9.8

B P_1 or P_2 H_1 or H_2 Released P_1 (P_2) = A (A-B)/4 n_1 (n_2) = B + (A-B)/4 Work 1 Work 2 Work n Atmosphere H_1 (H_2) = (A-B)/2 D Peak and bottom display function C Precision indicator setting function (F 6) Fine adjustment of the indicated value of the pressure sensor can be made within the range of 5% of the read value. (The scattering of the indicated value can be eliminated.)

Voltage Monitor for PFMV5

Part number Description Remarks ZS-28-A Power and output lead wire and connector Length: 2 m ZS-28-B Bracket Mounting screw (M3 x 5 L) 2 pcs. ZS-28-C Sensor connector 1 pc. ZS-27-C Panel mount adapter Mounting screw (M3 x 8 L) 2 pcs. ZS-27-D Panel mount adapter + Front protective cover Mounting screw (M3 x 8 L) 2 pcs.

Material: Super PFA High Purity Fluoropolymer Tubing TL/TIL Series

(mm) TIL13 1/2" 1/2" x 3/8" 12.7 TIL19 3/4" 3/4" x 5/8" 19.05 TIL25 1" 1" x 7/8" 25.4 TIL11 3/8" 3/8" x 1/4" 9.53 TIL07 1/4" 1/4" x 5/32" 6.35 TILB01 1/8" 1/8" x 1/16" 3.18 TL0604 6 x 4 6 TL0806 8 x 6 8 TL1008 10 x 8 10 TL1210 12 x 10 12 TL1916 19 x 16 19 TL0403 4 x 3 4 TIL05 3/16" 3/16" x 1/8" 4.75 TIL01 1/8" 1/8" x 0.086" Basic diameter 3.18 +0.2 0.1 +0.2 0.1 1.6 0.15 1 0.1 0.1 0.1

Air Cylinder/Standard Type: Double Acting, Single Rod Series CG1

Air Cylinder/Standard Type: Double Acting, Single Rod Series CG1 Replacement Procedure is 20, 25, 32, 40 50, 63, 80, 100 P.281 Construction With rubber bumper @4 @6 @5 @6 Long Stroke With air cushion @4 @8 @7 @6 @5 @6 Long Stroke The numbers are the same as the "Construction" of the Best Pneumatics No.2 Series CG1. Replacement Parts: Seal Kit Kit no.

08-cg1-e

Air Cylinder/Standard Type: Double Acting, Single Rod Series CG1 Replacement Procedure is 20, 25, 32, 40 50, 63, 80, 100 P.281 Construction With rubber bumper @4 @6 @5 @6 Long Stroke With air cushion @4 @8 @7 @6 @5 @6 Long Stroke The numbers are the same as the "Construction" of the Best Pneumatics No.2 Series CG1. Replacement Parts: Seal Kit Kit no.

Direct Operated Precision Regulator/Modular Style ARP20 to ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style ARP20K to ARP40K Regulator JIS symbol Regulator with backflow function

Note 3) Includes one O-ring and 2 mounting screws. [ ]: Pressure gauge cover only. Note 4) Lead wire with connector (2 m), adapter, lock pin, O-ring (1 pc.), and mounting screws (2 pcs.) are included. [ ]: Switch body only.

PFxx-OMP0001CN

L/min *7 202 202000 L/min R Rc *7 N NPT F G*1 *1IS0228 5 M SI6 *5: 501 102 202 (SI) 04 1/2 *6:L/min 06 3/4 L 1 *4 (2m) OUT1 OUT2 A NPN NPN B PNP PNP C NPN (15 V) D NPN (420 mA) E*2 PNP (15 V) *4 (2m) F*2 PNP (420 mA) + () G*2 NPN *3 W H*2 PNP *3 *2 *3 N M8 *4 ZS-33-D 2m ZS-33-F ZS-42-C PFMB7501/7102 (3.04 ) ZS-42-D PFMB7202 (3.04 ) -10No.PF-OMP0001CN-F (OUT) (IN) INOUT LCD

CC

This can be solved by closing the stop value 1 to 2 seconds later.

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Note 3) Includes one O-ring and 2 mounting screws. [ ]: Pressure gauge cover only. Note 4) Lead wire with connector (2 m), adapter, lock pin, O-ring (1 pc.), and mounting screws (2 pcs.) are included. [ ]: Switch body only.

AMPSeries

2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5 Series AMP Model Selection Selection Caution Caution 1.

AMP

Flow direction Right Down With element service indicator AMP220 Rc NPT AMP320 AMP420 G Features 1 Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With

Exhaust Cleaner for Clean Rooms AMP Series

2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5 Series AMP Model Selection Selection Caution Caution 1.

CKZ2N

2 Cover cap screw q Switch actuator Note 2) CKZN-D050 !0 Socket head cap screw o Spring washer r Bumper w Stopper bolt 50 Note 2) CKZN-B050 !1 Seal washer Note 2) CKZN-K050 CKZN-D050 CKZN-B050 !3 Short head cap screw !4 q Switch actuator Note 2) CKZN-D063 !

Electrostatic Sensor Monitor

Press this button to change to the bottom display mode. button: Changes the mode and sets a set value. -8No.SFOD-OMO0004-B Options Power and output lead wire (2 m): ZS-28-A Connector for sensor lead wire (1 pc.): ZS-28-C Bracket with set screws M3x5 L (2 pcs.): ZS-28-B Panel mount adapter with set screws M3x8L (2 pcs.): ZS-27-C Panel mount adapter with set screws M3x8L (2 pcs.) + Front protective

3 Port Air Operated Valve Series SYJA300 1

Valve Precautions, refer to pages 5-11-2 to 5-11-6. 0.6 1 (P) 3 (R) 1 (P) 3 (R) Pilot pressure (MPa) Pilot pressure range 0.5 N.C.

PS-OMH0005CN

/ / / 2 n_n / LoC() 4 UnL LoC 4 LoC UnL 5F.S.(2.5F.S.) 1 12341 2 2 2 -27No.PS-OMH0005CN-D (2030 ) -28No.PS-OMH0005CN-D PSE200 ( ) 1 ON ON OFF Yes No 2 OFF ON 1 OFF 3 4 5 OFF 6 -29No.PS-OMH0005CN-D 7 Yes No 8 8 9 10 11 12 13 14 15 16 -30No.PS-OMH0005CN-D No.

Directional Control Driver for Electric Cylinder

Note) For the travelling direction (retracted, extended side), refer to the dimensions in page 4, 6, 10 and 11. 1 2 Housing: VHR-2N (J.S.T. Mfg Co., Ltd.) Contact: BVH-21T-P1.1 (J.S.T.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

01MS-X3 G49-2-02MS-X3 Round type Note 2) 0.2 MPa G49-7-01MS-X3 G49-7-02MS-X3 0.7 MPa Note 1) Assembly includes a bracket and set nuts.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

01MS-X3 G49-2-02MS-X3 Round type Note 2) 0.2 MPa G49-7-01MS-X3 G49-7-02MS-X3 0.7 MPa Note 1) Assembly includes a bracket and set nuts.

ITVH

Note 2) 2-wire type 4 to 20 mA is not available. Power supply voltage 24 VDC is required. Note 3) Select either analog output or switch output. Further, when switch output is selected, select either NPN output or PNP output. When measuring analog output of 1 to 5 VDC with a load impedance less than 100 k, the analog output may not obtain the output accuracy of 6% F.S. or less.