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SFOD-OMT0009) 3.2 (1) LED ON PWR : OFF RUN : USB USB : USB ALM : LED PWR PWR (2) /SMC/JXC Controller PC 6 No.SFOD-OMT0011CN-A (Y) (N) OK PC a) b) USB c) USB 7 No.SFOD-OMT0011CN-A PC communication status Offline (Online) (3) Alarm 4.8(3) 8 No.SFOD-OMT0011CN-A 4. 4.1 (1) ON/OFF (1-1)(1-8) (1-1) (1-5) (1-4) (1-3) ON/OFF (1-2) (1-6) (1-7) No. (1-8) (1-

Details of each function are explained in section (1-1) to (1-8) below: (1-1) Menu (1-5) STOP button (1-4) Mode selection (1-2) Sub window buttons (1-3) Servo ON / OFF (1-6) Actuator operation status (1-7) Current step data No. (1-8) Communication status (1-1) Menu Menu is used to display each kind of window, printing, etc.

PF2A550 Nominal thread size Required torque 4 8 Switch output 1 Description PF2A511 Item Black Output for PF23 Main circuit 3 7 7 to 9 Nm PF2A521 Rc(NPT)1/8 30 mm Lead wire and connector Lead wire to supply power and transmit output signals. Main circuit Brown DC(+) + 2 6 Rc(NPT)1/4 12 to 14 Nm Connector Connector for electrical connections.

Display MPa kPa Pa Kgf/cm2 bar mbar psi inHg mmHg mmH2O Fine differential pressure 2 kPa 0.002 0.001 1 0.01 0.001 0.1 Vacuum -101 kPa -0.1 0.001 0.1 0.001 0.001 0.01 0.1 1 Compound 100 kPa F0.1 0.001 0.1 0.001 0.001 0.02 0.1 1 Low pressure 100 kPa 0.1 0.001 0.1 0.001 0.001 0.01 500 kPa 0.5 0.001 1 0.01 0.01 0.1 Positive pressure 1 MPa 1 0.001 1 0.01 0.01 0.1 2 MPa 2 0.001 1 0.01 0.01 0.2

[F 1] Setting of OUT1 completed 1: Selected item becomes valid after pressing the button. 2: After enabling the setting by pressing the button, it is possible to return to the measurement mode by keeping pressing the button for 2 seconds or longer. -34No.PS-OMU0009-D List of output modes 1: The applicable errors are Er6, 8, 9, o.r as well as Er1 or 2 (excluding the error output). : The chart

Display MPa kPa Pa Kgf/cm2 bar mbar psi inHg mmHg mmH2O Fine differential pressure 2 kPa 0.002 0.001 1 0.01 0.001 0.1 Vacuum 101 kPa -0.1 0.001 0.1 0.001 0.001 0.01 0.1 1 Compound 100 kPa F0.1 0.001 0.1 0.001 0.001 0.02 0.1 1 Low pressure 100 kPa 0.1 0.001 0.1 0.001 0.001 0.01 500 kPa 0.5 0.001 1 0.01 0.01 0.1 Positive pressure 1 MPa 1 0.001 1 0.01 0.01 0.1 2 MPa 2 0.001 1 0.01 0.01 0.2

VNA VNA 2 1 2 1 2 1 VNA VNA D-X Technical Data 1177

0 n e t o u c h f i t t i n s f o r P U r s e a i r e x h a u s t ( 0 P t i o n : P , P S ) F Y 2 0 s p a c e r I 7 E20t-01,02P i p i n s a d a p t 0 r7 i n o u t e r d l a m e t e r ( 2 0 0 ) ( 1 9 6 ) 0 p t i 0 n : P S ) ft r / 8 , 1 . / 4 N i p p l e 7 I / B : ( 7 7 ) t . / 4 : ( ' 1 3 N o t e : N 0 . 4 , N o . 7 , 6 : O n l Y 8 : O n l V t y p e t y p e M P r t s e I s p a r e a N O P

ON ON Settings2 Settings1 Settings2 1 Terminal resistor OFF (default setting) Terminal resistor ON Terminal resistor OFF 1 2 3 4 ON 4 3 2 1 OFF OFF ON ON 4 8 BUS IN BUS OUT OFF OFF 5 ON ON 2 Settings2 1 2 3 4 5 6 7 8 ON Holds the output. Clears the output.

-4 i.2.6 . i-4 i.2.7 . i-4 i.2.8 . i-5 i.2.9 . i-6 i.3 . i-7 i.4 / . i-7 1 1.1 . 1-1 1.2 . 1-2 1.2.1 C . 1-2 1.2.2 G . 1-2 1.2.3 K . 1-2 1.2.4 R . 1-2 1.2.5 V . 1-2 1.3 . 1-3 2.1 . 2-1 2.2 . 2-2 2.2.1 . 2-2 2.2.2 . 2-3 2.2.3 . 2-4 2.2.4 . 2-4 2.2.5 . 2-5 2.2.6 . 2-6 2.3 . 2-8 3 / 3.1 . 3-1 3.2 . 3-1 3.3 . 3-2 3.4 . 3-2 1 3.5 . 3-2 3.6 . 3-2 3.7 . 3-3 3.8 . 3

(Space) A b C X y Z 0 1 2 7 8 9 / Press the button to move on to input the next digit. Press the and buttons simultaneously for 1 second or longer. : A dot cannot be displayed for the 6th digit. Perform the above button operation to remove a dot. Press the button for 1 second or longer to stop the flashing.

Contents Bore size (mm) Lube (1, 2), non-lube, air-hydro Lube (1) CS1-125A-PS 125 140 160 180 200 CS1-125A-PS CS1-140A-PS CS1-160A-PS CDS1-180A-PS CDS1-200A-PS @8 29 #0 #1 #2 #3 34 #5 36 Wiper ring CS1-140A-PS CS1-160A-PS Component part numbers: @8, #0, #1, #2, #3, #5.

Contents Bore size (mm) Lube (1, 2), non-lube, air-hydro Lube (1) CS1-125A-PS 125 140 160 180 200 CS1-125A-PS CS1-140A-PS CS1-160A-PS CDS1-180A-PS CDS1-200A-PS @8 29 #0 #1 #2 #3 34 #5 36 Wiper ring CS1-140A-PS CS1-160A-PS Component part numbers: @8, #0, #1, #2, #3, #5.

For dimensions of the DIN rail, refer to page 8. D side 1 2 3 ...

PFMC 7 7 A*8 8 501 5~500L/min 2 102 10~1000L/min 202 20~2000L/min *7 Rc N NPT R F G*1 1ISO228 501 102 202 04 1/2 *7 06 3/4 OUT1 OU2 *5 A NPN NPN M SI*6 B PNP PNP 5 C NPN (1~5V) SI D NPN (4~20mA) 6:L/min:L E*2 PNP (1~5V) F*2 PNP (4~20mA) 1 G*2 NPN *3 M8(3m)*4 H*2 PNP *3 2 3 N M8 *4 / ZS-40-A M8 3 m ZS-42-A PFMC7501/7102 (M352 ) ZS-42-B PFMC7202 (M352 ) -10No.PF-OMS0001CN-A M8 1

Width across flats 3 17 M6 x 1 10.5 26.7 11 5 5.5 34 35 8.5 4 x M6 x 1 +0.030 0 ) depth 4 4H9 ( ) depth 4 4H9 ( Prepared hole diameter 5.1 A 6.5 19 320.05 +0.030 0 30 W 0.50.05 B D 2 x M5 x 0.8 Piping port M5 x 0.8 Vacuum port 47 46 13 ) depth 2 4H9 ( J 10.5 8 +0.030 0 +0.030 0 ) depth 2 4H9 ( 16.5 14.5 Section AA 5 B D Mounting base side Q QL 11-/22-MXP16-30 Without magnet and switch rail

(Side) (Side) Conduit terminal Conduit Grommet VZS 1 4 1, 1 VFS 1 4 , 3 8 1 8 , 1 4 1 8 , 1 4 Individual EXH (Side) (Side) (Bottom) VS4 Optional piping: Individual SUP and different pressure SUP .

Process Data Diagnosis items Bit offset Item Note Internal product malfunction Outside of zero-clear range Outside of rated pressure range Upper temperature limit exceeded inside the product 0 OUT1 output 0: OFF 1: ON 1 OUT2 output 0: OFF 1: ON 2 Diagnosis 0: Normal 1: Abnormal 3 to 15 Measured pressure value Unsigned 13 bit Bit offset 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Item Measured

-2No.PF-OMP0001CN-F / 1 1.5 *3) 1 1 [] -3No.PF-OMP0001CN-F () () () N2 () -4No.PF-OMP0001CN-F () * , 100 N2 050 () JISB 8392-1 1.1.21.6.2 -5No.PF-OMP0001CN-F * FG (49 N ,IN () () -6No.PF-OMP0001CN-F * 6 33 () 10 m DC(-)() -7No.PF-OMP0001CN-F * () () CE 050 -8No.PF-OMP0001CN-F * 1015 10 /23% 3 LCD * OUT -9No.PF-OMP0001CN-F / PFMB 7 7 A*8 *8 2 501 5500 L/min 102 101000

When 1 digit = 1 kPa, the pressure is given with an increment of Digit (Min. setting unit) 1 kPa, e.g., 1, 2, 3,, 99, 100. E Energy saving automatic control Indicate that the vacuum pressure during adsorption is monitored and ON and OFF of the ejector is automatically controlled.