3 Port Solenoid Valve Metal Seal Series VZ200 1

5-L(Z)-01 300 (Lead wire length) With light/surge voltage suppressor Applicable cable O.D. 3.5 to 7 Max.10 84 With light/surge voltage suppressor M5 x 0.8 (Pilot EXH) Pg7 76 68.2 1 2 M: VZ2 5-M(Z)-01 43 19.5 PE PA 11 8.5 7 With light/surge voltage suppressor 300 2.5 3-Rc 1/8 (Lead wire length) (Pilot EXH) M5 x 0.8 M5 x 0.8 (Pilot EXH) 4-15-6 7 Series VZ200 Manifold Specifications Manifold

Series SV

(P) (P) M2: 0.15Nm M3: 0.6Nm M4: 1.4Nm Reduced P port pressure Reduced A port pressure (Controlled P port with reduced A port pressure) Reduced B port pressure (Controlled P port with reduced B port pressure) 86 Valve Manifold Specifications Series SV Manifold Option M Individual SUP spacer assembly M Individual EXH spacer assembly SUP port EXH port How to order individual SUP/EXH spacer

Modular F.R.L. Unit

Unit AC10 to 60 Dimensions Pressure gauge port size AC10, 20 P G A Q E F L C B H OUT IN T H L J OUT Pressure gauge (Option) K M Square embedded type pressure gauge (Option) N Port size Lubricator Regulator Air filter Drain Min. clearance for maintenance D AC25, 30, 40, 50, 55, 60 Pressure gauge port size A P G E F Q L H B C OUT IN T H L OUT Pressure gauge (Option) K M Square embedded type

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

How to Order Manifold Assemblies (Example) Double solenoid (24VDC) SY3260-5G-C6 (2 sets) Cylinder port size M5: M5 x 0.8 Example Single solenoid (24VDC) SY3160-5G-M5 (2 sets) Cylinder port size C6: With 6 One-touch fitting Manifold base (4 stations) SS5Y3-60-04U R D side Port R C8: With 8 One-touch fitting P Stations 1 2 n Port P C8: With 8 One-touch fitting U side SS5Y3-60-04U 1 set (type

2 Phase Stepper Motor/Without Motor Brake Series LXS

0 Transfer load m (kg) 1000 a = 1000 to 3000 L2 500 Mer m 5 10 0 Transfer load m (kg) a 1000 Mey a = 1000 to 3000 500 m L3 5 10 0 Transfer load m (kg) Refer to page 304 for deflection data. 252 2 Phase Stepper Motor/Without Motor Brake Series LXS Dimensions/LXSH2BD Scale: 25% F G x I 5H9 +0.030 0 depth 5 +0.030 0 depth 5 D-5.1 through 5H9 10 7.5 E-M5 thread depth 10 Refer to Cross section

MXS Series Air Slide Table

Applicable model P(Hexagon socket head screw) Q(Hexagon socket head screw) Mounted to body J M I F B C D E H A MXS-AS6 5 16.5 MXS 6 P M 17.8 10.5 M2.5 X 10 12.5 8.5 M2.5 X 8 6 2.5 7 6 M5 X 0.8 C A MXS-AS6-X11 15 26.5 MXS-AS8 5 16.5 MXS 8 21.5 14.6 10 M3 X 10 11 M3 X 12 7 3 8 7 MXS-AS8-X11 15 26.5 M6 X 1 MXS-AS8-X12 25 5 36.5 B MXS-AS12 20 E MXS12 18.5 13 M4 X 12 16 M4 X 15 10 4 12 31 9.5

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

depth 5 A G H B1 B b 2 x P Port size i DS: DIN terminal DZ: DIN terminal with light 70 CS: Conduit 58.3 51.9 500 R R DN: DIN terminal without connector WN: WN: M12 connector without cable 44.1 34.3 R R [mm] Size Port size P A B B1 C E G H J M 30 1/4, 3/8 21 <22> 57 28.5 89.8 10.5 40 35 10 M5 40 1/2 28 70 37.5 98.5 13.8 48 35 14.2 M5 50 3/4 33.5 71 38.5 104.6 16.7 62 33 15.2 M6 60 1 42 95

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators 2 x P (Rc, NPT, G) G H2 M5 x 0.8 (This drawing shows the cases of 20 and 25.)

High Vacuum Angle Valve, XL Series

XLGV/With solenoid valve Q Port R (exhaust port) N N With double solenoid P K M L (mm) L 6.5 6.5 6.5 11 11 11 K 9 9 9 11 11 11 N 14 Model K L M N P Q M 17 15 2 6 Q 16.5 16.5 17.5 28 29 29 P Model XLGV-16 XLGV-25 XLGV-40 XLGV-50 XLGV-63 XLGV-80 3 3 3 6.5 6.5 6.5 16 With single solenoid Port P (pressure port) 29 26 32 45 Other dimensions are the same as XLG. 19 Series XLD, XLDV Smooth Exhaust

Bernoulli Gripper

Dimensions [mm] Model A B C D E F G H J K L M N P Q R S T U V W Weight [g]*1 Outer body dia.

I

(V) 5 1.5 0.7 3 2.5 1.3 AC125 0.1 AC250 0.8 1.5 2 0.5 1 3 DC30 4 2 3 3 0.1 DC125 0.05 0.4 0.05 0.4 Insulation Resistance 100 M@ 500V (DC) *High Inrush Circuits D I M E N S I O N S P N E U M AT I C P R E S S U R E S W I T C H: S E R I E S IS3000 H O W T O O R D E R P N E U M AT I C P R E S S U R E S W I T C H: S E R I E S IS3000 IS3 0 C O N N E C T I O N L A M P 0 Rc(PT) 1/ 4 1 Flange No

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

(A) 4 (B) 2 2 M5: M5 x 0.5 5 (EA) 1 (P) 3 (EB) 3 position closed center (A) 4 (B) 2 A 4 3 2 B 5 (EA) 1 (P) 3 (EB) D: Slotted locking type Screw driver operated J: With switch 3 position exhaust center Elbow fitting assembly (upward) L4: 4 elbow fitting assembly L6: 6 elbow fitting assembly (A) 4 (B) 2 4 5 (EA) 1 (P) 3 (EB) A 4 ON 3 position pressure center OFF B 2 SMC (A) 4 (B) 2 5 Refer

Stability of suction position,

P ZP3 P Vacuum Ejector or Pump and Number of Vacuum Pads ZP3E ZP3E Ejector and number of pads Vacuum pump and number of pads Vacuum line ZP2 ZP2V Tank ZP ZPT ZPR XT661 P P P P P P P P P Ideally, one pad should be used for each line. When more than one pad is attached to a single vacuum line, take the countermeasures listed below.

SMC

Feature 4 Guide Table P.94 Air Slide Table P.98 Air Slide Table P.106 Model Size MXP MXPJ6 Model Size MXQ 13226, 8, 12, 16, 20, 25 Model Size 10-MGF 1122112240, 63, 100 6, 10, 12, 16 6 Magnetically Coupled Rodless Cylinder P.158 Air Slide Table P.132 Clean Rodless Cylinder P.153 Model Size CYP Model Size MXS 13226, 8, 12, 16, 20, 25 Model Size 12-CY1B 12-CY3B 6, 10, 50, 63 15, 32 15, 20,

CNG

Load in the direction of rod extension Load in the direction of rod retraction m 0.3 MPa Graph (5) F 0.4 MPa Graph (6) m 0.5 MPa Graph (7) F 9-5-6 7 Model Selection Series CNG Selection Graph Graph (5) Graph (2) 0.3 MPa P < 0.4 MPa 0.3 MPa P < 0.4 MPa 200 200 100 100 40 30 40 50 30 40 50 32 Load weight: m (kg) 40 25 Load weight: m (kg) CL 20 20 20 32 CL1 10 10 25 20 MLGC 5 4 3 5 4 3

Series SY100 3 Port Solenoid Valve Rubber Seal

Applicable blank plate assenbly SY100-77-1A VZ P R 20 stations 20 R port VS A port M5 X 0.8 P port M3 X 0.5 M5 X 0.8 M5 X 0.8 Note 1) SY114 (A) and SY124 (A) cannot be mounted on the same manifold.

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

D1 M M A L1 D1 D2 L2 H Connection threads Male Branch: KPQU, KPGU (M5) Effective area mm D Model L TPH TPS A H (width across flats) (M5) 2-Applicable tubing Note1) Connection threads R Applicable tubing O.D. mm Weight g M P P M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPQU04-M5 KPQU04-01 KPQU04-02 KPQU06-M5 KPQU06-01 KPQU06-02 KPQU08-01 KPQU08-02 KPQU10-02 KPQU10-03 KPQU12-03 KPQU12-04

KP/KPQ/KPG

D1 M M A L1 D1 D2 L2 H Connection threads Male Branch: KPQU, KPGU (M5) Effective area mm D Model L TPH TPS A H (width across flats) (M5) 2-Applicable tubing Note1) Connection threads R Applicable tubing O.D. mm Weight g M P P M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPQU04-M5 KPQU04-01 KPQU04-02 KPQU06-M5 KPQU06-01 KPQU06-02 KPQU08-01 KPQU08-02 KPQU10-02 KPQU10-03 KPQU12-03 KPQU12-04

CNG

l m m m L L t t t t B1 H1 (mm) (mm) (mm) Dd9 Applicable bore size (mm) L L Dd9 d l l d m t Snap ring Snap ring t m Part No.

Cylinder with Lock Series CNG

l m m m L L t t t t B1 H1 (mm) (mm) (mm) Dd9 Applicable bore size (mm) L L Dd9 d l l d m t Snap ring Snap ring t m Part No.