How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1 .-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Nil 30 50 0.6 m 3 m 5 m ZL ZY Table (2) How to Order Connector for Supply Valve and Vacuum Release Valve ZQ 1A 36 VJ10 Caution (Applicable to 100 VAC only) ZF When using AC, the DC solenoids are operated via a rectifier.
Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 97.5 112 97.5 85.5 26 30 VAC. 62 10 20 8 30 103 2-4.5 Mounting hole 15.5 13 VAC. 13-4-28 9 Series ZM Vacuum Ejector: With Solid State Timer Manifold Specifications: Series ZZMA Manifold Specifications Manifold style
A B d H Model H A SN-015A M14 x 1 19 21.9 5 ZPNA-M16 M16 x 1.5 22 25.4 6 ZPNA-M18 M18 x 1.5 27 31.2 9 ZPNA-M22 M22 x 1.5 30 34.6 8 Bolts (Hexagonal Socket Head Cap Screw) Dimensions d B (mm) A B d L 8 11 5.5 M3 x 0.5 L 8 12 7 M4 x 0.7 A 10 15 8.5 M5 x 0.8 13-11-96
(M5) One touch fitting lot Ve' tube r: :-,1 r{vJ3l38 2 position sinqle solenoid 0.066 (30) 0.073 (33 NVJ323&2 oosition double solenoid o.o9o (41 0.103 (47 NW333& 3 Dosition closed center 0.097 \44 ) 0.110 {50) llVJ3.Bg 3 oosition exhaust center NVJ353E3 oosition oressure center 0.123 (59) \0.066 (30)) 0.130 (s9)(0.073(33)) NVJ324C 2 position double solenoid 0r47 (67) (0.090 (41)) 0.161 (73
(M5) One touch fitting lot Ve' tube r: :-,1 r{vJ3l38 2 position sinqle solenoid 0.066 (30) 0.073 (33 NVJ323&2 oosition double solenoid o.o9o (41 0.103 (47 NW333& 3 Dosition closed center 0.097 \44 ) 0.110 {50) llVJ3.Bg 3 oosition exhaust center NVJ353E3 oosition oressure center 0.123 (59) \0.066 (30)) 0.130 (s9)(0.073(33)) NVJ324C 2 position double solenoid 0r47 (67) (0.090 (41)) 0.161 (73
Air consumption (L/min [ANR]) SUP = 0.7 MPa 40 35 30 SUP = 0.5 MPa 25 20 SUP = 0.35 MPa Caution 15 SUP = 0.2 MPa 10 1.
Note 6) The flow rate of the body ported product with a built-in silencer decreases by 30%.
(mm) or () Description/Series Bore size 10 12 16 20 25 32 40 50 63 80 100 Parallel style MHZ2 3.0 5.0 7.0 7.0 8.0 8.5 Parallel style MHZL2 6.0 7.0 10.0 11.0 Wide type MHL2 7.0 8.0 8.5 10.5 11.0 12.5 Parallel style MHS2 (2 fingers) 6.5 7.0 7.5 8.5 Parallel style MHS3 (3 fingers)/MHS(L)3 6.5 7.0 7.5 8.0 Parallel style MHS4 (4 fingers) 6.5 7.0 7.5 8.5 Angular style MHC2 30 to 10 30
Note 1) P Model Weight (g) W L1 L2 P M1 M2 (mm) 4 6 8 10 12 KQGU04-00 KQGU06-00 KQGU08-00 KQGU10-00 KQGU12-00 4.2 10.6 21.2 41 16.8 10.6 18 17 35 L2 M1 10.6 13 26 42.9 17 13 18.8 17.8 54 L1 25.6 15 30 47.7 18.7 15 20.9 19.9 75 18 40 36 52.8 20.5 18 23 22 114 M2 N 57.4 20.8 41.6 57.8 21.9 21 24.8 23.8 175 Note 1) D is maximum diameter.
SS secondary remelt Electropolish + Passivation 35 0.24 Hastelloy C-22 316L SS 30 0.21 Delivery pressure (MPa) Delivery pressure (psig) Elgiloy 316L SS 25 0.17 PTFE (Option: PCTFE) PTFE (Option: PCTFE, Vespel) 20 0.14 Dimensions inch (mm) 15 0.10 AP500 10 0.07 1.00 (25.4) 5 0.03 Max. 3.32 (84.3) 0 0.00 0 2 4 6 8 10 Flow rate (slpm, N2) 0.82 (20.8) 0.44 (11.2) AP500HF 75 psig (0.52 MPa) 30
Example) AWM30-03BE-1N AWD 30 03 BE q w e r t Body size Description Symbol 30 40 20 Nil N Note 1) F Note 2) Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + H Mounting Without mounting option With bracket With set nut a Nil B Note 4) + Without auto drain Float type auto drain (N.C.)
Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For
5, 10, 15, 20, 25, 30, 35, 40, 45, 50 M5 x 0.8 M5 x 0.8 Double acting Single rod 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 Suction Flow Rate of Vacuum Suction Type (Reference values) Specifications Suction flow rate L/min (ANR) Bore size (mm) 12/16/20/25 Size 5 12/16/20/25 Item Proof pressure 1.5 MPa Maximum operating pressure 1.0 MPa Minimum operating pressure 12, 16:
Rack & Pinion Type Rotary Actuator Series 11-CRA1-Z Size: 30, 50 RoHS How to Order 11 Vacuum suction type Clean series Nil Auto switch No D Built-in magnet B Mounting Basic L Foot Shaft type S Single shaft W Double shaft 30 Size 50 11 C D R A 1 B S 50 90 Z M9B Rotating angle Number of auto switches 90 180 100 190 90 180 100 Nil S 2 pcs. 1 pc. 190 Type of auto switch (For model with auto switch
20, 25, 30, 35, 40, 45, 50, 75, 100 IN 840 1400 1960 63 63 OUT 936 1560 2184 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 1 The outline dimensions for 5 mm stroke will be the same as those for 10 mm stroke. 2 The outline dimensions for 10 mm stroke will be the same as those for 15 mm stroke.
Clean series 10 AF 03 A 30 F J B 21 AF 03 A 30 F J B Copper, fluorine and silicone-free + Low particle generation q w e r t Air filter Option/Semi-standard:Selectoneeachfora to e. Option/Semi-standardsymbol:Whenmorethanonespecificationisrequired,indicateinalphanumericorder.
Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For
Thermo-chiller Series HRW Fluorinated Fluid Type SEMI How to Order 002 H HRW Fluorinated FluidType Option Cooling capacity Option Symbol Symbol 002 008 015 030 Cooling capacity None Nil C D N Z 2 kW Analog communication 8 kW DeviceNet communication 15 kW NPT fitting 30 kW Circulating fluid automatic recovery Pump inverter control Temperature range setting Pump inverter control None Applicable
No gauge port Ports No code No code M V X No pressure gauge (Connections: 1/4 inch face seal male) Code Ports 2 ports 3 ports 4 ports 0 2PW 3PW 4PW V3 L 1 2 4 10 40 -0.1 to 0.2 MPa -0.1 to 0.4 MPa -0.1 to 0.7 MPa 0 to 1.4 MPa 0 to 3 MPa 0 to 7 MPa 0 to 28 MPa -30 in.Hg to 30 psig -30 in.Hg to 60 psig -30 in.Hg to 100 psig 0 to 200 psig 0 to 400 psig 0 to 1000 psig 0 to 4000 psig Porting Configuration
SP2430 SP1530 SP2530 SP1630 SP2630 Rectangular Square Type Flatness (m, or less) 15 15 25 25 25 15 Suitable for adsorption and fixing in place of film and soft sheets High processing precision (adsorption surface) Large, evenly distributed adsorption force Parallelism (m, or less) Weight (kg) 30 30 40 40 40 30 Rectangular Square Size Sintered body particle diameter Aperture ratio Material