OMU0023

65 41 A 97 61 a 2 2 STX 34 22 " 66 42 B 98 62 b 3 3 ETX 35 23 # 67 43 C 99 63 c 4 4 EOT 36 24 $ 68 44 D 100 64 d 5 5 ENQ 37 25 % 69 45 E 101 65 e 6 6 ACK 38 26 & 70 46 F 102 66 f 7 7 BEL 39 27 ' 71 47 G 103 67 g 8 8 BS 40 28 ( 72 48 H 104 68 h 9 9 HT 41 29 ) 73 49 I 105 69 i 10 0A LF 42 2A * 74 4A J 106 6A j 11 0B VT 43 2B + 75 4B K 107 6B k 12 0C FF 44 2C , 76 4C L 108 6C l 13 0D CR 45 2D

44

66 33 40 66 30 38 63 51 67 4 2.5 1.8 1.6 d 8 5 KQB2 Applicable tubing 4 3 2.3 2.6 H1 H2 KS KX 6 4 3.3 6 10 5.8 M A L KM 14 8 6 14 6.6 5.3 17 Connection thread 17 KF 17 25 10 7.5 6.8 30 M 22 27.1 17 7.6 17 25 H/DL L/LL 10 8 7.3 35 22 27.1 KC 17 26.6 12 9 8 45 22 28.7 17 8.5 KK 17 26.6 12 10 9 57 KK130 22 28.7 28 29.9 16 13 22 9.3 12 101 22 DM Reference dimensions after installation of R

VFS

1 Hexagon socket head screw Steel M4 x 40 M4 x 40 M4 x 40 !2 Detent assembly VF4000-12A Refer to How to Order Pilot Valve Assembly on page 3-8-70. Pilot valve assembly !

P

(mm) ZX Pad diameter (mm) Lock ring 1 2 10 to 16 20 to 32 02 04 2 4 -X19 With lock ring Without lock ring (10 or larger) ZR 3 40, 50 06 6 08 8 ZM Material 10 10 N S NBR Silicon rubber 13 13 ZH 16 16 U Urethane rubber Pad style 20 20 ZU F Fluorine rubber 25 25 U C Flat Flat with ribs GN Conductive NBR (2 to 16) 32 32 GSConductive silicon rubber (2 to 16) 40 40 D Deep ZL 50 50 B Bellows 20

IDG

0 40 80 120 160 20 40 60 80 0 Outlet air flow rate (l/min (ANR)) Outlet air flow rate (l/min (ANR)) IDG20 (Type A products group) IDG30 (Type B products group) P1 = 0.3 MPa P1 = 0.3 MPa 0 0 Outlet air atmospheric pressure dew point (C) Outlet air atmospheric pressure dew point (C) P1 = 0.5 MPa 10 P1 = 0.5 MPa 10 P1 = 0.7 MPa 20 HA 20 P1 = 0.7 MPa 30 AT 30 40 ID 50 0 40 100 200 300 0 100

MY1

160 WW 11 13 20 YW 070 088 104 Z 240 300 360 ZZ XX 38 48 54 Bore size (mm) 25 32 40 Rc1/8 Rc1/16 Rc1/8 Rc1/16 Rc1/4 25.50 29 .0 Rc1/8 Hole Size for Centralized Piping on the Bottom (Mounting side should be machined to these dimensions.)

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

2 Stroke + 350 40 36 23 Body mounting reference plane 40 (T-slot pitch) 3-5H10 depth 5 3.3 5.8 1.7 5.3 T-slot 1 dimensions (Switch groove) 11.5 27 40 80 Stroke + 145 45 9.4 4.5 10 18 The body mounting reference plane should be used as a standard when mounting onto equipment.

Series KV2 Fittings

(g) Bag/Box Quantity MA MB L1 L2 L3 P A* 5/8 1/2 1/2 1/2 5/8 5/8 1/4 3/8 3/8 3/8 3/8 1/2 1/2-14 1/4-18 3/8-18 1/2-14 1/2-14 1/2-14 KV2Z07-15-37S KV2Z11-13-35S KV2Z11-13-36S1 KV2Z11-13-37S1 KV2Z11-15-37S KV2Z13-15-37S 25.40 25.40 25.40 25.40 25.40 25.40 28.9 23.9 23.9 23.9 28.9 28.9 29.8 29.8 29.8 29.8 29.8 29.8 37.9 34.5 34.5 34.5 37.3 36.4 33.7 27.2 28.2 31.2 33.7 33.7 28.9 23.9 23.9 23.9

CL

14 0.070 0 20 25 32 40 44 52.5 57.5 66 29 33 40 49 14 16 20 22 11 13 15 18 10 10 10 10 5.5 5.5 6.6 6.6 25 30 35 40 3.2 3.2 4.5 4.5 35.8 39.8 49.4 58.4 42 42 48 56 16 20 22 30 28 28 28 30 43.4 48 59.4 71.4 Clevis pin and snap ring are attached.

Modular F.R.L. Unit

AC20, AC20A AC25, AC25A AC30, AC30A AC40, AC40A Note) 40 40 28 11 11 1/8, 1/4 AKM2000 1/8, 1/4 53 48 34 14 13 AKM3000 AKM4000 70 54 42 18 15 1/4, 3/8 How to Order Note) Not applicable to AC40-06.

Ionizer

(For mounting, opposite side: Same) 13 17 7 Connection cable IZS31-CF-X210 14.9 16 20 20 52 (Cable length: Refer to the above table.) 65 8P modular jack (Plug for sensor cable) Maintenance detection level selection switch 15 100 4 x M4 x 0.7 depth 5 20 900 Connection cable length L (For mounting, opposite side: Same) 7 16 26 58 15 30 40 x 4 30 40 x 2 220 30 180 Air purge port: 80 mm between

05-hyq-e

Contents Bore size (mm) NBR NBR 12 12 12 12 Bumper A Bumper A Bumper A Bumper A Resin Resin Resin Resin 12 12 Bumper A Bumper A Resin Resin 13 !4 13 !4 13 !4 13 !4 Bumper B Bumper B Bumper B Bumper B Resin Resin Resin Resin (Only 63 is common to the bumper A.) (Only 63 is common to the bumper A.) 13 !4 13 !4 Bumper B Bumper B Resin Resin (Only 63 is common to the bumper A.)

Table of Contents

Negative common specifications L dimension How to order negative COM manifold 11 12 13 14 15 16 17 18 19 20 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. L dimension L kit: 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 No. VV5Q13 L 08 N N 1 D L dimension 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

Refer to page 5-10-13 for Precautions on these products.

MGQ

Bore size Standard stroke (mm) MM YY L X K W J V H GA GB TA TB U G T F S DA R C Z NN Q B ML P PW YL (mm) 12 16 20 25 18 50 13 5 16 40 58 5 7.5 5 36 29 56 8 22 6 48 29 12 14 39 7 10, 20, 30, 40, 50, 75, 100 M4 x 0.7 10 M4 x 0.7 M5 x 0.8 7 M4 x 0.7 11 22 54 15 7 18 42 64 2.5 8 5.5 38 33 62 8 25 8 52 33 13 16 43 8 10, 20, 30, 40, 50, 75, 100 M5 x 0.8 13 M5 x 0.8 M5 x 0.8 5 M5 x 0.8 11 20, 30

CC

40 28 100 27 1 115 62 180.5 124.9 CCVL02-lG-S 3/4 66 107 116 135 50 24 40 40 28 100 27 2 135 80 180.5 132.8 CCVLl1-lG-S M6 X 1 10.5 to 12.5 3/4 66 107 116 135 50 24 40 40 28 100 27 1 135 80 115 180.5 124.9 CCVLl2-lG-S 3/4 66 107 116 135 50 24 40 40 28 CCVLl3-lG-S 100 27 1 135 80 115 180.5 124.9 3/4 66 107 CCVLl0-S 116 50 40 28 100 27 135 80 115 *Pitch of mounting on the wall

Compressed Air Preparation Filter

133.9 17.5 21 25 21 30 27 22 5.4 8.4 60 2.3 28 AMK30-D 1/4, 3/8 53 167 21.5 26.5 30 35 26.5 41 35 25 6.5 13 71 2.3 32 AMK40-D 1/4, 3/8, 1/2 70 212.5 25.5 35.5 38.4 40 35.5 50 52 30 8.5 12.5 88 2.3 39 AMK50-D 3/4, 1 90 222 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 AMK60-D 1 90 299.1 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 Semi-standard specifications Metal bowl B AMK20-D 139.1 AMK30-

Thermo-chiller

]) (Grommet with membrane) 4.5 [115] 7.0 [179] 4.5 [116] 4.3 [109] Power terminal 7.6 [192] 8.9 [225] Pump drain port Rc1/4 (Valve stopper) 10.7 [272] 20.0 [508] Power cable entry (Hole 1.6 [40]) (Grommet with membrane) 22.9 [583] 13 Series HRS100/150 Thermo-chiller Standard Type Dimensions inch [mm] HRS100/150-W-20 (Water-cooled 200 V type) HRS100/150-W-40 (Water-cooled 400 V type) Anchor

Lightweight and Compact

Applicable model HRS-WL003 HRS090-mm-20/40 Parts List q No.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

W is width across flats dimension. 30.5 26 36 9 10 40 32 36 47 108 Union: LQ2U Metric sizes Applicable tubing O.D. Model L M N W H E W 12 19 10 12 6 8 10 4 6 LQ2U22 LQ2U21 19 18 19.9 16 55 1/4 (M) LQ2U52 LQ2U51 LQ2U42 LQ2U41 LQ2U33 LQ2U32 LQ2U31 SMC 65 22 24 26.2 24 H 77 64 (E) (E) L 28 30 33.1 30 21 Class 2, 3 88 75 32 36 40 36 26 86 (M) N Inch sizes Applicable tubing O.D.