.: None; Temperature Sensor: None), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: M (Instantaneous Flow: L/min, Accumulated Flow: L,Temperature: °C), Bracket: R (w/Bracket), Calibration Certificate: None

m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)200PolycarbonateSemi-standardRelieving type0.74

m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)200PolycarbonateSemi-standardRelieving type0.74

m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)1100PolycarbonateStandardRelieving type1.76

m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)1100PolycarbonateStandardRelieving type1.76

m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)1100PolycarbonateStandardRelieving type1.76

m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)1100PolycarbonateStandardRelieving type1.76

m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)450PolycarbonateStandardRelieving type0.95

m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)450PolycarbonateStandardRelieving type0.95

m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)450PolycarbonateStandardRelieving type0.95

m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)450PolycarbonateStandardRelieving type0.95

m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)450PolycarbonateStandardRelieving type0.95

m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)1100PolycarbonateStandardRelieving type1.76

m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)200PolycarbonateSemi-standardRelieving type0.74

m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)200PolycarbonateSemi-standardRelieving type0.74

m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)200PolycarbonateSemi-standardRelieving type0.74

m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)200PolycarbonateSemi-standardRelieving type0.74

m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)200PolycarbonateSemi-standardRelieving type0.74

m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)200PolycarbonateSemi-standardRelieving type0.74

m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)450PolycarbonateStandardRelieving type0.88