Power Clamp Cylinder

depth S N 2 x NPT 1/4 G 2 x 2 x MM depth J Hexagon socket head plug 2 x NPT 1/4 G E B RB (mm) Bore size (mm) 50 63 80 C D E GA GB GC I J K L LA LB MM N NA NB NC NN P B 95 48 12 13.7 134.3 138.5 93 10 12 55 376.4 149.5 78.4 M10 x 1.5 19 13 36.5 10.3 M8 x 1.25 10 112 54 12 16.6 141.2 147.5 90.5 10 12 55 395.6 158.5 78 M10 x 1.5 22 13 36.5 15.8 M8 x 1.25 10 76 13 19.6 199 137.5 18 80 214 113.7 21

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

10.5 13 17 18 HC 18 25 31 38 43 54 66 84 96 HP 10.5 14 17 24 23.5 29 36 45 51 K 7 9 14 11 15 13 15 25 24 HA 17 24 30 36 41 52 62 80 92 G 3 4 5 6 6 7 7 8.5 8.5 HT 10.5 14 17 24 23.5 29 36 45 51 J x E M4 x 0.7 x 6 M4 x 0.7 x 6 M5 x 0.8 x 7 M6 x 1 x 8 M6 x 1 x 8 M8 x 1.25 x 10 M8 x 1.25 x 10 M10 x 1.5 x 15 M10 x 1.5 x 15 B 6.5 8 9.5 9.5 11 11 14 14 GP 20 27 33 39 44 55 65 83 95 HB 10.5 14 17 21

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

4.5 11.5 4.2 7.5 4.5 2.5 6 5 (mm) JJ M3 x 0.5 M3 x 0.5 M3 x 0.5 M4 x 0.7 JK JU M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 P M3 x 0.5 M3 x 0.5 M3 x 0.5 M5 x 0.8 PA M3 x 0.5 M3 x 0.5 M3 x 0.5 M5 x 0.8 Q S SD SF SU UU WA WB WC WD M3 x 0.5 M3 x 0.5 M3 x 0.5 M4 x 0.7 WE WF XA XB XC YA YB YC Size 3.5 16 50.5 10.8 24.4 9.4 25 9.5 2H9 2 4.8 20 22.5 2H9 2 11 2H9 2 1 3.5 18 56 13.4 26.2 11.3 28 10 2H9 2 5.3 21

Low Profile Guide Type

Description Anodized Hard anodized Hard anodized Hard anodized Body (rodless cylinder) Body End cover A End cover B Cylinder tube Piston Piston nut Shaft Piston side yoke Guide Shock absorber Steel ball Bearing steel Carbon tool steel Hard steel wire Stainless steel Stainless steel 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 Aluminum alloy Aluminum alloy Aluminum alloy

3

b B Conduit DIN terminal D F Q S Cable 6 to 12 G1/2 F Q 280 D G1/2 45 (42) (44) 31.5 Built-in full-wave rectifier type R C C R E J J E 2 x M depth 5 H 2 x M depth 5 B B1 H G A G A B B1 2 x P Port size 2 x P Port size Bracket mounting hole a1 (VXS23, 25) a a1 (VXS24, 26) 6.5 10.5 Dimensions (mm) Model Port size P A B B1 C D E F G H J M Bracket mounting a b d e f g h i j VXS23 1/4, 3/8 21

Aluminum High Vacuum Angle Valve

For further details, refer to mounting positions under Replacement Heaters on page 465. 452 B XLD/XLDV Series Aluminum High Vacuum Angle Valve Dimensions XLDV-25/With solenoid valve 88.5 74 48 (KF flange) (For DC) (For AC) L A V V E 57.6 M 55.4 U 40 48 U C A V H H I G (38.5) 8.5 2.2 7.5 max. 49.4 21 Initial exhaust solenoid valve 41.5 3.5 123 26 M5 Port 3(R) (EXH) (Exhaust port) M5 Port 1

Non-contact Gripper

Pressure dispersion in height direction Non-contact gripper 0 Large vacuum area, even pressure dispersion Current SMC cyclone method Small vacuum area, higher vacuum in the central part Outer body diameter (mm) 20 40 60 80 100 Air consumption [L/min (ANR)] 77 148 148 148 258 0 Lifting force (N) 4.3 14 21 26 44 Pressure dispersion in diameter direction Supply pressure: 0.4 MPa Air is discharged

Air Suction Filter With One-touch Fittings ZFB Series

M Element Replacement Procedure Body Model A B C D E F G H I J K L M N Size ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 12.8 4 6 53 54 8.5 14.4 15.5 50 15 17.5 24 12.5 26 22.5 48 Metric size Inch size 15.2 6 8 9.5 16.6 17.5 61 16 19.5 27 13.5 28 65 24.5 52 Collar part arrow 57 8 10 69.5 70 18.5 11 18 21.5 65 17 21 29.5 14.5 30 27 Transparent cover 3 16 1 4 " 1 4 " 3 8 " 1

ZSE30A(F)/ISE30A

.: ZS-27-C) ZSE40 ISE40 ZSE10 ISE10 ISE70 ZSE80 ISE80 50.8 7.2 17.8 8 9.5 47.8 PS 34.5 ISA3 ISA2 R4.5 R4.5 ISE35 34.5 21 PSE IS 8.5 ISG Panel thickness 0.5 to 6 D ZSM1 Panel mount adapter + Front protection cover (Option unit part no.: ZS-27-D) 42.4 11 17.8 8 9.5 33.5 33.5 Panel thickness 0.5 to 6 Lead wire with connector (Option unit part no.: ZS-38-3L) Brown DC (+) Black OUT (1) Blue DC

AD402/600

Refer to pages 14-21-3 to 4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 14-14-6 to 8 for Precautions on every series. Selection Piping Warning Warning AD402 AD600 1.

Related Products: Heavy Duty Auto Drain Series ADH4000 1

Refer to pages 14-21-3 to 4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and pages 14-14-6 to 8 for Precautions on every series. Caution on Design Mounting Caution Caution 1. Install with out port down in a vertical position. Inclination from the vertical line should be less than 5. 2.

ADM200

Refer to pages 14-21-3 to 4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 14-146 to 8 for Precautions on every series. Caution 1. Provide a stop valve before ADM200 to facilitate maintenance and inspection. Maintenance Caution Mounting Warning 1.

GD40-2-01

Refer to pages 14-21-3 to 4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to 14-14-6 to 8 for precautions on every series. Caution on Design Mounting Caution Caution 1. Mounting 1) The HIGH and LOW marks on the back of the differential pressure gauge indicate the high pressure and low pressure sides, respectively.

RSH

SRSH Bore size A, #1 (#1+#5) : RSH Bore size -lll Basic w/locking mechanism w/cancel cap w/lever detection switch w/locking mechanism + cancel cap w/locking mechanism + lever detection switch w/cancel cap + lever detection switch w/locking mechanism+ cancel cap+ lever detection switch Stroke W Bore (mm) R S T U V WB X Y q SRSH Bore size A, #2 (#2+#5) : RSH Bore size -lll-D 50 30 72 40 21

70astamb1

(Drill through) Note) Dd9 L l d m H B C CJ1 D Cotter pin 3 x 18l 4 x 25l 4 x 35l 0.040 0.076 0.050 0.093 0.065 0.117 NT-03 NT-04 NT-05 NT-08 NT-10 CD-M03 CD-M05 CD-M08 10 14 22 32 40 50, 63 80 100 32, 40 50, 63 80, 100 3 4 4 44 60 82 36 51 72 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 4 4.5 5 6 8 11 13 16 17 22 27 32 41 19.6 25.4 31.2 37.0 47.3 16.5 21 26 31 39 CJP CJ2 Note) When

CQM

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com HS A B 32/40/50 (mm) D-M9 V, D-F9 WV D-A9 V Auto switch model Symbol A B Hs A B Hs 12 16 20 25 32 40 50 17 19 22.5 24.5 27 30.5 36.5 0 0 3.5 5.5 5 7.5 10.5 1.5 2 6 7 8 12 10 19 21 24 26 29 32.5 42 4.5 4 7.5 9.5 9 11.5 14.5 5.5 6 10 11 12 16 14 Bore size

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

A E DB Bore size (mm) Bore size (mm) AA E BD 75st, 100st Larger than 100st 37 57 63.5 64 75st, 100st Larger than 100st 50st 25st 50st 25st 50st 75st, 100st 25.50st Larger than 50st 25.50st Larger than 50st 25st Larger than 100st 114 134 160 180 25.50st Larger than 50st 147 168 188 93 63 80 100 63 80 100 41 45.5 46 118 142 162 106.5 115 137 172 198 233 20 25 30 16 160.5 171 208 29.5 18.5 21

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Stroke adjustment screw Note 3) (inner cover) Plug Plug [P (port e)] [P (port c)] A A LW Plug Operating direction P (port a) P (port b) Auto switch mounting groove [P (port g)] 0.5 Note 2) 0.5 Note 2) Left Right Plug [P (port h)] HI HP H HL HG HT HS HB HA HB HA HG HT HI WB 4-J Depth JK Plug [P (port f)] WB WA TA TA WA R TB Plug TB R W [P (port d)] Inner cover Note 3) holding screw (mm) K 21

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

TB W Counterbore depth TC Inner cover holding screw Note) (mm) E 4 6 J M6 x 1 M10 x 1.5 LD 5.6 9.2 L 67 90 K 21 20 JK 10 12 HP 44 73.5 HL 37.6 63.3 HI 23 39 HA 23 39 H 45 75 G 10 9 F 12.5 25 EK 4 6 ED 9.5 13 C 6.4 10.2 B 10.5 16 A 8 12 Model CYV15 CYV32 +0.030 H9 0 +0.030 H9 0 Z 132 165 Y 2.5 3.5 W 69 115 TC 0.5 0.5 TB 15 22 TA 20 22.5 T 30 34 R 45 79.5 QW 48 83 Q 112 147 PC 10 12 PB 60 100

MXH

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX Table (1) Dd 5 5 10 15 L 21 25 35 47 Bore size (mm) MXH6 MXH10 MXH16 MXH20 -X IN port IN port (On both sides) 20Data Operating Precautions Stroke Direction Backlash Caution Caution 1.