HRX-OM-Z015

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 5 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low tank fluid level 1 CH1 abnormal high circulating fluid temp. 2 Reservation

4-channel Flow Monitor ( compatible)

5th letter Y U8 0x00 Refer to Figure "Line name communication data (7 seg)". 0x0974 (2420) 0x0975 (2421) 0x0976 (2422) 0x0977 (2423) (0) 6 R/W Line name 6th letter (11 SEG) Y U8 0x00 Refer to Figure "Line name communication data (11 seg)". (0) 7 R/W Line name 7th letter (11 SEG) Y U8 0x00 Refer to Figure "Line name communication data (11 seg)". (0) 8 R/W Line name 8th letter Y U8 0x00 Refer

Series VQ Metal Seal/Rubber Seal Body Ported

SI unit output No. 0 1 2 3 4 5 6 7 8 9 SI unit output No. 0 1 2 3 4 5 6 7 A B A B B A Void A Void A A B A B B A A A SY Double Double Double Double Double SI unit SI unit Single Single Single Single Single SYJ Stations 1 2 3 4 5 Stations 1 2 3 4 5 Single/Double mixed wiring (Option) Double wiring (Standard) SX SC applicable to SYSBUS Wire System (OMRON) SD applicable to Satellite I/O Link

Vacuum

rib O Deep type B Bellows type List o Pad dia.

Vacuum

rib O Deep type B Bellows type List o Pad dia.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

0(0) 0(0) 0.5(0) 5.5 A 6(4) 6(4) 7(5) 12 B A B 1.5(0) 1.5(0) B 0(0) 0(0) 1(0) 6 B 5(3) 5(3) 6(4) 11 A 7(5) 7(5) 8(6) 13 A B 6(4) 6(4) 7(5) 12 A 4(2) 4(2) 5(3) 10 B 3(1) 3(1) 4(2) 9 A 0.5(0) 0.5(0) 1.5(0) 6.5 Hs 22.5 25 28.5 32.5 Hs 25 27.5 31 35 Hs 60 62.5 66 70 Hs 69.5 72 75.5 79.5 Bore (mm) 20 25 32 40 4.5(2.5) 3.5(1.5) 2.5(0.5) 4.5(2.5) 3.5(1.5) 2.5(0.5) MGF 2.5(0.5) 7.5 5.5(3.5) 10.5

80

/Single Unit Body material Brass 2 x 3.4 Mounting hole W Y Grommet X U 300 Q F D Full wave rectifier (AC type) C R [mm] 1 E G Mounting method Model Port size P B B1 C D E F J K M 2 x P Port size B B1 VDW1 M5 20 10 42.4 15 6 11 M2.5 4 11 VDW2 M5, 1/8 22 11 51.7 20 8 13.5 M3 5 15 Mounting bracket dimensions (XD) Electrical entry M Model Port size P G U W X Y Grommet Q R VDW1 M5 4 28 11 34 17

Series IDG

drain Differential pressure type Float type With drain guide Port size A B C D E F G H J K L M N Q Model P 224 45 11 275 59 14 5.5 133 158 188 228.5 78 179.5 8.5 185 244 269 365 87 30 24 201.5 IDG3V, 3HV, 5V, 5HV IDG10V, 10HV 1/8, 1/4 263.5 7 92.5 222.5 11 102 41 35 IDG20V, 20HV 1/4, 3/8 305 IDG30V, 30HV 315 IDG50V, 50HV 161 409 464 544 121 50 40 IDG60LV, 60SV 77 18 9 274 280 112 315 13 IDG75LV

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

1 IO-Link master Number of ports and connector Symbol Number of ports Connector Port specifications B 4 ports M12 connector Symbol Content A Port Class A B Port Class B Summary of Product parts EX600-L#B1 No.

SMC Pneumatic Clean Series

Series 10-/11-/21-/22-CDG1 Series 10-/11-REC Series 10-/11-CDM2X Series Perpendicular entry is unavailable.

MY1

C D Side support B MY-SB 2-J 2-H C D A B J M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 C 15 25 35 45 E 4.9 6.4 8 11.7 F 3 4 5 6 H 3.4 4.5 5.5 6.6 G 6.5 8 9.5 11 A 61 67 81 100 120 142 172 D 26 38 50 64 B 71.6 79.6 95 118 142 164 202 Applicable cylinder MY1W16 MY1W20 MY1W25 MY1W32 MY1W40 MY1W50 MY1W63 Model MY-S16A B MY-S20A B MY-S25A B MY-S32A B M10 x 1.5 55 14.8 8.5 9 14 80 MY-S40A B M12 x 1.75 70

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

A, B port P port -+ -+ A B R P -+ -+ A B B R port R P For detailed specifications about SYJ3000, refer to page 14.

ZQ-OM01401

ZQ-OM01401-B / / ZQA No.ZQ-OM01401-B 2 1. 5 2. 9 3. 11 3.1. 11 3.2. 12 3.3. 13 3.4. 14 3.5. 16 4. 17 5. 19 6. 20 7. 21 8. 28 9. 32 10. 35 11. 37 12. 40 13. 42 1 - No.ZQ-OM01401-B /ZQA *1) *2) (ISO/IEC)(JIS) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery

Table of Contents

CDU Double Acting, Single Rod D-A9, D-A9V D-M9, D-F9W D-M9V, D-F9WV Bore size (mm) B W A W W B B A A 6 10 16 20 25 32 3.5 4.5 17.5 6.5 0.5 3.5 13.5 17.5 2.5(5) 7.5 0.5 16.5 2.5 3.5 7.5 12.5 16.5 1.5(1) 8 0.5 20 1.5 4 8 16 20 2(0.5) 10 2 24 0 6 10 20 24 4(1.5) 11 3.5 26.5 1.5 7 11 22.5 26.5 5.5(3) 12.5 4.5 27.5 2.5 8.5 12.5 23.5 27.5 6.5(4) Note 1) Figures in the table above are used as a

VM

3 EA EA y A A P P r q B EB B !4 EB !7 !1 !2 t Component Parts Aluminum alloy NBR Note No. !0 Description Material PBT ADC Material Note No. q Description Black zinc chromated Metallic plated Pilot body Body Piston guide B Valve Metallic plated !1 !2 w e Return spring Cushion Cushion Valve spring Return spring Piston B Head cover r Stainless steel Spool/sleeve Stainless steel ZDC !

XM, XY

(FKM) 1.3 x 10-9 w, e w e Nil A B C P1 70W 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 3310-75 Note 1) Values at ambient temperatures, excluding gas permeation.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

[46] [54.5] 22.5 1 4.1 32 5.5 P B B B B B B 4.7 35 44.4 <45.1> 10.2 23.5 26 3 R A A A A A A DIN rail (VZ1000-11-1-) G: Approx. 300 H: Approx. 600 [46] [54.5] ( ) lead wire length ( ) lead wire length DIN rail holding screw (Voltage rating indication) 33.2 (Port M5) (Pitch) P = 10.5 13.5 24.3 2n2-One-touch fitting (ports A, B) Applicable tube O.D.: 4 6 L2 [rail mounting hole pitch 12.5] (

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

override 5 SY B 4 4 SMC SMC 2 A SYJ (L4) (L3) L2 L1 5 18 P=16 B B B 4 4 4 3 SMC SMC 2 2 2 A A A SX 2 SMC SMC SMC VK 1 SMC VZ Stations D side VF 6 6 8.3 8.3 23.5 54.5 84.5 (Single) 109 (Double) VFR (C4, C6) VP7 10 122 (3 Position) 300 (Lead wire length) VP4 Cover diameter 1.6 Cross section 0.34mm2 (M5) 45.5 50.5 1 P VQ (20) 13 R1 R2 5 3 (11) VQ4 8.5 PE port 16.5 16.5 2-Rc(PT)1/8 P(SUP)port

MHZ2/MHZJ2

Dimension table Unit: mm Model A B D2 E D1 -0.016 -0.043 12f8 15 7 11 52.8 MHZ2-10 -0.016 -0.043 16f8 20 10 15 58.7 MHZ2-16 -0.020 -0.053 20f8 22 12 19 70.5 MHZ2-20 -0.020 -0.053 25f8 25 15 24 82.9 MHZ2-25 Other dimensions and specifications correspond to the standard type.

CJ2X/CUX/CQSX/CQ2X/CM2X

Series 10-, 11-CQSX Series 10-, 11-CQ2X How to Order How to Order Clean Series 10 11 Clean Series 10 11 Relief type Vacuum type Relief type Vacuum type C(D)QSX B 20 10 30 F9BW C(D)Q2XB 40 10 30 J79W D D Built-in magnet Built-in magnet Low speed cylinder Mounting style Low speed cylinder Bore size 32 40 50 63 2 pcs. 1 pc. n pcs.