Part Number Description: MFLD JCT COVER 5-STA   Product Line: V   Product Line Description: VALVE   Family Code: 251   Family Description: VFS2000 SOL VALVE 4/5 PORT   Class Code: 22   Part Code: 2   Reference Code:  J   Click here to report information errorImage shown may not match exact part number

ASSY KIT-5 STA.   Product Line: V   Product Line Description: VALVE   Family Code: 273   Family Description: VS4 CLASS 1) SOL 4/5 PORT   Class Code: 22   Part Code: 2   Reference Code:  K   Click here to report information errorImage shown may not match exact part number

ASSY KIT-5 STA.   Product Line: V   Product Line Description: VALVE   Family Code: 273   Family Description: VS4 CLASS 1) SOL 4/5 PORT   Class Code: 22   Part Code: 2   Reference Code:  K   Click here to report information errorImage shown may not match exact part number

Part Number Description: COND CVR 5-STA UNIT   Product Line: V   Product Line Description: VALVE   Family Code: 254   Family Description: VFS5000 SOL VALVE 4/5 PORT   Class Code: 22   Part Code: 2   Reference Code:  J   Click here to report information errorImage shown may not match exact part number

Part Number Description: NVFS 5-STA WIRE ASSY'   Product Line: V   Product Line Description: VALVE   Family Code: 254   Family Description: VFS5000 SOL VALVE 4/5 PORT   Class Code: 21   Part Code: 2   Reference Code:  J   Click here to report information errorImage shown may not match exact part number

CVR 5-STA UNIT   Product Line: V   Product Line Description: VALVE   Family Code: 252   Family Description: VFS3000 SOL VALVE 4/5 PORT   Class Code: 22   Part Code: 2   Reference Code:  J   Click here to report information errorImage shown may not match exact part number

4/5 PORT SOLENOID VALVE. 5 STA MFLD & VALVE ASSY. 1.10522 lb. VVD.

SHCS, 5/16-18X5/8. ACTUATOR. NCQ2 NO SIZE RATING PART. .00000 lb. 21.

EX260-SEC-A_eng

(SI unit side) Valve manifold Output No. 1 3 5 7 9 17 29 31 Solenoid on side B Accessories Bit No. 1 3 5 7 1 1 5 7 Replacement of the SI unit Remove the M3 hexagon screw from the SI unit and release the SI unit from the valve manifold. Replace the SI unit.

EX600-SEC_eng

Fieldbus system Operation Manual 5 (5)Fix the manifold by tightening the DIN rail fixing screws of the EX600-ZMA2. (M4 x 20) Tightening torque: 0.7 to 0.8 Nm. The tightening torque at the valve side depends on the valve type. Refer to the operation manual of the corresponding valve manifold.

EX260-SPN-A_eng

Tighten the screws with the specified tightening torque. (0.6 Nm) Solenoid on side B Output No. 1 3 5 7 9 17 29 31 Technical documentation giving detailed accessories information can be found on the SMC website (URL http://www.smcworld.com). When conformity to UL is necessary the SI unit must be used with a UL1310 Class 2 power supply. 1 3 5 7 1 1 5 7 Bit No.

PSE200.eng

Hysteresis 6 Red CH3_OUT1 5 Grey CH2_OUT1 4 White CH1_OUT2 3 Black CH1_OUT1 2 Blue DC(-) ON OFF High pressure: For Compound/Positive High vacuum: For vacuum Displays in turn LCD display (Orange) Displays the current status of pressure, setting mode, selected indication unit and error code.

PSE3xxA.eng

Press the SET button between 3 and 5 sec. Other parameter settings Press the SET button once.

PSE300.eng

Hysteresis (H_1) Window comparator mode : For vacuum: High vacuum ON OFF 5. Auto shift compensation value setting (PSE3 2(T)/3 5(T) models only) [C_5] and the Auto shift compensated value are displayed in turn. Check the corrected value, then press the button. The pressure settings are completed, and the controller will return to measurement mode.

Process Pump

If a pump is operated by super dry air and N2 gas, etc., the deterioration of the gaskets inside the switching valve will be accelerated and may result in substantially shortening the life span of the product. 5. Operating environment Warning 1.

Air cooled Thermo-con (Compact type)

Numeric data Read or written data with 5 digits regardless of its type. Minus data: (symbol for minus) is displayed at the 1st digit Position of decimal point: Not included in 5 digit data. Ex) The 5 digit numeric data means Ex.

XL-OMV0002

XLC-16 XLC-25 XLC-40 XLC-50-1 XLC-63-1 XLC-80-1 XLC-100-1 XLC-160-1 16 25 40 50 63 80 100 160 560(5150) -5 Pa (abs) 110 l/s 1 5 14 45 80 160 200 300 800 10 (FKM) 1.310 Pam 3/S -11 (FKM) 1.310 KF(NW) KF(NW)K(DN) SUS316LSUS304FKM() 2 MPa (G) 0.30.6 0.40.6 cm 3 3 0.5MPa 38 91 430 280 500 1000 2300 3700 M5 Rc 1/8 Rc1/4 kg 0.28 0.46 1.1 1.4 2.3 4.0 8.7 14.5 1) 2) Y-VAC2 3) 1 7 XL-OMV0002

XL-OMY0003

XLH-16 XLH-25 XLH-40 XLH-50 16 25 40 50 5150 -6 Pa (abs) 110 l/s 1 5 14 45 80 10 FKM1.310 3/s Pam -11 FKM1.310 KFNW SUS316L,FKM Nm 0.1 0.15 0.35 0.5 5 7 10 13 0.23 0.41 1.05 1.62 1) 3-2.

XLJ- -*G1 Series 25 40

) XLJ-40 65 168 128 66 53 (63) Dimension in (brackets) is for AC type. 7 XL-OMU0002-A 5.