4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

rate: 50% Stroke 300 mm 6 10 16 20 25 32 40 Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SYJ3140-M5 Cylinder is in extending.

3

120 90 100 110 130 95 105 115 135 CKQ 8 8 Arm Proper Tightening Torque 9 Bore size (mm) Proper tightening torque (Nm) 12 16 20, 25 32, 40 50, 63 0.5 to 0.7 2.8 to 3.5 11.5 to 14.0 24 to 30 75 to 90 8 9.5 Fig. 1 Flange Mounting 11 Caution The mounting bolt for the rod flange or head flange should be tightened to the torque shown in the table below. 10.5 Bore size Thread size Tightening torque

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

ass'y for 4 C4: One-touch fitting ass'y for 4 C6: One-touch fitting ass'y for 6 M5: M5 thread C6: One-touch fitting ass'y for 6 M5: M5 thread VQD 45.5 2.5 10.5 (5) 21.5 VZS Dimensions Equation L1=11n+20 n: Staion ( Max. 24 stations) 7.5 L n 1 31 50 60.5 2 42 62.5 73 3 53 75 85.5 5 4 64 87.5 98 6 7 8 11 9 10 12 29 18 VFS L1 L2 L3 75 86 97 108 141 119 130 152 100 112.5 125 125 162.5 137.5

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

-10} at ambient temperature, excluding gas permeation Internal Leakage Pam3/s 1.3 x 10-11{1 x 10-11} at ambient temperature, excluding gas permeation External Flange type KF (NW), CF KF (NW) KF (NW), CF KF (NW) Principle materials Body: SCS13 (Conforms to Stainless steel SUS304) Bellows: Stainless steel SUS316L Bellows holder: Stainless steel SUS304.

Speed Controller with One-touch Fitting

01, 23, 03, 04, 06, 07 500 06, 07, 08, 09, 10 08, 09, 10, 11 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min (ANR) 03, 04 400 200 06, 07 02 01, 23 300 50 03, 04 200 100 01, 23 100 0 0 0 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

HRX-OM-X071

Table 8-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulfuric acid ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L]

Dedicated Controller

Power supply 11) 100/110V AC (50/60Hz) 200/220V AC (50/60Hz) 21) 1) Consult SMC if the supply voltage for LC1-1HV1 will be 110V AC or more, or the supply voltage for LC1-1HV2 will be 220V AC or more. or LC1-1-T1(Teaching box) are required.

DOC1020530

PA02] 0 0 Select a regenerative option. 00: Regenerative option is not used. 00: 100 W 0.2 kW 7 kW 11 kW 22 kW 01: FR-BU2FR-RC FR-CV 02: MR-RB032 03: MR-RB12 04: MR-RB32 05: MR-RB30 06: MR-RB50 () 08: MR-RB31 09: MR-RB51 () 0B: MR-RB3N 0C: MR-RB5N ( ) FA: 11 kW 22 kW UP For drivers of LECSN-T5, do not use a regenerative resistor.

MQQ

10 15, 30, 45, 60, 75, 100 16 Standard type Foot type Front flange type Rear flange type (except 6) Single clevis type (non-integrated type) Double clevis type B L F G C Note) 15, 30, 45, 60, 75, 100 20 15, 30, 45, 60, 75, 100 25 Strokes are available in 1mm increments by installing spacers in standard stroke cylinders.

PC Wiring System Series PCW

4 2 6 10 8 14 12 16 34 20 18 24 22 26 30 28 32 36 40 38 Input/output connector (CS0) 3 1 5 9 7 13 11 15 19 17 23 21 33 25 29 27 31 35 39 37 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Power supply terminal block 108 109 110 111 112 113 114 115 100 101 102 103 104 105 106 107 2 6 4 8 10 12 14 16 18 20 Input/output connector (CS1) 1 5 3 7 11 9 15 13 17 19 Green Red F E D C B A 9 8 7 6 5 4 3 2 1

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

Refer to Glossary of Terms on front matter 10 for details on the max. operating pressure differential and the max. system pressure. 3.0 4.5 0.46 0.61 2.3 3 8 (10A) 6 0.3 1.1 4.1 8 0.3 1.6 6.4 1.0 10 0.3 2.2 11 1 2 (15A) 10 0.3 2.2 11 Note) Weight of grommet type. Add 10 g for conduit type, 30 g for DIN terminal type, 60 g for conduit terminal type respectively.

JXCx-OMT0028CN

500 100 500 1 1 200 1000 200 1000 2 2 A-miniB type 50 200 50 200 3 3 CN2 CN2TB/PC 27 - 6.CN4 6.1 No.

Integrated Controller

T1 = V/a1 = 100/5000 = 0.02 [s], T3 = V/a2 = 100/5000 = 0.02 [s] T2 = = = 1.98 [s] L 0.5 V (T1 + T3) V 200 0.5 100 (0.02 + 0.02) 100 T4 = 0.15 [s] The cycle time can be found as follows.

MGP

PS 24 27 GR-S-010(10g 14 30 1216 30 1216 30 2025 100 3263 100 15 17-2.

AC Servo Motor Driver (CC-Link Type)

The guideline is 80% or less. 0 to 100 % 12 Effective load ratio The continuous effective load current is displayed. The effective value is displayed relative to the rated current of 100%. 0 to 300 % 13 Peak load ratio The maximum torque is displayed.

AC Servo Motor Driver (CC-Link Type)

The guideline is 80% or less. 0 to 100 % 12 Effective load ratio The continuous effective load current is displayed. The effective value is displayed relative to the rated current of 100%. 0 to 300 % 13 Peak load ratio The maximum torque is displayed.

Rotary Table

Description Qty. 4 Seal 1 4 Seal 1 4 Seal 1 4 Seal 1 Parts included 11 Gasket 1 11 Gasket 1 11 Gasket 1 11 Gasket 1 12 Gasket 1 12 Gasket 1 12 Gasket 1 12 Gasket 1 in seal kit 16 Wear ring 4 16 Wear ring 4 16 Wear ring 4 16 Wear ring 4 17 Piston seal 4 17 Piston seal 4 17 Piston seal 4 17 Piston seal 4 Please refer to P19 to 21 for the product construction.

MHF2

12 26 15 4 Accessory option: Hexagon socket head screw (special screws) 7 2-2H9 +0.025 0 depth 2 3 3 7 11 11 Groove for auto switch mounting 2-M3 x 0.5 thread depth 4 Mounting thread 11 34 10 Series MHF2 Dimensions MHF2-8D2 Scale: 80% 2.5H9 +0.025 0 depth 2.5 17 17 17 2.5H9 +0.025 0 depth 2.5 3 3.4 64.3 4-M3 x 0.5 thread depth 7 Mounting thread 32 72 2-M3 x 0.5 thread depth 4 Mounting thread

MGQ

54 56 61 74.5 84 9 10 11 13.5 15.5 19 25 25 29 35.5 45.5 55.5 15 21 27 33 37 40 2 2 2 2 2.5 2.5 1 1 1 1 1.5 1.5 5 10 10 10 15 15 11 11 12.5 15 18 21 M8 x 1.25 M8 x 1.25 M8 x 1.25 25, 50 75, 100 125, 150 175, 200 124 106 48 122 90 110 M8 x 1.25 M8 x 1.25 M8 x 1.25 140 120 56 138 100 124 M10 x 1.5 M10 x 1.5 M10 x 1.5 150 130 69 148 110 132 M10 x 1.5 M10 x 1.5 M10 x 1.5 188 160 88 185 140 166

MK

70 100 250 280 500 595 87 123 290 320 525 640 1100 1520 1350 1805 Availability of Body Options Additional Weight 12 Unit: g 16 20 25 32 40 50 63 Bore size (mm) Bore size 12, 16 20 to 63 M F N MF FN Both ends tapped 6 7 7 6 7 17 Rod end width across flats 10 10 21 21 46 46 Rear boss mounting 2 3 5 7 13 25 With arm 13 32 100 100 200 200 350 350 Rear flange 133 153 166 198 345