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(Request)[STX] 01WLOC01 [ETX] [26h] (Response)[STX] 01[ACK] [ETX] [06h] Request message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address W Request message to write [ACK] Normal response message LOC Key-lock setting [06h] BCC value 01 Read information (01All locked) [26h] BCC value 5.8 Command explanation HRSH Series 5-20 HRX-OM-R028 Chapter 5 Simple communication

ZS-22-B Response frequency 200Hz 200Hz 200Hz 200Hz 200Hz 200Hz (5ms) (5ms) (5ms) (Sms) (Sms) (5ms) (With two M4 mounting thread) Noj. l) Hysteresis Adjustable AdjlJSlable A~uslable Adjustable A~US1ab' A~lJstabte mode m;1 Cf rm: (}i jl t(rml t~,~I~IIm] Cldj.t;,' II"mI l~j~Cf nn'e:, 1: &ij. orm::fe,1 Hysl21 esls Wmdow Fixed Fi xed Fixed Fixed Fixed Fixed co6:rearator m e (3digit) (3digit)

Construction VHS20/30 VHS40/40-06/50 y i u w w t t r q IN OUT OUT IN q e o EXH. EXH. VM Component Parts No.

G <& C D, T G, C S L, Z S L, Z 8 8 8 8 8 8 8 8 8 8 8 8 T 9 '01 !" % % :"; % %%& !" % % :; S Note) 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) How to Order Manifold Arrangement of solenoid 9= Write both the base part number and the solenoid valve to be mounted or blanking plate part number. !"

06 ZZR1 1 RV3 ZR1 1 R1 ZR1 Port location Stations 01 R L Left side Right side 1 Arrangement (Right valve station which is looked from valve side is first station.)

SUP. 3 1 2 3 1 2 3 1 2 E Padlock mounting position D C SUP J 2 2 x K A T IN OUT AA 3 L 2 x P1 (Port size) B V BB U Built-in silencer (Option) M (Width across flats) 3 N P2 (Port size) Q EXH Y Bracket (Option) R S X W Dimensions (mm) Standard specifications Model P1 P2 A B C D E F G H I J K L M 1/8, 1/4 1/4, 3/8 1/8 1/4 3/8 1/2 1/2 66.4 80.3 104.9 110.4 134.3 22.3 29.4 38.5 42 53 40 53 70

CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Nil F N T Rc G NPT NPTF VR Body type Body ported Base mounted 2 4 Port size VH Valve option VPA342 VPA344 VPA542 VPA544 VPA742 VPA744 Port size Rc Without sub-plate 1/8 1/4 3/8 1/2 Symbol Nil V Standard Vacuum VPA544 VHS Nil JIS Symbol Option Option 01 02 03 04 VPA342 542 742 Description

U 4(WA ) 4(WA ) 3(WA ) 3(WA ) () DC24V,12V +1/4 DC24V W WA + ,W13WA 43 DC24V,12V 62ms i1:i2 WA 11 No.SYJ300-OMU0003 SYJ Series S 904 3.57 JIS C 3306 0.5mm L M DIN ) (Z) 22 3 0.4Nm (DZ) (1.652.5N m) () NL: () () (3 ) 1V (0.20.25Nm) DIN Y Y DIN DIN 8mm DIN D SY100-61-3-05 DDIN 9.4mm D DIN DC24V 24V SY100-61-3-05 N N DC12V 12V SY100-61-3-06 AC100V 100V SY100-61-2-01

Nil Metric thread (M3, M5) Rc NPT G N F Bore size Bore size Applicable series M3 M5 01 02 03 04 M3 x 0.5 M5 x 0.8 1/8 1/4 3/8 1/2 AS1000 AS1000 AS2000 AS2000, 3000, 4000, 5000 AS3000, 4000, 5000 AS4000, 5000 650 A AS Series Speed Controller: Standard Type In-line Type Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

VC Model VDW VQ Thread type Nil T F N Orifice size Rc NPTF G NPT 1 2 3 4 1.5 mm 2.2 mm 3 mm 4 mm VX2 VX Refer to the table (1) given below for availability. VX3 Port size 01 02 03 1 8 1 4 3 8 VXA Valve/Body 4 Common/Single unit Refer to the table (1) given below for availability.

Nil P NPN specification PNP specification Cable full length 1 m 2 m Symbol 01 02 Individual Special Order (Please contact an SMC sales representative.) Note 1) 11 m or longer power supply cables are not CE Marking-compliant. Note 2) Use standard power supply cables for 3 m and 10 m lengths.

AMR3000 1349161A 13579 135711A 135011 G75 135714 AMR4000 131515A 135511 13154A 131514 G90 635327 AMR5000 131515A 13589 135811A 131613 G100 635327 AMR6000 131614A 13569 135614-1A 135413 G115 63555 Diaphragm ass'y Element (1) Body Housing Bowl Bonnet Brass Stainless steel NBR Fiber Aluminum alloy Aluminum alloy Aluminum alloy t y u i o !

Therefore, in performance of Test Operation (T) Positioning Operation (I) with the set-up software, actuators move distance per pulse is set per pulse unit of the encoder. Item Setting range Unit Description Set the command speed of the servo motor for execution of positioning Motorspeed 0 ~ Allowed Speed for each actuator r/min (Motor rotations/min).

G33-P2-N01-X30 IR1010G33-4-01 G33-P4-N01-X30 IR1020G33-10-01 G33-P10-N01-X30 011/84 Rc NNPT FG 00.0050.2MPa 10.010.4MPa 20.010.8MPa PRECI SI O N REG U LATO R I R101BG M AX.

G43-P2-N01-X30 IR3010G43-4-01 G43-P4-N01-X30 IR3020G43-10-01 G43-P10-N01-X30 02:1/4 03:3/8 04:1/2 Rc FG NNPT 00.010.2MPa 10.010.4MPa 20.010.8MPa PRECI SI O N REG U LATO R I R302BG No.

M5 x 0.8 SYJA514-01 0.32 0.46 1.1 0.32 0.41 1.2 75 (Without subplate 45) Rc 1/8 N.C. Base mounted (with sub-plate) 0.34 0.48 1.2 0.33 0.37 1.3 N.O. SYJA524-01 SYJA712-01 SYJA722-01 SYJA714-01 SYJA714-02 0.76 0.69 0.69 0.66 0.63 0.64 0.51 0.42 0.34 0.33 0.45 0.48 2.5 2.4 2.7 2.6 2.3 2.3 0.77 0.72 0.71 0.74 0.70 0.68 0.43 0.38 0.32 0.31 0.21 0.31 2.8 2.7 2.9 3.0 2.8 2.7 N.C. N.O.

Note 2) 52-SY9000 has no bracket. 5 7 9 52-SY5000 52-SY7000 52-SY9000 Thread type Type of actuation Nil F N T Rc G NPT NPTF 2-position single 2-position double 3-position closed centre 3-position exhaust centre 3-position pressure centre 1 2 3 4 5 A, B port size (Body ported type) Piping type Port size Applicable series Symbol 01 C4 C6 C8 N3 N7 N9 02 C8 C10 N9 N11 02 03 C8 C10 C12 N9 N11