Compact manifold regulator ARM5 Series

IN Fitting Type 15 IR-A Inch size Metric size Straight IN side IN side Symbol Symbol IR Elbow Elbow Straight 1/4 5/16 5/16 1/4 6 8 8 6 IRV 51 52 63 64 01 02 13 14 VEX SRH 3. Tie-rod for Centralized Supply Block Note) SRP Symbol Description Without tie-rod Nil T O-ring SRF With tie-rod Note) The O-ring is attached to the manifold connection. Note) For details, refer to page 705.

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Example) 10-ARP30K-03BE-1RY Clean room compliant, copperfree, fluorine-free, silicon-free Clean room compliant Copper-free, fluorine-free Symbol 20 30 40 Body size Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without

Speed Controller with

Metric Size Applicable tubing 23 04 06 08 10 12 3.2 4 6 8 10 12 AS1002Fm TMH-23J TMH-04J TMH-06J AS2002Fm AS2052Fm TMH-06 TMH-08 AS3002Fm TMH-07 TMH-10 TMH-12 AS4002Fm TMH-13 Tubing size Applicable model The applicable TMH for the AS1002Fm-02 is not available.

Body Size: 30, Thread: Rc, Port Size: 02 (1/4), Mounting: B (w/Bracket), Float Type Auto Drain: D (N.O.

Body Size: 40, Back Flow: w/o Backflow, Thread: N (NPT), Port Size: 02 (1/4), Mounting Option: B (With Bracket), Float Type Auto Drain Option: C (N.C.

Body Size: 40, Back Flow: w/o Backflow, Thread: F (G), Port Size: 02 (1/4), Mounting Option: Without Mounting, Float Type Auto Drain Option: C (N.C.

Body Size: 40, Back Flow: w/o Backflow, Thread: F (G), Port Size: 02 (1/4), Mounting Option: B (With Bracket), Float Type Auto Drain Option: C (N.C.

Body Size: 40, Back Flow: w/o Backflow, Thread: F (G), Port Size: 02 (1/4), Mounting Option: Without Mounting, Float Type Auto Drain Option: C (N.C.

Rated Vacuum Range: -101 to 0 kPa, Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: M (SI Unit Only), Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Function: 5 (3 Position Pressure Center), Body Style: 30 (Body Ported/Common Pilot EXH), Body Option: Body Ported Type, Pilot: Internal Pilot, Voltage: 5 (24VDC), Lead Wire: D (DIN Connector), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style (Flush), Piping: Side, Port Size: 02 (Sub-plate Plug-in 1/4, Non Plug-in 1/4, Direct Ported P,A,B Ports 1)

Function: 4 (3 Position Exhaust Center), Body Option: 20 (Body Ported/Individual Pilot EXH), Pilot: Internal Pilot, Voltage: 3 (110~120VAC 50/60HZ), Lead Wire: D (DIN Connector), Surge Suppressor: None, Manual Override: B (Locking Slotted Style), Piping: Side, Port Size: 02 (Base Mounted w/Sub-plate 1/4, Body Ported 1/4)

Body Size: 20, Back Flow: w/o Backflow, Thread: N (NPT), Port Size: 02 (1/4), Options: BG (B+G), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl: Polycarbonate Bowl, Bowl Guard: C (w/Bowl Guard), Drain Port: w/Drain Cock, Exhaust Mechanism: Relieving Type, Flow Direction: R (Flow Direction: Right to Left), Drain Cock w/Barb Fitting: None, Pressure Units: Z [Product: psi, °C; Pressure Gauge:

Size: 20, Standard Dew Point: -20°C, Type: Standard, Thread: N (NPT), Port Size: 02 (1/4), Accessory: B (Bracket), Option: P (Fitting for Purge Air Exhaust)

Body Size: 40, Model Type: A (Filter Regulator + Lubricator), Thread: N (NPT), Port Size: 02 (1/4), Float Type Auto Drain: C [N.C.

Model: 32, Orifice: 2 (2.2mm), Style: 4 (COM, Single Unit), Option: C37, Seals: NBR, Class B, Suffix: Z (Oil-free), Port Size: 02 (1/4), Thread: N (NPT), Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal), Surge Suppressor: Z (w/Light and Surge Voltage Suppressor), Rectifier: None (for DC or AC Class H Coil), Bracket: B (Bracket)

Body Size: 40, Back Flow: w/o Backflow, Thread: F (G), Port Size: 02 (1/4), Mounting Option: B (With Bracket), Float Type Auto Drain Option: C (N.C.

Body Size: 20, Thread: N (NPT), Port Size: 02 (1/4), Mounting: None, Float Type Auto Drain: C (N.C.

Body Size: 30, Thread: Rc, Port Size: 02 (1/4), Mounting: B (w/Bracket), Float Type Auto Drain: D (N.O.

Body Size: 20, Thread: N (NPT), Port Size: 02 (1/4), Mounting: B (w/Bracket), Float Type Auto Drain: C (N.C.

Body Size: 40, Back Flow: w/o Backflow, Thread: F (G), Port Size: 02 (1/4), Mounting Option: B (With Bracket), Float Type Auto Drain Option: C (N.C.