ZR Individual spacer (ZR1-R1-2) PV V X X PD X X 110.5 105.5 X PV V 70.5 SMC 16.5 X PD 12 V V 35.5 (Pitch) 33 (Pitch) 33 35.5 PV PD EXH PS Rc 1/8 V port Vacuum port 13-3-33 33 Large Size Vacuum Module: Vacuum Pump System Series ZR How to Order Combination of vacuum switch valve and release valve Refer to Table (1).
4 DIN DIN 5 FE -28No.EX-OMN0027CN-D (1)EX600-ED2PWR INM12 5 B code 1 24 V() 2 0 V() 3 24 V() 4 0 V() 5 FE (2)EX600-ED3PWR IN7/8 5 1 0 V() 2 0 V() 3 FE 4 24 V() 5 24 V() (3)EX600-ED4PWR INM12 4 A code PWR OUTM12 5 A code 1 24 V() 1 24 V() 2 24 V() 2 24 V() 3 0 V() 3 0 V() 4 0 V() 4 0 V() 5 (4)EX600-ED5PWR INM12 4 A code PWR OUTM12 5 A code 1 24 V() 1 24 V() 2 0 V() 2 0 V()
O 5/32 P 3/16 U 7/32 R 1/4 A 9/32 S 5/16 T 3/8 V 5/64 B 1/2 C 5/8 D 1 E 1 1/2 Y 3/4 F 2 W 3 D No Option Ports T Metering (1/32 1/8 orif.)
Table 11.2 Wire size selection example 2 (HIV wire) Driver Wires [mm2] (Note) 1) L1 L2 2) 24V 0V 3) U V W 4) P C 5) B1 B2 LECSA-S1 2(AWG14) 2(AWG14) 2(AWG14) 2(AWG14) 1.25(AWG16) LECSAS3 LECSA2-S4 Note. Wires are selected based on the highest rated current among combining servo motors. 11 16 11.
[mV] PC11 1(M01) -9 PC12 2(M02) 5 24 5 (2) 1(MO1)2(MO2) No.PC09PC10 3 0 1 CCW CCW CCW 8[V] 8[V] 0 0 8[V] 8[V] CW CW CW 2 CCW 3 8[V] 8[V] CW CW CCW CW CCW 0 0 4 5 (4) CCW CCW 8[V] 8[V] () 0 0 () 8[V] 8[V] CW CW 6 (146) (10V/100pulse) 7 (146) (10V/1000pulse) CCW CCW 10[V] 10[V] 100[pulse] 1000[pulse] 0 0 100[pulse] 1000[pulse] 10[V] 10[V] CW CW 8 (146) (10V/10pulse) 9 (146)
Note 2) 400 V type is provided with an earth leakage breaker -B as standard.
G59W G5PW K59W G5BA G59F 100 V Relay, PLC Grommet Reed switch Solid state switch PLC 100 V, 200 V Yes Relay, PLC 12 V PLC 24 V 2-wire 100 V Relay, PLC 200 V DIN terminal Grommet Diagnostic indication (2-color indication) 3-wire (NPN) 3-wire (PNP) IC circuit 24 V 5 V, 12 V Grommet 5 V, 12 V 12 V 100 V, 200 V 2-wire 3-wire (NPN) IC circuit Terminal conduit 12 V 2-wire Relay, PLC
G59W G5PW K59W G5BA G59F 100 V Relay, PLC Grommet Reed switch Solid state switch PLC 100 V, 200 V Yes Relay, PLC 12 V PLC 24 V 2-wire 100 V Relay, PLC 200 V DIN terminal Grommet Diagnostic indication (2-color indication) 3-wire (NPN) 3-wire (PNP) IC circuit 24 V 5 V, 12 V Grommet 5 V, 12 V 12 V 100 V, 200 V 2-wire 3-wire (NPN) IC circuit Terminal conduit 12 V 2-wire Relay, PLC
Nq Body size 10 20 25 30 40 Symbol Description Nw Pipe thread type Nil Metric thread (M5) V Rc V V V V N NPT V V V V F G V V V V + M5 M5 V 01 1/8 V 02 1/4 V V V V 03 3/8 V V V 04 1/2 V 06 3/4 V + Ne Port size a Mounting Nil Without mounting option V V V V V B Note 2) With bracket V V V V V H With set nut (for panel mount) Note 3) V V V V V + Option Note 1) Nr Nil Without pressure gauge
13 12 7 6 5 7 6 5 Group Group Pin number Pin number Pin number 3 3 1 0 1 0 2 2 13 11 13 11 12 12 10 10 8 6 8 6 5 3 1 9 7 9 7 4 2 5 3 1 5 3 1 4 2 4 2 Pin number Pin number 4 3 2 1 4 3 2 1 4 3 2 1 4 3 2 1 4 3 2 1 4 3 2 1 4 3 2 4 3 2 1 EX600-DMPE EX600-DMPF EX600-DYPE EX600-DYPF 0 V (output) 24 V (output) 0 V (output) 24 V (output) 0 V (output) 24 V (output) 0 V (output) 24 V (output) 0 V (output
-color display) 5 V,12 V 2-wire 12 V Water resistant (2-color display) . . .
B Voltage output (1 to 5 V)*1 1 V 1.04 V 5 V Current output*1 4 mA 4.16 mA 20 mA B D 0 L/min C*2 D Voltage output (0 to 10 V)*1*3 0 V 0.1 V 10 V Model Minimum value of rated flow range*4 Maximum value of rated flow range PF3A703H 30 L/min 3000 L/min PF3A706H 60 L/min 6000 L/min PF3A712H 120 L/min 12000 L/min A C 0 0 *1 Analog output accuracy is within 3% F.S. *2 A and C will change according
state auto switch RS2H 2-wire 12 V Connector RSH 3-wire (NPN) IC circuit 5 V, 12 V Relay, PLC Diagnostic indication (2-color indicator) Yes Yes Yes No No 24 V 3-wire (PNP) 2-wire MIW MIS 12 V Grommet 3-wire (NPN) IC circuit 5 V, 12 V Water resistant (2-color indicator) M9PAV1 M9PA1 3-wire (PNP) 2-wire M9BAV1 M9BA1 IC circuit 12 V 5 V, 12 V H7NF With diagnostic output (2-color indicator
PLC 100 V, 200 V Yes Yes 12 V Terminal conduit PLC 24 V 2-wire 100 V, 200 V Relay, PLC DIN terminal Grommet Diagnostic indication (2-color indication) 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V 24 V Grommet 100 V, 200 V 2-wire 12 V IC circuit 3-wire (NPN) 2-wire 5 V, 12 V Terminal conduit 12 V Relay, PLC 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Diagnostic indication
, PLC 100 V, 200 V Yes Yes 12 V Terminal conduit PLC 24 V 2-wire 100 V, 200 V Relay, PLC DIN terminal Grommet Diagnostic indication (2-color indication) 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V 24 V Grommet 100 V, 200 V 2-wire 12 V IC circuit 3-wire (NPN) 2-wire 5 V, 12 V Terminal conduit 12 V Relay, PLC 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Diagnostic indication
-16 XL(A, C, H) [V]-25 XLD [V]-25 XL(F, G) [V]-16 XL(F, G) [V]-25 XLD [V]-40 XL [V]-40 XLD [V]-50 XL [V]-50 XLD [V]-63 XL [V]-63 XLD [V]-80 XL [V]-80 Construction No.
5 V, 12 V 100 V or less M9NV M9N 3-wire (NPN) IC circuit 5 V 12 V M9PV M9P 3-wire (PNP) M9BV M9B 12 V 2-wire F9NWV F9NW 3-wire (NPN) Diagnostic indication 2-color indication IC circuit 5 V 12 V Relay, PLC F9PWV F9PW 3-wire (PNP) Yes Grommet 24 V F9BWV F9BW Water resistant 2-color indication 2-wire 12 V F9BA Lead wire length symbols: 0.5 m Nil (Example) M9N 3 m L (Example) M9NL 5
(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03
24 V 0 V D G D G 24 V 0 V The above is the example of using dedicated S-LINK flat ribbon cable SL-RCM00. 24 V 0 V Power supply { 24 V 0 V Power supply { DG DG 1-3-35 36 Series SZ3000 Dimensions: SZ3000 Serial Transmission Type SS5Z3-60S DStations U [With external pilot] 2One-touch fitting (X, PE ports) Applicable tubing O.D.: 6 24 13.3 16.2 34 B 2 B 2 B 2 B 2 PE R 3 B 2 A 4 A 4 A 4 A 4 X
-color display) 5 V,12 V 2-wire 12 V Water resistant (2-color display) . . .