Clean Room Regulator/Fluoro Resin Type Series SRF30

3 No.

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Note 3) Through-hole in case of 5 to 15 mm stroke.

NCA1

52 : 1 3/4-12 85 : M24 x 1.5 25 : 5/8-11 53 : 1 3/4-5 86 : M26 x 1.5 26 : 5/8-18 54 :1 7/8-12 87 : M30 x 1.5 FEMALE ROD DIAMETER BORE (INCH) A B C MM KK WF 150 (1.5) 3/4 1 1/8 3/8 5/8 7/16-20 1 200 (2) 3/4 1 1/8 3/8 5/8 7/16-20 1 250 (2.5) 3/4 1 1/8 3/8 5/8 7/16-20 1 325 (3.25) 1 1/8 1 1/2 1/2 1 3/4-20 1 3/8 400 (4) 1 1/8 1 1/2 1/2 1 3/4-20 1 3/8 22 Air Cylinder Extended Series NCA1 PARTS

Air Cylinder NCA1 Series

52 : 1 3/4-12 85 : M24 x 1.5 25 : 5/8-11 53 : 1 3/4-5 86 : M26 x 1.5 26 : 5/8-18 54 :1 7/8-12 87 : M30 x 1.5 FEMALE ROD DIAMETER BORE (INCH) A B C MM KK WF 150 (1.5) 3/4 1 1/8 3/8 5/8 7/16-20 1 200 (2) 3/4 1 1/8 3/8 5/8 7/16-20 1 250 (2.5) 3/4 1 1/8 3/8 5/8 7/16-20 1 325 (3.25) 1 1/8 1 1/2 1/2 1 3/4-20 1 3/8 400 (4) 1 1/8 1 1/2 1/2 1 3/4-20 1 3/8 22 Air Cylinder Extended Series NCA1 PARTS

Compact 5-Port Solenoid Valve

(A)4 2(B) (A)4 2(B) 4(A) 2(B) (EA)5 1 3(EB) (EA)5 1 3(EB) (P) (P) 3-position pressure center 5(EA) 3(EB) 1(P) (A)4 2(B) N.O. valve x 2 pcs. 2(B) 4(A) (EA)5 1 3(EB) (P) 3(EB) 5(EA) 1(P) N.C. valve, N.O. valve x 1 pc. of each 2(B) 4(A) 3(EB) 5(EA) 1(P) Component Parts No.

AC

, 3/8, 1/2, 3/4 Easy maintenance.

SV

) 3 (EB) 18 or less 29 or less 32 or less 82 or less 3 position 15 or less 33 or less 4 position dual 3 port valve 4 position dual 3 port valve: N.C.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3 4 VSA440 3 4 , 1 2 3 4 1 2 standard 1 2 3 4 , Piping specifications/Side ported, bottom ported Type V Port size Rc EXH port Valve size Applicable valve Manifold base size Rc P EA, EB A, B , 1 4 3 8 1 4 3 8 1 4 3 8 3 8 1 2 3 8 1 2 1 2 1 2 VSA420 Common EXH , 3 8 1 2 , 1 4 3 8 , 3 8 1 2 , 3 8 1 2 3 8 standard

VQC

Values for double types are when the switch is ON. 1 5 3 N.C. N.C. 4-position dual 3-port valve (B) 4 2 1 5 3 N.O. N.O. 4-position dual 3-port valve (C) 4 2 1 5 3 N.C.

One-touch Fittings Series KQ2

1 S 2 0 3 1 T 2 Q K 7 1 7 . 1 2 7 1 8 2 5 . 1 3 5 . 6 3 2 2 9 4 3 2 / 1 8 / 3 S 3 0 3 1 T 2 Q K 5 . 3 3 5 . 8 3 6 . 9 3 4 2 / 1 S 4 0 3 1 T 2 Q K 2 2 5 . 7 3 0 4 9 6 32 Series KQ2 One-touch Fittings Union tee: KQ2T Inch e l b a c i l p p A .

HRX-OM-W038

2.4 Operation display panel . 2-4 Chapter 3 Transport and Setting Up . 3-1 3.1 Transport. 3-1 3.1.1 Transportation using casters . 3-2 3.2 Installation . 3-3 3.2.1 Environment . 3-4 3.2.2 Location (Required ventilation rate and facility water source) . 3-6 3.2.3 Installation and Maintenance Space . 3-7 3.3 Installation . 3-8 3.3.1 Mounting . 3-8 3.3.2 Electrical wiring . 3-9 3.3.3 Preparation

HRX-OM-R005

2.4 Operation display panel . 2-4 Chapter 3 Transport and Setting Up . 3-1 3.1 Transport. 3-1 3.1.1 Transportation using casters . 3-2 3.2 Installation . 3-3 3.2.1 Environment . 3-4 3.2.2 Location (Required ventilation rate and facility water source) . 3-6 3.2.3 Installation and Maintenance Space . 3-7 3.3 Installation . 3-8 3.3.1 Mounting . 3-8 3.3.2 Electrical wiring . 3-9 3.3.3 Preparation

HRX-OM-O021

2.4 Operation display panel . 2-4 Chapter 3 Transport and Setting Up . 3-1 3.1 Transport. 3-1 3.1.1 Transportation using casters . 3-2 3.2 Installation . 3-3 3.2.1 Environment . 3-4 3.2.2 Location (Required ventilation rate and facility water source) . 3-6 3.2.3 Installation and Maintenance Space . 3-7 3.3 Installation . 3-8 3.3.1 Mounting . 3-8 3.3.2 Electrical wiring . 3-9 3.3.3 Preparation

HRX-OM-R016

2.4 Operation display panel . 2-4 Chapter 3 Transport and Setting Up . 3-1 3.1 Transport. 3-1 3.1.1 Transportation using casters . 3-2 3.2 Installation . 3-3 3.2.1 Environment . 3-4 3.2.2 Location (Required ventilation rate and facility water source) . 3-6 3.2.3 Installation and Maintenance Space . 3-7 3.3 Installation . 3-8 3.3.1 Mounting . 3-8 3.3.2 Electrical wiring . 3-9 3.3.3 Preparation

5 Port Solenoid Valve, Series VQC

Values for double types are when the switch is ON. 1 5 3 N.C. N.C. 4-position dual 3-port valve (B) 4 2 1 5 3 N.O. N.O. 4-position dual 3-port valve (C) 4 2 1 5 3 N.C.

Plug-in Unit

Values for double types are when the switch is ON. 4 position dual 3 port valve (A) (A) 4 (B) 2 3 (R2) 5 (R1) 1 (P) N.C. N.C. 4 position dual 3 port valve (B) (A) 4 (B) 2 3 (R2) 5 (R1) 1 (P) N.O. N.O. 4 position dual 3 port valve (C) (A) 4 (B) 2 3 (R2) 5 (R1) 1 (P) N.C.

Intrinsically Safe Valve

8 With sub-plate 1 1/2 With sub-plate 04 53-SY9000 1 (P) (EA) 5 3 (EB) 2-position double Manual override 2 (B) (A) 4 2 E: Push-turn locking lever type D: Push-turn locking slotted type Nil: Non-locking push type (EA) 5 1 (P) 3 (EB) 3-position closed center 2 (B) (A) 4 3 Note 1) (EA) 5 1 (P) 3 (EB) 3-position exhaust center 2 (B) (A) 4 4 Note 1) (EA) 5 1 (P) 3 (EB) Lead wire length 3-position

AC Servo Motor Driver (CC-Link Type)

RX(n 3)C RY(n 3)9 to Reserved RY(n 3)A Reset RES RX(n 3)F Note.

AC Servo Motor Driver (CC-Link Type)

RX(n 3)C RY(n 3)9 to Reserved RY(n 3)A Reset RES RX(n 3)F Note.

Booster Regulator/Air Tank

VBA VBAT VBA VBAT VBAT5A-Y-3 VBAT10A-Y-3 VBAT20A-Y-3 VBAT5S-Y-4 VBAT10S-Y-4 VBAT20S-Y-4 Quantity No.