Electric Actuator with Integrated Guide Series LTF

[Mitsubishi Electric Corporation] [Yasukawa Electric Corporation] Table Table Frame-type linear guide Frame-type linear guide One-piece structure of the linear guide integrated with the frame Martensitic stainless steel Steel balls (Circulating) Recirculating Steel Balls Speed (mm/s) Page Standard stroke (mm) and Model Non-standard motor Standard motor Deflection 100 200 300 400 500 600 700

Clean Room Regulator/Fluoro Resin Type Series SRF30

0.1MPa Set pressure 0.5 Inlet pressure 0.45 0.4 0.35 Pressure MPa 0.3 0.25 0.2 0.15 0.1 0.05 Outlet pressure 0 0 0.5 1 1.5 2 2.5 3 3.5 4 4.5 5 Time sec Test circuit/Conditions P1 P2 Pump SRF30-m 2 Clean Room Regulator/Fluoro Resin Type Series SRF30 Flow-through Characteristics Particulate Generation Characteristics Particle concentration (particles/ml) Particle diameter: 0.1m or larger 400

When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32, 40, Ball screw drive , Applicable stroke range: 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000, 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or DIN

When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32, 40, Ball screw drive , Applicable stroke range: 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000, 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or DIN

When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32, 40, Ball screw drive , Applicable stroke range: 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000, 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or DIN

When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32, 40, Ball screw drive , Applicable stroke range: 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000, 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or DIN

When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32, 40, Ball screw drive , Applicable stroke range: 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000, 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or DIN

When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32, 40, Ball screw drive , Applicable stroke range: 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000, 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or DIN

When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32, 40, Ball screw drive , Applicable stroke range: 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000, 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or DIN

When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32, 40, Ball screw drive , Applicable stroke range: 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000, 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or DIN

When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32, 40, Ball screw drive , Applicable stroke range: 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000, 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or DIN

AC Servo Motor Driver (MECHATROLINK-II type)

.044 Semi-closed/Fully-closed Loop Control Parameter Setting Error Gr.1 A.04A Parameter Setting Error 2 Gr.1 A.050 Combination Error Gr.1 A.051 Unsupported Device Alarm Gr.1 A.0B0 Cancelled Servo ON Command Alarm Gr.1 A.100 Overcurrent or Heat Sink Overheated Gr.1 A.300 Regeneration Error Gr.1 A.320 Regenerative Overload Gr.2 Alarm A.330 Main Circuit Power Supply Wiring Error Gr.1 A.400

AC Servo Motor Driver (MECHATROLINK-III type)

Gr.1 A.044 Semi-closed/Fully-closed Loop Control Parameter Setting Error Gr.1 A.04A Parameter Setting Error 2 Gr.1 A.050 Combination Error Gr.1 A.051 Unsupported Device Alarm Gr.1 A.0B0 Cancelled Servo ON Command Alarm Gr.1 A.100 Overcurrent or Heat Sink Overheated Gr.1 A.300 Regeneration Error Gr.1 A.320 Regenerative Overload Gr.2 A.330 Main Circuit Power Supply Wiring Error Gr.1 A.400

ZQ-OM01401

PD M4 2 (PD 0.28~0.34Nm / PD :0.68~0.83Nm (4 ) (4 ) 11 - No.ZQ-OM01401-B 3.1.4 1 2 3 3.2 1) 2) () 3) ZFC 4)( ) 5) 6)CE / UKCA CE / UKCA 7) 8) 9) 10) 11) 12) 12 - No.ZQ-OM01401-B 3.3 3.3.1 1 2 3ISO8573-1: 2010 (JIS B 8392-1: 2012)2:6:3 ISO8573-1: 2010 (JIS B8392-1: 2012) AFM AFF AF AR 2 : 6 : 3 3 dm 1 m 3) 0.1 d 0.5 0.5 d 1.0 1.0 d 5.0 oC) ( (mg/m 1 20,000 400

ZL3-OM00801

ZL212 1ZL212 ZL3-AD3-A ZL212 2 ZL3-AD3-A 4xM5x0.8 6 1.31.5[Nm] 7 No.ZL3-OM00801-A 3.1.3 1) 2) 3) 3.2 1) 2) () 3) AFJ 4)( ) 5) 6)CE/UKCA A CE/UKCA 7) 8) 9) 10) 11) 12) 8 No.ZL3-OM00801-A 3.3 3.3.1 1 2 3ISO8573-1:2010(JIS B 8392-1:2012) 2:6:3 ISO8573-1:2010JIS B8392-1:2012 AFM AFF AF AR 2 : 6 : 3 3 dm 1 m 3) 0.1 d 0.5 0.5 d 1.0 1.0 d 5.0 () (mg/m 1 20,000 400

IDX-OM-W014

0.75 3/min (ANR) (1) m 60Hz 0.37 0.57 0.82 MPa 0.7 55 32 10 580 MPa 0.151.0 24085% AC100V (50/60Hz) AC100/100,11010%(4) V AC200V (50/60Hz) AC200/200,22010%(4) AC230V (50Hz) AC23010%(4) AC100V (50/60Hz) 2.4/2.5 3.0/3.1 5.7/5.7 AC200V (50/60Hz) 1.2/1.3 1.5/1.5 3.4/3.0 (2) A AC230V (50Hz) 1.5 1.6 2.9 AC100V,AC200V (50/60Hz) 180/202 208/236 385/440 (2) W AC230V (50Hz) 210 220 400

VBA-OM-P019

1 VBAT20A1-T-X104 VBAT38A1-T-X104 1.0MPa Q235B 22L 38L 075 15kg 26kg VBAT-V1 IN 1/2 OUT 1/2 3/4 1/4 VBA2/VBA4 TSG R0003-2007 2 () IN :VBA2 8VBA4 8 10 (I) 6 : Rc3/8 OUT (J) OUT Rc1/2 IN Rc1/2 () OUT VBA2 22~24Nm(R3/8) VBA4 28~30Nm(R1/2) OUT O Rc1/4 O A B C D E F G H I J K L M O VBA20A VBA22A 481 444 394 Rc3/8 59 VBAT20A1 VBAT20A1 216 700 520 477 429.8 180 200 100 400

VBA-OM-S007

VBAT20S1-T-X104 VBAT38S1-T-X104 13kg 19kg 20L 38L OUT 1/2 3/4 O IN TSG R0003-2007 VBA2/VBA4 1.0MPa SUS304 0~75 oC 1/4 IN 1/2 1 SMC VBAT-V1 1 305 236 355 250 A B C D E F G H I J K L M 444 394 Rc3/8 59 494 444 Rc3/8 59 85 85 IN Rc1/2 Rc1/2 Rc3/4 Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer Rc1/2 Rc1/2 180 200 100 400

PSxx-OMV0003CN

1.680 kPa 0 1,600.0 -105 1680 Kgf/cm 2 0 16.315 -1.07 17.13 ISE71 Bar 0 16.000 -1.05 16.80 Psi 0 232.06 -15.2 243.7 (PD) 1000 5000 738 5200 ISE70 MPa (PD) PD [MPa] (PD)(ISE70 MPa) -62No.PS-OMV0003CN-G Pr = a (PD) + b (PD) = (Pr b) / a Pr PD a b [] a b MPa 0.00025 -0.25 kPa 0.25 -250 kgf/cm 2 0.002549 -2.549 ISE70 bar 0.0025 -2.5 psi 0.03626 -36.26 MPa 0.0004 -0.4 kPa 0.4 -400

VFS4000-OMY0001

No.VFS4000-OMY0001 (2) 6 No.VFS4000-OMY0001 3 VF4000-9A B 4 () () 7 No.VFS4000-OMY0001 5 1) DIN DIN (+,-) AC DC100V DC24V 810 3 1.25Y-3L1.25-3.5S1.25-4M 0.6Nm 0.6Nm COM (DIN No.3), 8 No.VFS4000-OMY0001 2) , , 1.25-3.5M1.25Y-3L1.25-3M +0.6Nm 3) 1.25-31.25-3S1.25Y-3N1.25Y-3S +0.6Nm 9 No.VFS4000-OMY0001 /01 A+ AB+ BVFS4100 A A VFS4200 A A B B VFS4 3 400