HRX-OM-M090

HRS Series 6.1 Option J [Automatic fluid filling] 6-1 HRX-OM-M090 Chapter 6 OptionOptional Accessories 6.2 Option M [DI water (Pure water) piping] 6.2.1 Option M [DI water (Pure water) piping] This option is for customers who use DI water (pure water) as circulating fluid.

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

(Switch body only)] NPN output / Wiring bottom entry ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] NPN output / Wiring top entry Note 4) Digital type ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] PNP output / Wiring bottom entry ISE35-R-65-MLA [ISE35-R-65-M (Switch body only)] PNP output / Wiring top entry Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket

Microspeed Cylinder

number XB13 CG1 Standard part number XB13 MGCM Standard part number XB13 MB Standard part number XB13 CX2 Standard part number XB13 CU Standard part number M L XB13 CQ2 Standard part number XB13 CXW Standard part number M L XB13 CQS Standard part number XB13 CXS Standard part number Microspeed cylinder XB13 MXU Standard part number M L XB13 CXT Standard part number Note 1) Avoid operating

Dedicated Controller

OFF SUP 1MC 5Ry SGDE servomotor Motor 1MC 1 R U V SGDE servo pack 2 1MC M T 3 W 1CN 4 150 PULS PULS SIGN SIGN CLR CLR 1 2 3 4 5 6 Be sure to ground.

HRX-OM-R016

HRS Series 6.1 Option J [Automatic fluid filling] 6-1 HRX-OM-R016 Chapter 6 OptionOptional Accessories 6.2 Option M [DI water (Pure water) piping] 6.2.1 Option M [DI water (Pure water) piping] This option is for customers who use DI water (pure water) as circulating fluid.

HRX-OM-W038

HRS Series 6.1 Option J [Automatic fluid filling] 6-1 HRX-OM-W038 Chapter 6 OptionOptional Accessories 6.2 Option M [DI water (Pure water) piping] 6.2.1 Option M [DI water (Pure water) piping] This option is for customers who use DI water (pure water) as circulating fluid.

HRX-OM-R005

HRS Series 6.1 Option J [Automatic fluid filling] 6-1 HRX-OM-R005 Chapter 6 OptionOptional Accessories 6.2 Option M [DI water (Pure water) piping] 6.2.1 Option M [DI water (Pure water) piping] This option is for customers who use DI water (pure water) as circulating fluid.

VCS

Series 2 3 4 Class 2 Class 3 Class 4 OUT port size Symbol 01 02 Port size 1/8 (6A) Stations 2 3 4 5 n Uside D side 1/4 (8A) Material All IN ports are 3/8.

HRX-OM-O021

HRS Series 6.1 Option J [Automatic fluid filling] 6-1 HRX-OM-O021 Chapter 6 OptionOptional Accessories 6.2 Option M [DI water (Pure water) piping] 6.2.1 Option M [DI water (Pure water) piping] This option is for customers who use DI water (pure water) as circulating fluid.

Compact Cylinder with Lock Series CLQ

15.0 19.6 25.4 31.2 37.0 47.3 NT-02 NT-03 NT-04 NT-05 NT-08 NT-10 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 8 10 10 14 18 22 -0.040 -0.076 -0.040 -0.076 -0.040 -0.076 -0.050 -0.093 -0.050 -0.093 -0.065 -0.117 17 Compact Cylinder with Lock Series CLQ Simple Joint/32 to 100 A type mounting brackets 2-D T1 T2 M W V U F B E (mm) Joint and mounting brackets (A, B type) part nos.

Air cooled Thermo-con (Compact type)

Length of communication cable for RS-485 shall be limited to around 500[m] in total, and that for RS232C shall be 15[m].

Air-hydro Unit

Conditions: Operating pressure 0.5 MPa, Operating oil Turbine oil Class 1 (ISO VG32), Piping length 1 m AS500-06 AS420-02/03/04 Piping bore Piping bore Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) No load No load No load No load CC CC Load ratio Load ratio Refer to Best Pneumatics No. 7 for the details of speed controllers.

PSxx-OMR0001CN

kPa () 3 -20220 kPa 600 kPa 1.5 4 5 L/min 12 L/min 22 L/min DC24 V 10(p-p)10() 25 mA 1 (NPN PNP) 10 mA 26.4 V 1 V (10 mA ) 0.005 mm 0.010 mm 0.020 mm (25 ) 0.010 mm 0.015 mm 0.030 mm 0 0 (3) (20) 2 LCD 3 7 (/) 6 7 () IP67 5 050 -2070 () 3585RH() AC1000 V 50/60 Hz 1 2 M(DC500 V ) Rc1/8 C 4 6 G1/8(ISO1179-1) F G1/8(ISO1179-1) M12-4 4 4 5 m 0.72 mm

PSxx-OMT0001CN

GH64 200 kPa 90% -ISA3-F ISA3-G ISA3-H 1 m 1 m 1 m [sec] [sec] [sec] [mm] [mm] [mm] [mm] 3 m 3 m 3 m [sec] [sec] [sec] [mm] [mm] [mm] [mm] 5 m 5 m 5 m [sec] [sec] [sec] [mm] [mm] [mm] [mm] [mm] [mm] -19No.PS-OMT0001CN-E 2 () [()][] 1.5 F42.51 m3 m5 m GH641 m3 m5 m 200 kPa ISA3-F ISA3-G 1 m3 m5 m 1 m3 m5 m [mm] [mm] 9 0 10010 ISA3-H 1 m3 m5 m [mm] 29 0 30030 -20No.PS-OMT0001CN-E

Compact Cylinder with Air Cushion

Interchangeable mounting The mounting dimension "M" is the same as compact cylinder series CQS/CQ2 .

AC Servo Motor Driver (Pulse input type/Positioning type)

Other than positioning mode: Actuator travel distance at 10 [m/pulse] per pulse. Positioning Mode: Minimum actuator travel distance of 1[m]. *4.

Series 10-, 21- AW-B Filter Regulator

Please contact SMC regarding the connection thread NPT and pressure gauge supply for psi unit specifications. 1080 A 1021-AW-B Filter Regulator Dimensions J J D M N T AW20-B 1021Bracket (Option) S U Panel fitting dimension F Y R Applicable tubing 6/4 W C Q V BB IN OUT OUT K H IN Z P2 Plate thickness 10-/21-AW20-B: Max. 3.5 Pressure gauge (Option) (Pressure gauge port size) B 2 x P1 (Port

AC Servo Motor Driver (SSCNET Type)

Power supply is AC200V single phase (Note 4) Controller Forced Alarm forced stop stop ON OFF RA1 RA2 MC MC SK Driver Servo amplifier Servo motor NFB MC CNP1 L1 1-phase 200 to 230VAC CNP3 (Note 6) U 2 L2 U Motor [1] V 3 L3 V M N W 4 W 1 P1 (Note 1) P2 PE CNP2 P (Note 2) C [3] [2] D (Note 3) Encoder CN2 Encoder cable L11 L21 CN3 CN3 24VDC Forced stop EM1 DOCOM (Note 5) DOCOM DICOM (Note 5)

IDX-OM-Z004

K 1.6MPa 1.2.4 P 1.2.5 R 30A (IDF100F, IDF125F, IDF150F) 30Ma 1.2.6 V ON 1.5 OFF 0.5 1.2.7 5 4 1.2 IDF100150F-W 1 2 IDX-OM-Z004 1 1.3 A ( 4) ( 4) Y 3 A 1.3 IDF100150F-W 1 3 IDX-OM-Z004 1 ( 5) ( B 5) Y V IDF100F V IDF125F V IDF150F B 1.3 IDF100150F-W 1 4 IDX-OM-Z004 1 3.6 5.2 (IDF100F, 125F) R OFF 5.2 L1 L2 L3 M5 9.5mm 3.5mm 2 1,2 3,4 5,6 L1,L2,L3

SFOD-OMT0009CN

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