Modular F.R.L. Unit

Model Description AC10 AC20 AC25 AC30 AC40 AC40-06 AC50 AC55 AC60 G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD27 G36-10-01 GC3-10AS G36-2-01 GC3-2AS G36-10-01 GC3-10AS G36-2-01 GC3-2AS G46-10-02 GC3-10AS G46-2-02 GC3-2AS G46-10-02 GC3-10AS G46-2-02 GC3-2AS G46-10-02 GC3-10AS G46-2-02 GC3-2AS G46-10-02 GC3-10AS G46-2-02 GC3-2AS G46-10-02 GC3-10AS G46-2-02 GC3-2AS G-27-10-R1 Note 1) Pressure gauge

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

12 10 12 10 11 10 11 10 13 7.2 7.2 b 0.18 0.24 0.18 0.24 0.28 0.25 0.16 0.26 0.26 0.27 Cv 2.4 3.0 2.4 3.0 2.4 2.8 2.4 2.8 2.4 3.3 b 0.24 0.27 0.24 0.27 0.24 0.27 0.20 0.27 0.25 0.29 Cv 3.0 3.3 3.0 3.3 2.4 2.8 2.4 3.3 2.8 3.0 C 12 13 12 13 10 11 10 13 11 12 7.0 7.0 Metal seal Rubber seal Metal seal Rubber seal Metal seal Rubber seal Metal seal Rubber seal Metal seal Rubber seal Metal

Pin Clamp Cylinder Series CKQ/CLKQ

) Lock at extended direction A (H) (H) 15 3 2 (L) (Same measurement on 4 sides) 450.05 (10) 45 (M10) 40 (M10) 40 0.05 (10) 17 3 LOCK (t=1 x 1, t=0.5 x 2) Depth 13 2 x M10 x 1.5 4 sides x Depth 11 2 x 10H7 4 sides x (Same measurement on 4 sides) 40 (when the shims are attached) 85 (L) 30 (M10) 300.05 (10) (Same measurement on 4 sides) With shims 47 13 91 P1 (lock release port) (The lock is

High Power Cylinder Series RHC

to 1000 35 50 0.042 0 250 to 1000 11 72 75 7 11 80 16 23 58 20 60 80 35 32 63 55 0.074 0 250 to 1000 13 89 78 10 13 90 20 23 61 25 75 95 40 37 80 65 0.074 0 250 to 1000 16 110 80 10 13 95 20 25 63 30 90 116 40 37 100 80 0.074 Bore size (mm) ZZ Y 6.8 to 11.3 WH 335 X 10 P 30 S 1/2 NF 215 NE 24 ND 25 MM 27.7 M M18 x 1.5 LZ 7.5 LX 73 LY 53 LT 88.5 LS 10 LH 275 52 50 342 10 37 1/2 215 24 24.5

SZ3000

11 11 23 11 23 SOL.A SOL.B SOL.B Light/Surge voltage suppressor Station 10 Station 10 SY SOL.A SOL.A 10 10 Light/Surge voltage suppressor Light/Surge voltage suppressor SYJ 15 15 15 SOL.B SOL.B SOL.B Station 2 Station 2 Station 2 2 2 SOL.A SOL.A SOL.A Light/Surge voltage suppressor SX Light/Surge voltage suppressor Light/Surge voltage suppressor Courtesy of Steven Engineering, Inc.-230 Ryan

CXWM/CXWL

10 15 15 20 MS4-10 MS5-10 MS6-15 MS6-15 MS8-20 Left Right Left Right Operating direction of the housing Operating direction of the housing Manufactured by Misumi Trading Ltd.

4-channel Flow Monitor ( compatible)

Normal output Reversed output -100No.PF-OMA1011-A Specifications Model PFG20# series PF2A5 PF3W5 PF2D5 Applicable flow sensor 10 50 11 21 51 04 20 40 11 25 04 20 40 Rated flow range 1 to 10 5 to 50 10 to 100 20 to 200 50 to 500 0.5 to 4 2 to 16 5 to 40 10 to 100 50 to 250 0.4 to 4 1.8 to 20 4 to 40 L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min 0.35 to 1.7 to

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

(9) AS22l1FG-01-08(S)A 8 13.2 22.4 29.5 14.2 11 (10) AS22l1FG-01-10(S)A 10 15.9 25.3 32.4 15.6 12 (11) AS22l1FG-02-23(S)A 3.2 1/8 13 (12.7) 7.2 20.9 30.2 (30.3) 22.6 36.6 35 31.1 29.5 13.3 17 (18) AS22l1FG-02-04(S)A 4 8.2 AS22l1FG-02-06(S)A 6 10.4 23.4 32.7 (32.8) AS22l1FG-02-08(S)A 8 13.2 23.9 33.2 (33.3) 14.2 18 (19) AS22l1FG-02-10(S)A 10 15.9 26.9 36.2 (36.3) 15.6 19 (20) AS32l1FG-02-

IDX-OM-W035

( ) ) ( L1 L2 L3 =M4X10 9-3 IDFB Series 9-2 IDX-OM-W035 9 R 9-4 () () ONOFF 9-5 M 6-4 6-3 T 11-6 11-4 9-4 IDFB Series 9-3 IDX-OM-W035 10 S 10 S 10-1 10-2 PE IDFB Series 10-1 10-1 IDX-OM-W035 11 T 11 T 11-1 IEC 11-2 AC200V / 2A DC24V / 2A ( 20V / 3mA) 11-3 ON ONOFF 3 () 5 /1 () 11-1 IDFB Series 11-1 IDX-OM-W035 11 T 11-4 IDFB22E/37E PE 1 2 3 0.25inch (6.5mm) (1.25mm

Vacuum System Peripherals:

8, R 10, R 10, R 10, R 6 8 10 4 6 KM11 6, 10 One-touch fitting One-touch fitting 1 4 3 8 KM12 6, 10 One-touch fitting Rc KM13 3 One-touch fitting One-touch fitting KM11 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 4 One-touch fitting R male thread KM12 KM14 3 One-touch fitting KM15 KM15 3 One-touch fitting One-touch fitting rod KM16 KM14 KM16 One-touch fitting 3 One-touch fitting KM13 Miniature fittings

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

Note) Metric size Inch size 23 04 06 08 10 12 Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT Port size AS-FE 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 3.2 4 6 8 10 12 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 KE N AS-FG AS-FG AS-FP Note) For applicable tubing O.D. selection, refer to the Model on page 680. Use 1/8" tube.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10 0.05 0.05 0.06 0.04 Table displacement mm Table displacement mm Table displacement mm 0.04 0.03 0.04 0.03 0.02 0.03 0.02 0.02 0.01 0.01 0.01 0 10 20 30 40 Load N 0 10 20 30 50 Load N 0 10 20 30 40 Load N 40 10 10 10 L = 100mm L = 100mm L = 100mm MXP10-10 MXP10-20 MXP10-10 MXP10-20 0.04 0.03 0.08 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10

JXCx-OMT0061CN

F0 Address 10 F0 11 F0 Address(0) 11 F0 1 12 F0 DATA(H) 12 F0 13 F0 DATA(L) 13 F0 2 14 F0 14 F0 15 F0 15 F0 96 - 23. 1 1 2 1 1 RWrn+7 12 (4) 12 10 (0255)RWrn+7 PLC 10 1 1 100mm/s RWwn+2(4) 100mm/s 16 0064h 00 64 h 2 2 1 700.00mm RWwn+3,4(4) 0.01mm 700.00mm 7016 00011170h 00 01 11 70 h 2 -700.00mm RWwn+3,4(4) 0.01mm 2 -700.00mm -7016 FFFEEE90h FF FE EE 90 h 1 2 0255 0255

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

M12 x 1.75 27 14 34 35 34 100 125 15 100 250 16 112 170 M27 x 2 38 6.5 140 140 112 35.5 80 35 27 19 M14 x 2 27 16 34 35 34 100 160 17 110 279 18 140 197 M33 x 2 42 9 174 174 140 45 100 38 36 22 M16 x 2 28 18 38 40 43 108 (mm) Bore size (mm) Y ZZ P R S T V W X 40 8 246 1/4 37 114 11 7.5 8 27 50 10 262 3/8 43 116 11 10 9 30 63 10 280 3/8 47 120 11 12 10 37 80 13 312 1/2 57 132 11 16 13 40 100

CQS

47 52 3.5 3.5 5.4 5.4 6.5 6.5 9 9 6 8 10 12 5 6 8 10 7.5 7.5 9 11 25 29 36 40 7 7 10 10 4 4 7 7 0.5 0.5 1 1 5, 10 Note) For the following bore/stroke sizes, through-hole is threaded over the entire length.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

A void A void A void A void A void A B A B A B A B A B A A A B A B A B A A A A 6 7 8 9 10 11 12 13 14 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 15 0 0 1 2 3 4 5 SC type OMRON SYSBUS wire system compatible SD type Sharp Satellite I/O link system compatible Terminal block (LED) nomenclature ADDRESS NO. STATION NO.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

10 10 14 14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 10 10 14 18 18 22 26 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 84 90 98 116 126 146 159 170 204 215 RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-4-17

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

10 10 14 14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 10 10 14 18 18 22 26 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 84 90 98 116 126 146 159 170 204 215 RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-4-17

ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet Flat Type with Groove A 3 30.5 11 1.2 11 04 6 37 14 14.5 10 47 18 20.5 J K Width across flats E 3 30.5 11 1.8 11 6 37 14 14.5 10 47 18 20.5 06 08 N S U F GN GS HS 7 15 55 36.5 1.2 10 20 62.5 44 06 08 15 55 36.5 1.8 20 62.5 44 04 JB K ZP3 T UM B5 C2 3 31.5 12 11 J K 10 6 38 15 14.5 10 48 19 20.5 JB K 15 56 37.5 10 20 63.5 45 10

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

14 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 20 12 12 10,11 10, 11, 12 08, 09 1000 10 15 8 500 06, 07 10 6 500 4 5 2 0 0 5 10 0 5 10 0 Number of needle rotations Number of needle rotations 15-9-53 12 Series ASD-FG Construction ASD230FG ASD330FG/430FG ASD530FG/630FG ASD530FG-02 @1 !