless communication Active/Idle Active Available If it is set to "Idle", the wireless communication is disconnected. f) AD refresh time 0.1/0.2/0.5/1/2/5/10/30/60 s 1 s

I/O Configurator (NFC version)

The number of effective points is limited within the set range of the output size. 0 to 32 points (0 to 4 bytes) Increase and decrease by 8 points (1 byte). d) Valve manifold 32 points/ 4 bytes Available output size e) Wireless communication Active/Idle Active Available If it is set to "Idle", the wireless communication is disconnected. f) AD refresh time 0.1/0.2/0.5/1/2/5/10/30/60 s 1 s

MGP

9 and @0 *Seal kit includes piston seal !7, rod seal !8, gasket A !9 and gasket B @0.

VZS

0 Refer to How to Order Light Cover Assembly on page 3-7-8.

Environment

0 !1 !2 !

Environment

0 0 0 0 4 8 12 16 20 24 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] L6 [mm] 600 600 600 600 Z 400 400 400 400 200 200 200 200 0 0 4 8 12 16 20 24 0 0 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load

High Purity Fluoropolymer

M M H W Y L E 1/8 LQ1H11-F LQ1H12-F LQ1H21-F LQ1H22-F LQ1H23-F LQ1H24-F LQ1H31-F LQ1H32-F LQ1H33-F LQ1H34-F LQ1H35-F LQ1H36-F LQ1H41-F LQ1H42-F LQ1H43-F LQ1H44-F LQ1H51-F LQ1H52-F LQ1H53-F LQ1H54-F LQ1H61-F LQ1H62-F LQ1H63-F LQ1H64-F 4 3 6 4 6 4 10 8 6 10 8 6 12 10 12 10 19 12 19 12 25 19 25 19 11.5 18.5 10 10 26.5 1/8" Class 1 Rc (NPT) Port size 18.5 35 1/8" 16.5 14 14 15 (L) 21.5 36.5

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

M H L M E W Y 1/8 LQ1H11-F LQ1H12-F LQ1H21-F LQ1H22-F LQ1H23-F LQ1H24-F LQ1H31-F LQ1H32-F LQ1H33-F LQ1H34-F LQ1H35-F LQ1H36-F LQ1H41-F LQ1H42-F LQ1H43-F LQ1H44-F LQ1H51-F LQ1H52-F LQ1H53-F LQ1H54-F LQ1H61-F LQ1H62-F LQ1H63-F LQ1H64-F 4 3 6 4 6 4 10 8 6 10 8 6 12 10 12 10 19 12 19 12 25 19 25 19 11.5 18.5 10 10 26.5 1/8" Class 1 Rc (NPT) Port size VC 18.5 35 1/8" 16.5 14 15 14 L VDW 21.5

VCC

Manifold C C 1 V V V C C 1 0 0 Valve Specification Sheet Fill in the symbol for stainless steel fitting. For others, mark necessary items with a circle.

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves Air Grippers Modular F.

•

uto switch mounting 40 50 63 Reed Switch B71 0-871 A31-0-A31 B76 0-876 A37--D-A37 877-0-877 A39-0-A39 ~~7B8 . ~7K7 BM1..Q4 BM105 BM1-06 0-85:!l6, ~5'K5 BA..Q4 BA-05 BA-06 D-A:3, DA4 D.G3K3 B01-04M B001..Q5M B01-06M B79-0-879 A41--0-A41 880-0880 A49--0-A49 851 0-851 Note)These auto SWitch as cannot be used m magnetic fields.

Air Cylinder NCQ7 Series Compact Cylinder

1 .30 1.42 1.54 250 1 . 1 2 1 . 1 6 '1.18 1 . 2 1 1.24 1 . 2 7 1.30 1 .33 '1.40 1.46 1.53 1 .59 '1.72 1.84 2.O9 2.22 300 1 .58 1.63 1 .66 1 . 7 0 1 . 7 4 1 .78 1.82 1.86 r.95 2.03 2 . 1 2 2.2\ 2.38 2.55 2.84 3.01 400 3.10 3.16 3.20 3.26 3.32 3.44 3.50 \r.o I 3.73 3.97 4.20 4.44 4.67 5 . 1 9 Weight sw Dtype {rbs) 056 0.099 0.104 0 . 1 1 0 0.1 17 0.1230.1300.1340.141 0.154 0 . 1 6 3o.172 0.185

asilltr

1 .30 1.42 1.54 250 1 . 1 2 1 . 1 6 '1.18 1 . 2 1 1.24 1 . 2 7 1.30 1 .33 '1.40 1.46 1.53 1 .59 '1.72 1.84 2.O9 2.22 300 1 .58 1.63 1 .66 1 . 7 0 1 . 7 4 1 .78 1.82 1.86 r.95 2.03 2 . 1 2 2.2\ 2.38 2.55 2.84 3.01 400 3.10 3.16 3.20 3.26 3.32 3.44 3.50 \r.o I 3.73 3.97 4.20 4.44 4.67 5 . 1 9 Weight sw Dtype {rbs) 056 0.099 0.104 0 . 1 1 0 0.1 17 0.1230.1300.1340.141 0.154 0 . 1 6 3o.172 0.185