Stations: 4 Stations, Piping: U Side: Open; D Side: Closed, Thread Type: NPT, Supply Unit Components: w/o Flow Adj. Valve; w/Stop Valve, Return Unit Flow Range: 2 to 16 L/min, Supply/Return Port Size: 3/8

Stations: 1 Station, Piping: U Side: Closed; D Side: Open, Thread Type: NPT, Supply Unit Components: w/o Flow Adj. Valve; w/Stop Valve, Return Unit Flow Range: 2 to 16 L/min, Supply/Return Port Size: 3/8

Stations: 1 Station, Piping: U Side: Open; D Side: Closed, Thread Type: NPT, Supply Unit Components: w/o Flow Adj. Valve; w/Stop Valve, Return Unit Flow Range: 2 to 16 L/min, Supply/Return Port Size: 3/8

Stations: 2 Stations, Piping: U Side: Closed; D Side: Open, Thread Type: NPT, Supply Unit Components: w/o Flow Adj. Valve; w/Stop Valve, Return Unit Flow Range: 2 to 16 L/min, Supply/Return Port Size: 3/8

Stations: 2 Stations, Piping: U Side: Open; D Side: Closed, Thread Type: NPT, Supply Unit Components: w/o Flow Adj. Valve; w/Stop Valve, Return Unit Flow Range: 2 to 16 L/min, Supply/Return Port Size: 3/8

Stations: 6 Stations, Piping: U Side: Open; D Side: Open, Thread Type: NPT, Supply Unit Components: w/o Flow Adj. Valve; w/Stop Valve, Return Unit Flow Range: 2 to 16 L/min, Supply/Return Port Size: 3/8

Stations: 6 Stations, Piping: U Side: Closed; D Side: Open, Thread Type: NPT, Supply Unit Components: w/o Flow Adj. Valve; w/Stop Valve, Return Unit Flow Range: 2 to 16 L/min, Supply/Return Port Size: 3/8

Valve; w/Stop Valve), Return Unit Flow Range: 20 (2 to 16 L/min), Supply/Return Port Size: 03 (3/8)

SUPPLY SIDE TYPE MANIFOLD. F19. 400.00000 lb. DIGITAL FLOW SWITCH, WATER, PF3W.

Process Valve

H (Conduit terminal: T) I (DIN terminal: D) Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U Model VNA2-10A VNA2-15A VNA3-20A VNA4-25A 3 8 1 2 3 4 63 144.5 55 125.5 52 42 26 29 4.5 14 24.3 72.5 2.3 80.5 25 75 34 80 84.5 124 135.5 151.5 137 153 156 172 60.5 73 1 80 90 62 72 50 60 31 36 35 40 5.5 6.5 17.5 20 28.3 33.3 84 100 2.3 2.3 92 108 30 35 84 90 43 49 89 95 93.5 99.5 Port

Air Cooled Aftercooler Series HAA 1

ID AMG Accessory (Option) HAA7 HAA7 HAA15 HAA22 HAA37 Auto-drain Applicable model AFF Working Principle HAA7-F HAA7-S HAA15-F AD402-03 HAA15-S HAA22-F HAA22-S HAA37-F AD402-04 Dust-protecting filter Mounting bench AM HAA37-S Inlet side air (HOT AIR) Push button switch Pilot light The accessories should be mounted by user. Misc.

RHC

Applicable bore (mm) C D d H Applicable bore (mm) C D d H 5 26 30 12.5 8 M8 x 1.25 15 M22 x 1.5 26 13 20 20 SOR-20 NT-02 6 32 36.9 16.5 8 M10 x 1.25 19.6 M24 x 1.5 32 17 25, 32 25 SOR-25 NT-03 8 38 43.9 21.0 9 M14 x 1.5 M30 x 1.5 25.4 38 22 40 32 SOR-32 NT-04 11 41 47.3 26 11 M18 x 1.5 31 M33 x 2.0 41 27 50, 63 40 SOR-40 NT-05 13 31 M22 x 1.5 37 32 80 NT-08 16 39 M26 x 1.5 47.3 41 100 NT-

Fluoropolymer Piping Equipment

Symbol 2 3 4 Metric sizes 04 06 08 10 12 4 x 3 6 x 4 8 x 6 10 x 8 12 x 10 Symbol B A Inch sizes Basic size With reducer 03 05 07 11 13 1/8" x 0.086" 3/16" x 1/8" 1/4" x 5/32" 3/8" x 1/4" 1/2" x 3/8" Note 1) Applicable fittings: LQ2 Note 2) For details of the applicable tubing sizes, refer to page 945.

Fieldbus System

C8 C10 C12 02 03 B CM With 8 One-touch fitting With 10 One-touch fitting With 12 One-touch fitting 1/4 3/8 Bottom ported 1/4 Mixed sizes Note 3) When I/O Unit is selected, it is shipped separately and assembled by customer. Refer to the attached operation manual for mounting method. Note 4) Refer to page 50 for details on enclosure.

Pilot Operated Regulator AR425 to 935 Series

Pressure gauge port size Port size Model AR425/435 AR625/635 AR825/835 AR925/935 1/4, 3/8, 1/2 3/4, 1 1 , 1 2 80 98 126 160 145.5 155 216 241 3 7 5 10 1/4 1/4 1/4 1/4 39.5 43 75 90 50.0 85 48 52 80 90 B24P B25P 67 78 110 140 73 78.5 94.5 4 1 2 1 109.5 680

Safety Speed Control Valve (SSC Valve) Series ASS 1

80.0 3/4, 1 90.0 950 ASS110 2.4 1/8 5.4 97 Meter-in control ASS310 16.5 1/4, 3/8 23.0 220 Specifications Air Fluid 0.7 MPa Max. operating pressure AS 5 to 60C (No freezing) Ambient and fluid temperature 0.1 to 0.5 MPa Set pressure ASP How to Order ASN 02 B ASS 00 3 AQ ASV Body size Accessory 1 8 Nil None With bracket 1 3 5 6 AK 8 3 B 3 4 1 Port size ASS Applicable series Port size 01 02 03

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

Bore size (mm) 32, 40 50, 63 80, 100 Bore size (mm) 32 40 50 63 80 100 Mounting bracket BT-03 BT-05 BT-06 (1) MB-L03 MB-L04 MB-L05 MB-L06 MB-L08 MB-L10 Foot A set of following stainless steel mounting screws is attached. (A mounting bracket itself is not attached. Please order it separately.)

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

Bore size (mm) 32, 40 50, 63 80, 100 BT-06 Bore size (mm) 32 40 50 63 80 100 Mounting bracket BT-03 BT-05 (1) Foot MB-L03 MB-L04 MB-L05 MB-L06 MB-L08 MB-L10 A set of following stainless steel mounting screws is attached. (A mounting bracket itself is not attached. Please order it separately.)

Precision Cylinder Series MTS

MT-S16 16 Weights MT-S20 20 (g) MT-S25 25 End lock additional weight 50 157 222 400 547 1,000 1,533 Standard stroke (mm) MT-S32 32 Model 200 699 912 1,495 2,208 25 52 138 186 350 487 918 1,420 175 649 851 1,412 2,095 5 36 150 599 790 1,330 1,983 10 40 125 549 729 1,247 1,870 15 44 100 194 294 500 669 1,165 1,758 20 48 75 175 258 450 608 1,083 1,645 30 56 MT-S40 40 MTS8 MTS12 MTS16 MTS20

High Power Cylinder Series RHC

Applicable bore size C D d H Applicable bore size C D d H 5 12.5 15 26 30 M8 x 1.25 8 M22 x 1.5 26 13 20 20 SOR-20 NT-02 6 16.5 19.6 32 36.9 M10 x 1.25 8 M24 x 1.5 32 17 25/32 25 SOR-25 NT-03 8 21.0 25.4 38 43.9 M14 x 1.5 9 M30 x 1.5 38 22 40 32 SOR-32 NT-04 11 26 31 41 47.3 M18 x 1.5 11 M33 x 2.0 41 27 50 40 SOR-40 NT-05 11 26 31 M18 x 1.5 27 63 NT-05 13 31 37 M22 x 1.5 32 80 NT-08 16 39