Speed Controller with

Inch Size Holder for speed controller Applicable tubing 01 03 07 09 11 13 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" AS1002Fm TMH-01J TMH-03J TMH-07J AS2002Fm AS2052Fm TMH-07 TMH-09 AS3002Fm TMH-10 AS4002Fm TMH-13 Tubing size Applicable model Dimensions Part no.

MXW

5 !6 !7 !8 !

2–4

6 17 12 4.5 25.5 5.4 9 9 10 7 1 26 8 22 15.6 5 28 5.4 9 11 10 7 1 30 8 Note) For the following bore/stroke sizes, the through-hole is threaded.

Pin Clamp Cylinders

Note 2) The tightening torque for the hexagon socket head cap screw (M2.5 x 5 L) is 0.25 to 0.35 Nm.

RB/RBL/RBQ

Cap MI W S Cap bracket CEP1 CE1 CE2 ML2B C J G5-S (mm) CV Model Basic type With cap With cap Basic type dimensions h Hexagon nut D M14 x 1.5 M14 x 1.5 M20 x 1.5 M27 x 1.5 E1 5 5 6 8 E2 K 11 12 15 25 L LL S E3 LL Z B C H 3.5 3.5 4 5 MM F MVGQ RBC1411 RBC1412 RBC2015 RBC2725 RB1411 RB1412 RB2015 RB2725 12.2 12.2 18.2 25.2 12 12 18 25 12 12 18 25 58.8 58.8 62.2 86 78.3 79.3 88.2 124 67.3 67.3

COQ2BP

[I (mm) c l BonI.1iIi (mm) A L[) R N X Y LG L 0 ~ t::;r H LH L1 . 50s 107 .2 15 39 18 9 5 Ml0Xl.S 14.7 43.5 MSl(l .25 14 M8x 1.25 B 15 46 18 Ml0xl.5 16.2 43.5 Ml0xl .5 18 9 11 5 Ml0Xl.5 63 112.7 M12xl .75 22 M12xt.75 19.5 11 53.5 13 7 MI6X2.0 59 20 21 80 133 .5 Rod Side Flange: COQ2FP 0-0 OM-DO 4-oFO 40 Thread d Ih A SpeCIal cap bolt 4-N . rBote size A L 0 R N FD FT FV FX F2 Ll H C !

LEH_C

LEHF10K2-16 3 - 3.3 9 13 16 10 18 15 8 11 6 ( 12 4 5 7 2 1 3 17 14 1 2 A 3 B 4 + 5 6 + 7 + 8 9 10 A 11 B 12 13 NBR 14 15 16 17 18 ( DC24V) 4 - 4.

Series AP500

and operating temperature Cv Vacuum to 1700 psig (11.7 MPa) 2550 psig (17.6 MPa) 8000 psig (55.2 MPa) 40 to 160F (40 to 71C) (No freezing) 3) 0.65 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 4) 4 x 10-9 Pam3/sec 5) Inboard leakage Outboard leakage Leak rate Across the seat leak Ra max 15 in. (0.4 m) Option: 10 in. (0.25 m), 7 in. (0.18 m), 5 in. (0.13 m) Surface finish Face seal, Tube weld NPT

240

or less 100 70 30 3 100 15 1 LEC 11.

7

5 Component Parts MK No.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

Material Note PBT PBT Description Body A Body B Needle Seat ring Spring U seal Cassette Seal O-ring O-ring O-ring O-ring Gasket 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 1 2 3 4 5 6 7 8 9 10 11 12 13 14 Body A Elbow body Body B Needle Seat ring Spring U seal Cassette Seal O-ring O-ring O-ring O-ring O-ring Electroless nickel plated Electroless nickel plated Electroless nickel plated Brass

ZPT/ZPX

A B d H Model H A SN-015A M14 x 1 19 21.9 5 ZPNA-M16 M16 x 1.5 22 25.4 6 ZPNA-M18 M18 x 1.5 27 31.2 9 ZPNA-M22 M22 x 1.5 30 34.6 8 Bolts (Hexagonal Socket Head Cap Screw) Dimensions d B (mm) A B d L 8 11 5.5 M3 x 0.5 L 8 12 7 M4 x 0.7 A 10 15 8.5 M5 x 0.8 13-11-96

SMC Electronic Switch Series Variations

F.S. 5% F.S.

4/5 Port Air Operated Valve SYJA3000 Series

center/pressure center SYJA3 40-M5 3 4 5 3 4 5 7.1 9 10 2 x M3 x 0.5 (Pilot port) 1.8 10 4 A B 1.5 7 8.2 19 2 x M3 x 0.5 (Pilot port) (For mounting) 2 x 3.2 22 3 49 2.5 (For mounting) 2 x 3.2 equivalent (18.5) A B 1.5 11 17.5 Manual override A B 1.5 33 16 (18.5) (21) 18.9 13.5 15 54.5 Manual override 21.6 54.5 28.5 2 x 1 (Bleed port) 21 R2 P P1 P R R (11) (0.5) 13 10 5 2 x 1 (Bleed port)

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

5 !6 !7 !

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

5 gl e ge ge ad an an ju t r t r st en m en en stm m t r st ju ju an ad ad ge le e Ang 5 gl n A B port A port B port A port 90 A 5 n gl ge e an ad t r ju en st m 180 Note) The drawings show the rotation range for the shaft's single flat.

Ionizer

10 5 5 0 0 500 1500 2000 0 0 100 200 300 400 500 600 1000 Distance (mm) Distance (mm) Air purge: Yes Supply pressure: 0.1 MPa (7 L/min (ANR) per nozzle) Air purge: Yes Supply pressure: 0.05 MPa (3.5 L/min (ANR) per nozzle) 45 25 40 35 20 Discharge time (s) Discharge time (s) 60 Hz 30 15 25 1 Hz/60 Hz 20 1 Hz 10 15 Sensing DC Sensing DC 10 5 5 00 500 1000 1500 2000 00 500 1000 1500 2000 Distance

PF2D

1 q t i 16-11-40 5 Series PF2D Digital Flow Switch For Deionized Water and Chemicals Dimensions: Separate Type Sensor Unit PF2D504-11/520-13 Internal circuit and wiring example 60 70 176 z to , are terminal numbers.

AC Servo Motor Driver (SSCNET Type)

(Default) Spare (SW2-2) Rotary axis setting switch (SW1) Description Display 0 Axis No.1 01 1 Axis No.2 02 2 Axis No.3 03 3 Axis No.4 04 4 Axis No.5 05 5 Axis No.6 06 6 Axis No.7 07 Down 7 Axis No.8 08 (Be sure to set to the 8 Axis No.9 09 "Down" position.) 9 Axis No.10 10 A Axis No.11 11 B Axis No.12 12 C Axis No.13 13 D Axis No.14 14 E Axis No.15 15 F Axis No.16 16 -12- 5.

JXCx-OMT0028CN

No.1 2 =0 39 - 11. 11.1 [IN] Bit/Byte / Address ID No. 0 OUT0 bit 0,1 1 OUT1 bit 0,1 2 OUT2 bit 0,1 3 OUT3 bit 0,1 0 4 OUT4 bit 0,1 5 OUT5 bit 0,1 6 bit 0 7 bit 0 0 BUSY bit 0,1 1 SVRE bit 0,1 2 SETON bit 0,1 3 INP bit 0,1 1 4 AREA bit 0,1 5 WAREA bit 0,1 ID1 6 ESTOP bit 0,1 7 ALARM bit 0,1 2 H 3 4 0.01mm 2147483647 4 5 L 6 H 2 065500 mm/s 7 L 8 H 2 0300 % 9 L 10 H 11 4 0.01mm