MHZ

C S C S C S C 0.016 0.043 MHZ2-10 K 7 12f8 52.8 11 15 Applicable tubing End boss assembly MHZ2-16 K 0.016 0.043 10 16f8 58.7 15 20 MHZ2-20 K 0.020 0.053 D2 12 20f8 70.5 19 22 0.020 0.053 MHZ2-25 K 15 25f8 82.9 24 25 D1 MHZ Other dimensions and specifications correspond to the standard type.

MHZ

C S C S C S C 0.016 0.043 MHZ2-10 K 7 12f8 52.8 11 15 Applicable tubing End boss assembly MHZ2-16 K 0.016 0.043 10 16f8 58.7 15 20 MHZ2-20 K 0.020 0.053 D2 12 20f8 70.5 19 22 0.020 0.053 MHZ2-25 K 15 25f8 82.9 24 25 D1 MHZ Other dimensions and specifications correspond to the standard type.

MLGP

RLQ Eccentric distance l1 (mm) Eccentric distance l1 (mm) MLU MLGPL32 to 100 ML1C (12) Over 50 Stroke V = 400 mm/s (11) 50 Stroke or Less V = 400 mm/s D100 50 100 -X 100 2080 80 Data 10 63 63 Load weight m (kg) Load weight m (kg) 50 50 10 40 40 1 32 32 0.1 10 50 100 200 1 10 50 100 200 Eccentric distance l1 (mm) Eccentric distance l1 (mm) 9-11-11 11 Series MLGP Operating pressure 0.4 MPa

MLGP

kg) Load weight m (kg) 50 50 10 40 40 1 32 32 1 10 50 100 200 0.1 10 50 100 200 Eccentric distance l1 (mm) Eccentric distance l1 (mm) 9-11-11 11 Series MLGP Operating pressure 0.4 MPa Operating pressure 0.5 MPa or more Vertical Downward Mounting (Slide bearing) MLGPM20 to 100 (13) 50 Stroke or Less V = 200 mm/s (14) Over 50 Stroke V = 200 mm/s 100 100 80 100 80 100 100 100 80 80 63 63 63

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

How to Order Specifications and Allowable Load 11 MSQ 10 A90 B A S Grade 1 Note) Particle generation grade Suction flow rate (example) 1 l/min (ANR) 11-MSQA is identical to the high precision type and 11-MSQB is identical to the basic type. Number of auto switches Clean Series Vacuum type CRB2 Note) Please refer to Pneumatic Clean Series catalog for further details.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

"S" option is not available.

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

B 97 98 GC 17 20 Y X 11 11 LC 21.5 23 LB 9 9 6 6 LH 5.5 5.5 LT 14 14 LS LZ 42 42 25 25 LY LX 33 33 2.3 2.3 NB 20.5 20.5 NA M10 x 1.0 M12 x 1.0 S 9.5 9.5 Z 54 55 Bore size 72 73 With air cushion Air cushion type is not available for 21-/22-CJ2.

SYJ3000/5000/7000

length) Pg7 20 20 20 20 107 [111.4] 3 3 3 3 87.4 [91.8] 105.2 125.2 90.4 77.4 45.4 127 11 11 11 11 23 2-2.6 (For mounting) 2-2.6 (For mounting) 2-2.6 (For mounting) 23 23 23 27 2-2.6 (For mounting) Refer to page 1-5-79 for dimentions with connector cable. 1-5-32 33 5 Port Solenoid Valve Rubber Seal Series SYJ5000 3 Position Closed Center/Exhaust Center/Pressure Center [ ]: AC 3 4 5 3 4 5

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

connector (M): 10-SYJ5223-M-M5 DIN terminal (D, Y): 10-SYJ5223-M5 M8 connector (WO): 10-SYJ5223-WO-M5 D Y Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 Max. 10 28.1 [35.1] 60.9 53.4 12.7 M8 x 1 32.6 42.1 15.1 39.2 [46.2] Approx. 300 (Lead wire length) Pg7 20 20 20 20 107 [111.4] 3 87.4 [91.8] 3 3 3 105.2 125.2 90.4 77.4 45.4 127 11 11 11 11 23 2 x 2.6 (For mounting) 2 x 2.6

•

L M Stroke S + Stroke ZZ + Stroke (mmJ oS~((lr.;~ r;ilMg9 ' .:a6ra'~~ FT FZ 'AL QIl B E F FD FX FY G J 11 Ii. DC 0 " : '(mm~ .

OMU0023

77 4D M 109 6D m 14 0E SO 46 2E . 78 4E N 110 6E n 15 0F SI 47 2F / 79 4F O 111 6F o 16 10 DLE 48 30 0 80 50 P 112 70 p 17 11 DC1 49 31 1 81 51 Q 113 71 q 18 12 DC2 50 32 2 82 52 R 114 72 r 19 13 DC3 51 33 3 83 53 S 115 73 s 20 14 DC4 52 34 4 84 54 T 116 74 t 21 15 NAK 53 35 5 85 55 U 117 75 u 22 16 SYN 54 36 6 86 56 V 118 76 v 23 17 ETB 55 37 7 87 57 W 119 77 w 24 18 CAN 56 38 8 88 58 X

Tie-rod Type Hydraulic Cylinder

x 2 42 9 174 174 140 45 38 17 36 22 28 34 38 40 3/4 20 205 140 240 108 (mm) Bore size (mm) ZZ R S T V W 40 246 37 114 11 7.5 8 50 262 43 116 11 10 9 63 280 47 120 11 12 10 80 312 57 132 11 16 13 100 340 66 140 12 20 16 125 340 77 140 12 20 16 160 375 94 159 12 24 20 422 CHAW Series Tie-rod Type Hydraulic Cylinder Double Acting/Double Rod Center trunnion type: CHAWT CHQ CHK CHN Z + 1/2 stroke

CXS

V = up to 100mm/s V = up to 300mm/s 20 40 60 80 100 0.05 Overhang L (mm) Weight m (kg) Graph V = over 400mm/s; up to 10mm 11 2 CXSM CXSL 1 CXSL6 CXSM6 0.5 0 0.01 20 40 60 80 100 32 Weight m (kg) Overhang L (mm) 25 Graph up to 50mm 9 0.1 20 0.05 V = up to 100mm/s V = up to 300mm/s 0.05 0.04 15 0.03 10 Weight m (kg) 0 0.01 20 40 60 80 100 Overhang L (mm) 0.02 Graph V = up to 400mm/s; up to

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

Applicable Auto Switch/Refer to page 11-11-1 for further information on auto swiches.

JXCx-OMT0001CN

PLC 11.

Speed Controller with One-touch Fitting

A 3.2 7.2 12 19.1 26.2 19.1 30.6 29.2 27.5 26.1 13.3 9 (9) AS221F-01-04(S)A 4 8.2 AS221F-01-06(S)A 6 10.4 10 (9) AS221F-01-08(S)A 8 13.2 22.4 29.5 14.2 11 (10) AS221F-01-10(S)A 10 15.9 25.3 32.4 15.6 12 (11) AS221F-02-23(S)A 3.2 1/8 13 (12.7) 7.2 20.9 30.2 (30.3) 22.6 36.6 35 31.1 29.5 13.3 18 (19) AS221F-02-04(S)A 4 8.2 AS221F-02-06(S)A 6 10.4 23.4 32.7 (32.8) AS221F-02-08(S)A 8 13.2 23.9

Electric Actuator with Integrated Guide

SET-ON 10 Start readiness signal CN2 24V DC + COM 1 COM 11 NO. 0 Indicates operation in progress when ON. ON when program is being executed and when returning to the home position. 2 BUSY 11 Operating signal NO. 1 12 NO. 2 3 When this signal is OFF, an alarm is being generated for the actuator/controller.

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

x 0.8 C 15 18.3 B 97 98 GC 17 20 Y X 11 11 LC 21.5 23 LB 9 9 6 6 LH 5.5 5.5 LT 14 14 LS LZ 42 42 25 25 LY LX 33 33 2.3 2.3 NB 20.5 20.5 NA M10 x 1.0 M12 x 1.0 S 9.5 9.5 Z 54 55 Bore size 72 73 With air cushion With air cushion type is not available for 21-/22-CJ2.

SUPPORT GUIDE / CLEAN SERIES, ELECTRIC ACTUATOR, 0.92 lb

SUPPORT GUIDE / CLEAN SERIES, ELECTRIC ACTUATOR, A06, 2.37 lb