CJ2

, 45, 60 6 10 16 3.72 1.77 10 15, 30, 45, 60 CS1 6.86 3.53 Precautions 16 15, 30, 45, 60, 75, 100, 125, 150 14.2 6.86 Minimum Strokes for Auto Switch Mounting Be sure to read before handling.

5 Port Air Operated Valve

and Type 31) n: Stations 20 11 12 19 18 17 16 15 14 13 2 3 n L 10 9 8 7 6 5 4 L1 L2 569.5 74.5 102 129.5 157 184.5 212 239.5 267 294.5 322 349.5 377 404.5 432 459.5 487 514.5 542 64.5 92 119.5 147 174.5 202 229.5 257 284.5 312 339.5 367 394.5 422 449.5 477 504.5 532 559.5 1515 VFA1000/3000/5000 Series Dimensions: VFA3000 Series Type 30: VV5FA3-30-1-: Common exhaust 6 L2 L1 17.5 1/8, 1/4

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

(Same surface) 30 30 30 D-M9V 2 pcs. (Different surfaces) 10 10 10 1 pc. 5 5 5 2 pcs. (Same surface) 55 55 55 D-M9 D-M9W 2 pcs. (Different surfaces) 15 15 15 1 pc. 15 15 10 2 pcs. (Same surface) 30 30 30 D-M9WV 2 pcs. (Different surfaces) 15 15 15 1 pc. 10 10 10 2 pcs. (Same surface) 60 60 60 D-M9A 20 15 2 pcs. (Different surfaces) 15 15 1 pc. 15 15 10 2 pcs.

High performance type Step Motor Controller (Servo/24 VDC)

Make sure to allow intervals of 15 ms or longer (30 ms is recommended) between input signals, and maintain the input state for the same period of time. 30 No.JXC-OMY0002-A -Output terminalNo. Function Description B1 OUT0 When the operation is started and DRIVE is turned OFF, a Bit no. corresponding to the number of the active step data will be output from these terminals.

VZS

entry) n: Stations L Stations Formula 20n + 21 20n + 30 2 61 70 3 81 90 4 101 110 5 121 130 6 141 150 7 161 170 8 181 190 9 201 210 10 221 230 11 241 250 12 261 270 13 281 290 14 301 310 15 321 330 L1 L2 3-7-33 34 Series VZS3000 Manifold Non plug-in type VV5ZS3-51Station 1Port size Grommet (G) 2-4.5 mounting hole 2n-Rc 1/8, 1/4 Manual override U side (n) (2) (1) Stations D side Courtesy

AC Servo Motor Driver (SSCNET /H Type)

Axis No. settings 13 5. Parameter list (Driver side) 15 6.

NCM

D-A90(V) Contact protection box OUT () Brown Reed switch CD-P11 (g) Weight OUT () Blue CD-P12 D-A90 D-A90V D-A93 D-A93V D-A96 D-A96V Model D-A93(V) Lead wire length (m) 0.5 6 6 6 6 8 8 3 30 30 30 30 41 41 LED diode Brown OUT (+) Brown Contact protection box Dimensions Resistor Unit: mm Reed switch Zener diode D-A90/D-A93/D-A96 CD-P11 CD-P12 2 2.8 4.5 OUT () Blue 2.7 Blue 4 22 (24.5) Indicator

Rotary Table

Description Qty. 4 Seal 1 4 Seal 1 4 Seal 1 12 Gasket 4 12 Gasket 4 12 Gasket 4 Parts included 13 O-ring 4 13 O-ring 4 13 O-ring 4 in seal kit 17 Wear ring 4 17 Wear ring 4 17 Wear ring 4 18 Piston seal 4 18 Piston seal 4 18 Piston seal 4 27 Seal washer 2 27 Seal washer 2 27 Seal washer 2 < External shock absorber type > Description Size 10 20 30 50 P523010-6 P523020-6 P523030-6 P523040-6

MQQ

4 8 15 6 M12 x 1 M4 x 0.7 65 18.5 101 28 11 20 16 10 M5 x 0.8 22 15 5 10 15 6 M14 x 1 M5 x 0.8 74 22 114 30 12 21 19.5 16 Rc 1/8 28.5 18 8 13 25 8.5 M20 x 1.5 M8 x 1.25 97.5 31.5 151 40.5 20.5 33 29 20 Rc 1/8 32 18 10 13 30 8.5 M26 x 1.5 M10 x 1.25 102.5 34.5 160 44.5 20.5 38 32 25 Refer to page 18 for details regarding the rod end nut and mounting nut. 14 Series MQM Refer to the standard

A_HEC-OM-K001

HED003-W2 A B 13 19 HED003-C2A B (Temperature Controller) HED003-HW13 19 (Heat Exchanger) HED005-W2 A B 13 19 HED005-C2A B (Temperature Controller) HED005-HW13 19 (Heat Exchanger) HED007-W2 A B 13 19 HED007-C2A B (Temperature Controller) HED007-HW13 19 (Heat Exchanger) Keep this manual available whenever necessary.

Multistage Ejector Series ZL112/212 1

Output Specifications 25(L) 1 output NPN open collector 30 V, 80 mA or less ZSE4 ZSE4B 26(L) Analog output (1 to 5 V) 67(L) 1 output PNP open collector 80 mA or less 26(L) Analog output (1 to 5 V) 27(L) 2 outputs NPN open collector 30 V, 80 mA or less ZSE4E 67(L) 2 outputs PNP open collector 80 mA or less 13-7-6 7 Multistage Ejector Series ZL Construction q t e !

SMC Electronic Switch Series Variations

13 Dimensions/Base Mounted Style: ZSE2-0R Grommet style/ZSE2-0R-15 Connector style/ZSE2-0R-15C Pressure setting Pressure setting Indicator light Indicator light trimmer trimmer 15 15 9 9 L H L H 2-M2.5 Mounting thread 2-M2.5 Mounting thread 25 30 25 30 (3000) (3000) 3 40 9.5 3 40 1.5 16 18 20 16 18 20 11 11 13 13 9 9 Gasket 3.3 Gasket 3.3 3.10-5 Compact Pressure Switch ZSE2/ISE2 Dimensions

Auto Switch Guide

D-A90V OUT() Brown Contact protection box CD-P11 CD-P12 Reed switch OUT ( ) Blue (g) Weight D-A93V D-A96 D-A96V D-A90 D-A90V D-A93 D-A93V Model 8 8 Lead wire length: 0.5 m 6 6 6 6 LED Brown (Red) OUT (+) Brown Contact protection box CD-P11 CD-P12 41 41 Lead wire length: 3 m 30 30 30 30 Resistor Reed switch Zener diode Dimensions OUT () Blue D-A90, D-A93, D-A96 Blue (Black) D-A96V DC (+

Auto Switch Guide

D-A90V OUT() Brown Contact protection box CD-P11 CD-P12 Reed switch OUT ( ) Blue (g) Weight D-A93V D-A96 D-A96V D-A90 D-A90V D-A93 D-A93V Model 8 8 Lead wire length: 0.5 m 6 6 6 6 LED Brown (Red) OUT (+) Brown Contact protection box CD-P11 CD-P12 41 41 Lead wire length: 3 m 30 30 30 30 Resistor Reed switch Zener diode Dimensions OUT () Blue D-A90, D-A93, D-A96 Blue (Black) D-A96V DC (+

Hydraulic Cylinders

49 1/8 17 8 32 M12 x 1.75 11 depth 6.5 61 51 10 18 14 15 7 47 6.6 63 1/4 19.5 10 40 M16 x 2 14 depth 8.6 65 55 10 22.4 19 20 7 52 9 71 1/4 20.5 10 50 M20 x 2.5 17.5 depth 10.8 71 60 11 28 24 24 8 58 11 81 1/4 22 10 63 M27 x 3 20 depth 13 80 67 13 35.5 30 33 9 69 13 97 1/4 25.5 10 80 M30 x 3.5 23 depth 15.2 95 78 17 45 41 36 14 86 15 117 3/8 30 15 100 M39 x 4 26 depth 17.5 122 96 26 56 50

CE2

71.5 22 60 42 20 44 22 16 21 11 32 10 10 150.5 15 26 54 10 8 M8 x 1.25 6 11 27 25 to 800 25 to 650 50 35 80.5 27 70 46 21 52 24 20 28.5 10 40 10 12 162.5 17 27 59 13 11 M8 x 1.25 9 11 32 25 to 800 25 to 650 60 35 98.5 27 85 48.5 23 64 24 20 28.5 13 40 10 15 174 17 26 67 18 11 M10 x 1.25 9 13.5 32 25 to 750 25 to 600 70 40 117.5 32 102 55 23 78 26.5 25 36 15 52 14 17 189 21 30 72 23 13 M12

CE2

RE A B Mounting bracket nut Unit holding tie-rod Bore size (mm) Nut Width across flats REC Socket Width across flats Socket JIS B 4636 2 point angle socket 10 10 40 JIS B 1181 Class 3 M8 x 1.25 JIS B 4636 CX 13 2 point angle socket 13 JIS B 4636 2 point angle socket 13 50 13 CY JIS B 4636 2 point angle socket 13 JIS B 4636 JIS B 1181 Class 3 M10 x 1.25 63 17 13 2 point angle socket 17 MQQ

7

U 49.5 (55) V U T 55.5 (61) U 22 27 24 30 50 20 4.5 5 11 13 37.5 42.5 25 25 49.5 (55) VXD2 3 A 99.5 68.5 47.5 23 ( ): Denotes the Normally Open (N.O.) dimensions.

Ionizer

(For mounting, opposite side: Same) 13 17 7 Connection cable IZS31-CF-X210 14.9 16 20 20 52 (Cable length: Refer to the above table.) 65 8P modular jack (Plug for sensor cable) Maintenance detection level selection switch 15 100 4 x M4 x 0.7 depth 5 20 900 Connection cable length L (For mounting, opposite side: Same) 7 16 26 58 15 30 40 x 4 30 40 x 2 220 30 180 Air purge port: 80 mm between

JXCx-OMX0009

External Connections . 30 5.1 PWR: Power supply connector . 30 5.2 MOT: Motor connector, ENC: Encoder connector . 30 5.3 SI: Serial I/O Connector . 30 (1) Connecting the teaching box . 30 (2) Connection with a PC . 31 5.4 CC-Link communication connector . 31 6.