2/3 Port Valve

80.5 74.5 79.5 82.5 125.5 142.5 24.3 63 124 2.3 52 42 25 26 28 34 4.5 14 55 60.5 73 1 84 100 92 108 135.5 137 153 154 170 83.5 89.5 88.5 94.5 91.5 97.5 28.3 33.3 80 90 2.3 2.3 62 72 50 60 30 35 31 36 35 40 43 49 5.5 6.5 17.5 20 151.5 32A, 40A, 50A Port size Main Port Rc(PT) Pilot port A B C D E F G H I J K L M Model Rc(PT) 1 8 1 4 1 4 VNA5-32A VNA6-40A VNA7-50A 1 4 1 105 120 140 77 96 113 53

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

ZH15S Max. vacuum pressure: 88 kPa Exhaust Characteristics Flow Characteristics ZH15L Max. vacuum pressure: 53 kPa Exhaust Characteristics Flow Characteristics Vacuum pressure Vacuum pressure Suction flow rate (/min (ANR)) Air consumption (/min (ANR)) Suction flow rate (/min (ANR)) Air consumption (/min (ANR)) Air consumption Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure (kPa

ZMA

53 53 53 60 40 60 40 40 40 40 27 27 27 40 27 Suction flow rate Suction flow rate Suction flow rate Suction flow rate 20 13 13 13 13 20 0 60 40 20 0.6 0.3 0.5 0.4 0.2 0 0.1 0 60 40 20 0 0.6 0.5 0.4 0.3 0.2 0.1 Supply pressure (MPa) Flow rate (l/min (ANR)) Supply pressure (MPa) Flow rate (l/min (ANR)) 13-4-26 7 Series ZM Vacuum Ejector: With Solid State Timer Exhaust Characteristics/Flow Characteristics

MGP

MGG 42 29 11 7.5 8 8.5 9 M4 X 0.7 10 12 13 15 M4 X 0.7 4.3 4.3 5.6 5.6 M5 X 0.8 6 8 10 12 58 64 83 93 8 8 9.5 9.5 13 M4 M4 M5 M5 4.5 4.5 5.5 5.5 8 8 8 10 10 13 15 18 21 18 13 15 18 21 5 5 6 6 18 22 24 30 12 16 20 25 26 30 36 42 10, 20, 30, 40, 50, 75, 100 125, 150, 175, 200, 250 20, 30, 40, 50, 75, 100 125, 150, 175, 200 250, 300, 350, 400 46 33 11 M5 X 0.8 M5 X 0.8 M5 X 0.8 15 10 19 MGC 53

Vacuum

Model A c o E F G H J K L M N 2F810105 26 53 54 22.5 12.5 24 17 -5 1 5 50 15.514.4 12.8 8,5 zFB101-07 242 17.7 114" zFB201-07 52 28 24.51 13.s1 27.21 19.71 t6 G1 17.5116.6115.21 1t4" 9.5 zFB301-11 30 70 27 14.5go.221.7 17 21.5 s 18.53A 11 zFuol-13 64.5 34 8?.

Stopper Cylinder

5 41 4 40 5.5 9 depth 7 1/8 1/8 1/8 24.5 24 44 28 9 15 50 107 54 25 64 8 10 53 7 50 4 50 6.6 11 depth 8 1/8 1/8 1/8 24.5 24 56 28 9 19 B + stroke R R * Refer to pages 572 and 573 for the auto switch proper mounting position and mounting height. * For the single acting type, a One-touch fitting is on the rod end only. * The position of the width across flats (K) is arbitrary and is not

MXQ

(N) Bore size (mm) Rod size (mm) Piston area (mm2) Operating direction Operating pressure (MPa) 0.2 0.3 0.4 0.5 0.6 0.7 11 17 23 29 34 40 OUT 57 6 3 8 13 17 21 25 29 42 OUT IN 20 30 40 51 61 71 101 8 4 15 23 30 38 45 53 75 OUT IN 45 68 90 113 136 158 226 12 6 34 51 68 85 102 119 IN 170 80 121 161 201 241 281 OUT 402 16 8 60 91 121 151 181 211 IN 302 OUT 628 126 188 251 314 377 440 20 10 IN

Vacuum

Model A c o E F G H J K L M N 2F810105 26 53 54 22.5 12.5 24 17 -5 1 5 50 15.514.4 12.8 8,5 zFB101-07 242 17.7 114" zFB201-07 52 28 24.51 13.s1 27.21 19.71 t6 G1 17.5116.6115.21 1t4" 9.5 zFB301-11 30 70 27 14.5go.221.7 17 21.5 s 18.53A 11 zFuol-13 64.5 34 8?.

“

2 x 1/4 to 1/2 Port size 2 x 1/2 Port size 66 With digital pressure switch: IR32l1 2-0llEl-A 76 48 72.5 53 16 M12 x 1 Mounting hole 2.3 M28 x 1.5 30 141 91.7 76.1 65.3 22 48.1 2 x 1/8 Pressure gauge port EXH OUT IN 66 2 x 1/2 Port size 2 x 1/4 to 1/2 Port size 786 IR1200-A/2200-A/3200-A Series Specific Product Precautions 1 Be sure to read this before handling the products.

LEC-OM02904

3-20 3.6 3-23 3.7 3-24 3.7.1 3-24 3.7.2 3-25 3.7.3 3-27 3.8 3-28 3.9 SSCNET 3-29 3.10 3-31 3.10.1 3-31 3.10.2 3-32 3.11 3-33 3.11.1 3-33 3.11.2 3-34 3.11.3 (LE--) 3-37 3.12 3-38 3.13 3-39 1 - 4 41 4-12 4.1 42 4.1.1 42 4.1.2 43 4.1.3 44 4.2 45 4.3 46 4.4 48 4.5 48 TM 49 4.5.1 MR Configurator2 4.5.2 4-11 5 515-35 5.1 (No.PA) 52 5.1.1 53

AC Servo Motor Driver (SSCNET Type)

Parameter setting (PLC side) . 53 7.1 SSCNET Setting .53 7.2 Movement amount per pulse .54 7.3 Stroke limit .55 7.4 Operating conditions .56 8. Home position return (PLC) . 57 8.1 Returning to home position .57 9. Positioning operation (PLC) . 58 9.1 Setting of Operation data .58 9.2 Movement MOD .62 10.

AC Servo Motor Driver (SSCNET /H Type)

Save the displayed waveform screen (print screen). -53- 6.10 Display All Monitor List The method how to obtain the electric actuator condition is described with the display all function of the setup software. Click Monitor Display All of the setup software to display Display All window. The condition of each item is displayed.

OMU0023

S 115 73 s 20 14 DC4 52 34 4 84 54 T 116 74 t 21 15 NAK 53 35 5 85 55 U 117 75 u 22 16 SYN 54 36 6 86 56 V 118 76 v 23 17 ETB 55 37 7 87 57 W 119 77 w 24 18 CAN 56 38 8 88 58 X 120 78 x 25 19 EM 57 39 9 89 59 Y 121 79 y 26 1A SUB 58 3A : 90 5A Z 122 7A z 27 1B ESC 59 3B ; 91 5B [ 123 7B { 28 1C FS 60 3C < 92 5C \ 124 7C | 29 1D GS 61 3D = 93 5D ] 125 7D } 30 1E RS 62 3E > 94 5E ^ 126 7E

Antibacterial Filter (5μm) Antibacterial Filter (0.1μm) Odor Removal Filter Bacteria Removal Filter

Dimensions HF2-BFA, HF2-BFB, HF2-BFD HF2-BFC Model P A B C D E G J HF2-BFA30 1/4, 3/8 53 151.1 21.5 26.5 30 35 26.5 HF2-BFB30 1/4, 3/8 53 151.1 21.5 26.5 30 35 26.5 HF2-BFC30 1/4, 3/8 53 126.4 21.5 26.5 30 35 26.5 HF2-BFD30 1/4, 3/8 53 151.1 21.5 26.5 30 35 26.5 HF2-BFA40 1/4, 3/8, 1/2 70 180.9 25.5 35.5 38.4 40 35.5 HF2-BFB40 1/4, 3/8, 1/2 70 180.9 25.5 35.5 38.4 40 35.5 HF2-BFC40 1/4, 3

Mist Separator Regulator

: Max5 (Pressure gauge port size) (Port size) maintenance Clearance for Dimensions Model Optional specifications Round ty pe pressure gauge (Semi-standard: Z) Round ty pe pressure gauge (With color zone) Standard specifications Round type pressure gauge P1 P2 A B C D E F G J K J J J AWM20-D 1/8, 1/4 1/8 40 100.6 71.8 21 M281 45 21 5 37.5 57.5 37.5 58.5 37.5 58.5 AWM30-D 1/4, 3/8 1/8 53

Ｍ icro Mist Separator Regulator

: Max5 (Pressure gauge port size) (Port size) maintenance Clearance for Dimensions Model Optional specifications Round ty pe pressure gauge (Semi-standard: Z) Round ty pe pressure gauge (With color zone) Standard specifications Round type pressure gauge P1 P2 A B C D E F G J K J J J AWD20-D 1/8, 1/4 1/8 40 100.6 71.8 21 M281 45 21 5 37.5 57.5 37.5 58.5 37.5 58.5 AWD30-D 1/4, 3/8 1/8 53

Single Axis Electric Actuator Series LJ1H

m (kg) Refer to page 145 for deflection data. 32 Standard Motor/Vertical Mount Specification Series LJ1H20 Dimensions/LJ1H202PF Scale: 10% 12.5 9.5 Work piece mounting reference plane 110 67 20 4-M6 x 1 thread depth 15 4-M8 x 1.25 thread depth 20 8H8 depth 10 Cable entry side Body mounting reference plane Z section detail 8H8 depth 8 130 200 52 52.5 Stroke + 150 (table movement range) 53

Square Tube Type Air Cylinder Series MB1

53 73 73 MB-B03 MB-B05 MB-B08 Rotation Bore size (mm) A Method for longitudinal mounting of clevis bracket When there is no air cushion, the unit is equipped with rubber bumpers.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn 95 110 Fd 34 70 114 Fc 17 26 41 52 70 83 G 40 39 63 68 69 96 H P.C.D L1 6-4.4 6-6.6 8-8.4 L2 XMA-16 XMA-25 XMA-40 XMA-50 XMA-63 XMA-80 40 50 65 70 88 90 P.C.D 27 P.C.D 58.7 P.C.D 92.1 XYA/In-line type C D G Fd C (K flange) B H 45 A E Fn (KF flange) (mm) Model A 79.5 106 119 149 178 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53

Environment

15.4 123 173 145 195 51 101 to 400 LAT 32 20 to 100 10 37 38 15.4 8.2 28 60 118 1 15.9 123 173 150 200 61 101 to 500 LZ [mm] Body Bottom Tapped Size Stroke range [mm] MA MB MC MD MH ML MO MR XA XB LC3F2 15 to 39 24 32 50 M5 x 0.8 6.5 4 5 40 to 100 42 41 101 to 124 75 125 to 200 59 49.5 201 to 400 76 58 25 20 46 29 20 to 39 22 36 50 M6 x 1 8.5 5 6 40 to 100 36 43 101 to 124 80 125 to 200 53