Rotary Table/

How to Order Specifications and Allowable Load 11-MSQA is identical to the high precision type and 11-MSQB is identical to the basic type. 11 MSQ 10 A90 B A S Number of auto switches Clean series Vacuum type Auto switch type A B High precision type Basic type A R With adjustment bolt Shock absorber Size 10 20 30 50 Dimensions Clean series products do not have empty holes.

HRX-OM-W060

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-13 Connection of RS-232C HRL Series 3.3 Installation 3-27 HRX-OM-W060 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

Direct Operated, 2 Port Solenoid Valve, For Water, Oil, Steam, Air, Series VX

amount (10 6 Pam 3/s) of V, M options are values when differential pressure is 0.1 MPa.

Table of Contents

500 Maximum speed (mm/s) 2.

VNC

560 400 560 630 820 720 960 990 1500 1000 1600 0.3 0.2 7 3 8 11 15 11 15 14 20 16 25 22 32 22 32 28 40 28 40 33 50 33 50 0.7 0.5 1 2 VC 3 4 1.0 0.8 VDW 1.4 1.2 1 VQ 1 4 1 2.4 2.2 VX2 5.2 5.0 32 VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1 2 1 3.8 3.6

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

B C d H MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M NTJ-015A NT-015A NT-02 NT-03 NT-04 8 9.2 6 15.5 5 9.2 M5 x 0.8 4 10 20.5 10 8 8 9.2 8 16.5 6 11.5 M6 x 1.0 5 16 22.5 16 10 8 9.2 10 18.5 6 15 M8 x 1.25 5 20 24.5 20 13 10 11.5 12 22.5 11 19.6 M10 x 1.25 6 25 33.5 25 17 14 16 16 28.5 12 25.4 M14 x 1.5 8 30, 40 40.5 30, 40 22 Applicable bore size (mm) Part no.

Micro Mechanical Valve Series VM1000

mm P.T. 7 N F.O.F. 2 x 4.2 mounting hole 3 x 1 4 2 x 1 8 (SUP CYL port) (EXH port) 2332 Series VFM300 5 Port Mechanical Valve Rubber Seal Series VFM300 Straight plunger VFM350-02-05 Panel mounting hole M18 x 1 Min. 3 Max. 11 Hexagon nut thick 11, acoss flats 27 M5 x 0.8 (Pilot exhaust port) Symbol (C1) 2 (C2) 4 12 14 3 (E1) 1 (S) 5 (E2) 0.5 MPa supply 3.5 mm T.T. 2.0 mm O.T. 1.5 mm 20

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

(mm) Model CXS15-10 S SS ZZ Z 10 77.5 96.5 25 20 87.5 106.5 25 30 97.5 116.5 35 40 107.5 126.5 35 21-/2210-/11-/12CXS15-20 CXS15-30 CXS15-40 CXS15-50 21-/2210-/11-/1221-/2210-/11-/1221-/2210-/11-/1250 117.5 136.5 45 21-/2210-/11-/12856 Dual Rod Cylinder CXSL 1221CXS / 10-/1122Basic: CXS20, CXSL20 10-/11221221ZZ S 12 12 SS 25 Z 2 x 5.5 through 6 30 1 M8 x 1.25 x 6 L (Hexagon socket set screw

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

.: S-LINK (16 outputs) Panasonic Industrial Devices SUNX Co., Ltd.: S-LINK (8 outputs) DeviceNet OMRON Corp.: CompoBus/S (16 outputs) OMRON Corp.: CompoBus/S (8 outputs) CC-Link 377 Series 10-SZ3000 5 Port Solenoid Valve Plug-in Type [Option] An order cannot be placed with only the manifold part no.

Refrigerated Air Dryer

Option symbol T Option symbol S With terminal block for power supply, run & alarm signal and remote operation Power supply terminal block connection IDFB3E-11 to 22E-11 IDFB4E to 75E The option allows the connection of a power cable to a terminal block. 200 V and 460 V specifications are equipped as standard.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

2-M5 x 0.8, depth 8 Z 3 V K 6.5 MX Max. 15 11 M MTS Stroke: S MY MXP16-20B CY Width across flats 12 A MG M8 x 1 H Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 24.3 17.1 14.4 40.8 MA 10.5 11 CX 11 8.5 D27.3 -X 34 20Data A 19 6.5 Operating port 2-M5 x 0.8 (Plug

e-Rodless Actuator

Acceleration [m/s 2] Speed Setting Switch No. Speed [mm/s] 1 1 100 0.49 2 2 200 0.74 3 3 300 0.98 4 4 400 1.23 5 5 500 1.47 6 6 600 1.96 7 7 700 2.45 8 8 800 2.94 9 9 900 3.92 10 10 1000 4.90 Note) The factory default setting for the switch is No.1 (100 mm/s).

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Reduced outgassing Resin materials eliminated Laser marking is employed for the model designation. o u d t g e 2 a c s u s d i Reduction of outgassing due to surface treatment e n o u d t g R e g a 1 c s u s d i e n R g All the external parts (made of aluminum alloy) such as the body and slide table are electroless nickel plated.

7

D Q VXE VXP Conduit C E U 280 VXR VXH 23 B G1/2 VXF R T VX3 A IN OUT N SMC VXA 8 x 18 F S Q D Flat terminal C E U 11 R T B A IN OUT N SMC 8 x 18 S Q D F (mm) Electrical entry Model Flat terminal Conduit terminal Conduit Applicable flange A B C E F N Q R S D T T U U U 84 (92) V T 90 (98) 179.5 (187.5) 92.5 (100.5) 92.5 (100.5) 98.5 (106.5) 192.5 (200.5) 98 (106) 98 (106) 104 (112) 168 (176

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

30 to 800 mm/s 30 to 700 mm/s 30 to 600 mm/s Precautions MX Bumper is standard on both ends Cushion Port size M5 x 0.8 Rc 1/8 Be sure to read before handling.

Stopper Cylinder

13 7 9 11.5 12 17 11.5 12 17 9 9 13 13 9 9 9.5 10 15 17.5 18 23 15 7 11 19 7 15 12 12.5 17.5 18 18.5 23.5 15.5 9.5 16.5 10.5 15 21 11 17 12 12.5 17.5 22.5 23 28 20 9.5 21 10.5 15 25.5 11 21.5 5.5 6 11 30.5 31 36 28 3 29 4 8.5 33.5 4.5 29.5 Note) Adjust the auto switch after confirming the operating conditions in the actual setting.

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

.: Fieldbus H System S kit 1 to 8 stations 16 Panasonic Industrial Devices SUNX Co., Ltd.: S-LINK (16 output points) Panasonic Industrial Devices SUNX Co., Ltd.: S-LINK (8 output points) DeviceNet OMRON Corp.: CompoBus/S (16 output points) OMRON Corp.: CompoBus/S (8 output points) CC-Link 1 to 4 stations 8 D side 1 to 8 stations 16 Serial transmission kit EX140 Integrated-type (For Output

Booster Regulator Series VBA1110 to 4200 1

Then, the charging time (T) for a 100 l tank, T = t x = 49 x = 49 (s). V 10 10 10 T = t x = 110 x = 110 (s). V 10 10 10 T = t x = 2.4 x = 24 (s).

4/5 Port Air Operated Valve Series SYJA3000

Station n L1 L2 Station 2 77 49 Station 20 419 391 3 96 68 4 115 87 5 134 106 6 153 125 7 172 144 8 191 163 9 210 182 10 229 201 11 248 220 12 267 239 13 286 258 14 305 277 15 324 296 16 343 315 17 362 334 18 381 353 19 400 372 1-5-69

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) With low load shock absorber + Adjusting bolts MY1W Bore size Stroke L TT h h E F EA h EB W F Stroke adjusting unit S (Shock absorber stroke) T MY1W16, 20 F MY1W50, 63 Shock absorber EC EY h 3.6 3.6 3.5 4.5 4.5 5.5 5.5 TT 5.4 (Max. 11) 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) S 40.8 40.8 46.7 67.3 67.3 73.2 73.2 E