4/5 Port Air Operated Valve SYJA3000 Series

) 51 (25) Body ported 5 port Base mounted (with sub-plate) 4 Port Base Mounted (For manifold) Note 1) 2 position 0.36 0.12 0.46 0.35 0.12 0.46 0.33 0.12 0.47 0.31 0.12 0.47 SYJA340-M5 M5 x 0.8 M3 x 0.5 0.39 0.10 0.59 [0.40] 0.43 [0.33] 0.16 [0.11] 0.36 54 (28) 3 position 0.42 [0.33] 0.16 [0.080] 0.46 0.32 0.11 0.58 [0.32] 22 25 2 position SYJA320-M3 M3 x 0.5 M3 x 0.5 0.9 28 3 position 22

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

Width across flats 13 Width across flats 16 Width across flats 19 (mm) Symbol ZZ Z SS KK Stroke 20 10 50 40 30 75 100 100 20 30 10 10 75 50 10 20 20 40 40 75 75 30 30 50 50 100 100 40 Model CXS20-R CXS25-R CXS32-R 22 27 22 40 80 60 100 124 110 134 130 154 170 194 120 144 140 164 190 214 24.5 29.5 60 24.5 80 107 131 117 141 142 166 172 196 132 156 147 171 197 221 40 29 34 49 122 152 132 162

Vacuum Unit

100 100 100 Vacuum pressure [kPa] 80 90 90 60 80 80 40 Suction flow (High-noise reduction silencer exhaust) Vacuum pressure 70 70 Port exhaust 20 Silencer exhaust/Complex exhaust Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 Suction flow (Port exhaust) 60 60 Suction flow [L/min (ANR)] 50 50 Flow Rate Characteristics Suction flow (Silencer exhaust/ Complex exhaust) Suction flow (Silencer exhaust

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

/60Hz 5 6 V S R 1 2 Series Without light/surge voltage suppressor Nil SY3000 SY5000 3 5 With surge voltage suppressor S With light/surge voltage suppressor Z A, B port size A, B port size 200VAC 50/60Hz 110VAC 50/60Hz [115VAC 50/60Hz] With surge voltage suppressor (non-polar type) Applicable series Applicable series Port size Port size Symbol Symbol R 3 02 C8 C10 Rc(PT) 1/4 8 One-touch fitting

OMU0023

Controller version (the time in the bracket indicates the schedule for switching) Function Ver 2.0 Ver2.1 to Ver2.4 Ver2.5 (August 2014) (Sept. 2015) (June 2020) Corresponding card motor 6 types LAT3M-50 LAT3M-50 LAT3F-50 LAT3F-50 Alarm history count 4 points 4 points 20 points Communication speed 19200bps 2,400bps 2,400bps 9,600bps 9,600bps 19,200bps 19,200bps 38,400bps 38,400bps 57,600bps

HRX-OM-W060

Table 7.1-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulphate ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L] 70

CE

, 75, 100, 125, 150 94 69 15 6 25 42.5 M5 x 0.8 16 5.2 25 15.5 25, 50, 75, 100, 125, 150, 175, 200 106 78 15.5 10 36 53.5 M8 x 1.25 10 8 28 25.5 Q R T V Y N O P Bore size (mm) 12 20 M4 x 0.7 M5 x 0.8 47 7 53.5 22 7 5.5 M6 x 1 M5 x 0.8 50 15 62.5 36 5 For rod nut and accessory bracket, refer to page 10-12-20.

CE

, 75, 100, 125, 150 94 M5 x 0.8 16 5.2 25 15.5 69 15 6 25 42.5 25, 50, 75, 100, 125, 150, 175, 200 106 M8 x 1.25 10 8 28 25.5 78 15.5 10 36 53.5 Q R T V Y N O P Bore size (mm) 12 20 47 7 53.5 22 7 M4 x 0.7 M5 x 0.8 50 15 62.5 36 5 5.5 M6 x 1 M5 x 0.8 For rod nut and accessory bracket, refer to page 10-12-20.

3

With arm Port side M With Arm Rotary direction: R During unclamping (Extension end) Rotary direction: L During unclamping (Extension end) Model (mm) N N O P U V AD 18 18 22 22 MKB32-Z MKB40-Z MKB50-Z MKB63-Z 67 67 88 88 45 45 65 65 20 20 22 22 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 15 to 25 15 to 25 30 to 40 30 to 40 10 mm Clamp stroke M Rod state Model O P 10 50 mm 85.5 150.5 93 158 103

Series KP/KPQ/KPG

H Connection threads 10 35 18.5 25 29.4 24 17 17 12 50 20.9 40 31.4 25 22 Reference dimension for R threads after installation Note 1) D1 indicates the maximum diameter.

Series KP/KPQ/KPG

H Connection threads 10 35 18.5 25 29.4 24 17 17 12 50 20.9 40 31.4 25 22 Reference dimension for R threads after installation Note 1) D1 indicates the maximum diameter.

Power Clamp Cylinder

Bore size (mm) Tightening torque Description Ibfin Nm 27 to 35 44 to 62 44 to 62 44 to 62 13 to 18 27 to 35 27 to 35 27 to 35 110 to 150 1150 to 1327 1416 to 1770 4248 to 4600 13 to 18 22 to 27 22 to 27 27 to 44 40 50 63 80 40 50 63 80 40 50 63 80 40 50 63 80 3.0 to 4.0 5.0 to 7.0 5.0 to 7.0 5.0 to 7.0 1.5 to 2.0 3.0 to 4.0 3.0 to 4.0 3.0 to 4.0 12.5 to 17.0 130 to 150 160 to 200 480 to 520

RZQ

40 72 18 40 50 90 22 50 ML2B 63 108 28 60 FV M C J G5-S CV M L B + Full stroke FT FZ AH + Full stroke MVGQ CC RB Double clevis style: RZQD Double Style (mm) J CT Cap bolt Bore size (mm) Hole: CD H10 d9 A B CD CL CT CU CW D32 112.5 82.5 10 102.5 5 14 20 -X 40 124 92 10 114 6 14 22 50 134.5 96.5 14 124.5 7 20 28 2063 30 146 102 14 132 8 20 CU Data Bore size (mm) L B + Full stroke RR CW CX+0.2

NCQ8

Indicator light Lead wires Oilproof vinyl heavyduty cord 0.1" (2.7 mm) x 0.13" (3.2mm) ellipse, 2.3 x 10-4in2 (0.15mm2), 2 cores: D-M9B(V), 3 cores: D-M9N(V), D-M9P(V) Note 1) Refer to page 50 for solid state switch common specifications. Note 2) Refer to page 50 for lead wire lengths.

CLS

50 63 14 14 14 17 17 20 50 50 56 63 63 71 47 47 53 60 60 67 1/4 1/4 1/4 3/8 3/8 1/2 17 17 20 23 25 30 36 36 40 45 50 60 59 59 59 70 74 86 43 43 43 48 48 60 15 15 17 20 20 25 31 31 36 41 46 56 19 19 22 26 26 30 145 75 18 110 136 115 25 90 90 90 115 115 140 16 107 58 110 M14 x 1.5 65 Up to 1000 3 5 30 46 +0.084 0 +0.100 0 0.1 0.3 161 78 18 110 146 128 28 16 114 64 110 M14 x 1.5 75 Up to

KP/KPQ/KPG

20.9 50 22 Reference dimension for R threads after installation Note 1) D1 indicates the maximum diameter.

15

50 5 0 Z X Mass and center of gravity of the load 25 Center of gravity 50 Load no.

MY2

Load weight Allowable moment MY2H/m3 MY2H/M3 MY2H/M1 MY2H/M2 60 50 60 50 60 50 60 50 40 40 30 30 30 30 20 20 20 20 Load weight kg Moment Nm Moment Nm Moment Nm MY2H40 MY2H40 MY2H40 MY2H40 10 10 10 10 MY2H25 MY2H25 MY2H25 MY2H25 5 5 5 5 4 4 4 4 3 3 3 3 MY2H16 2 2 2 2 0.2 MY2H16 MY2H16 MY2H16 1 1 1 100 200 300 400500 1000 1500 1 100 200 300400 500 1000 1500 100 200 300 400500 1000 1500 100

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Flange size XMH Symbol Nil C XMH V V V V XYH V V V Type KF (NW) CF Applicable flange size 16, 25, 40, 50 16 (034), 40 (070) Size 16 25 40 50 XYH Nil KF (NW) 25, 40, 50 3.

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

12 13 107 44 20 16 47 64 148 M8 35 64 19 50 11 7 14 115 49 20 16 50 78 162 M10 38 77 19 63 16.5 16.5 13.5 6.5 16.5 Bore size (mm) J K L MM ML NN OA OB OL P PA PB PW Q R S T U VA 18 M8 x 1.25 7.5 M8 x 1.25 27 27 40 20 6.6 11 1/8 38 30 104 44 118 86 106 40 13 21.5 9 M10 x 1.5 9 32 32 46 22 8.6 14 1/4 47 40 130 60 146 110 130 50 M10 x 1.5 14 28 39 39 58 22 8.6 14 1/4 55 50 130 70 158 124 142