IR1000/2000/3000 When a system hazard can be expected due to a drop in vacuum pressure caused by power loss or vacuum pump trouble, install a safety circuit and configure the system so that it can avoid the danger. 2. When a system hazard can be expected with a malfunction of the vacuum regulator, install a safety circuit and configure the system so that it can avoid the danger. 1.
(1) 1 2 16 4 6 4 (2) SW1 Ab AC Ad Ab A b A b . A C A d A E A F A H A A (1) b # # Ready-off Ready-off (1) d # # ON ON (1) C # # OFF OFF (2) * * No.No.81 8 8 8 CPU CPU (3) 0 0. b JOGDO (1) # #. b (3) # #. d # #. C 1. ##0016 ## 00 01 1 02 2 03 3 04 4 05 5 06 6 07 7 08 8 09 9 10 10 11 11 12 12 13 13 14 14 15 15 16 16 2. **No. 3.
suppressor) + + + + 67 [74] 51.6 V100 35 SY SYJ VK VZ 27 8 A A VT 24 (Pitch) P=19 1/8 (A port) VP 21 VG VP S070 VQ VKF VQZ VZ VS VFN 4-4-49 Series SYJ700 Type 21R Manifold: Top Ported (External Pilot Type)/SS3YJ7-21RStations (-00) [ ] for AC Grommet (G) M5 x 0.8 (X port) 63.5 L2 L1 30.5 21.5 6 1.5 14 22.5 9.5 6 21.5 49 (DIN 50.3) 26 X P A A A A 43 71.2 [73.4] 2-5.5 (For mounting) R 1/4
Nil Rc G F N NPT NPTF T Dimensions Caution Applicable fittings size d 4 Model A L D Mounting screw tightening torques M2: 0.17 Nm M3: 0.8 Nm M4: 1.4 Nm KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" Warning KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 When mounting a valve or spacer on the manifold base or sub-plate
Caution Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Warning Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Danger Danger indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury. Warning 1.
ZK2 CH A 2 04 L A KQ2P 06 Applicable stations 02 For 2 stations manifold 04 For 4 stations manifold 06 For 6 stations manifold 08 For 8 stations manifold 10 For 10 stations manifold d Models and Dimensions D Symbol Applicable size d A L D Weight [g] Note 06 6 18 35 8 1 White 08 8 20.5 39 10 2 White 07 1/4" 18 35 8.5 1 Orange 09 5/16" 20.5 39 10 2 Orange Connector type 1 D sub-connector (25
SX5000-38-16 A SX7000-39-16 A SX7000-38-16 A Dimensions Applicable fittings size d 4 Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" Thread type Nil Rc G F KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 N NPT NPTF T Bolt and gasket part no.
86.3 78.3 2(A) 2(A) 63 19 Rc 1/2 n: Station n L L1 L2 Formula L1 = 41 x n + 33 L2 = 41 x n + 17 9 402 386 10 443 427 2 115 99 3 156 140 4 197 181 5 238 222 6 279 263 7 320 304 8 361 345 5-5-24
screw, use a watchmakers screwdriver with a handle of approximately 5 to 6 mm in diameter.
4 Rubber y POM Piston A !5 Stainless steel u POM Plunger !6 Stainless steel i POM Valve seat (A) !
Model A L D KQ2P-04 KQ2P-06 KQ2P-08 4 6 32 16 6 8 35 18 8 10 39 20.5 A A A A A B B 5 Series SZ3000 DIN rail dimension table/weight table D-sub connector (25 pins)/cable assembly VZ1000-11-11 VVZS3000-21A~ 3 Refer to the L dimension table Enter a number from the DIN rail dimension table below in the .
It is also possible to manufacture a bidirectional lock-up cylinder. For details, refer to Made to Order on page 9-6-113. Due to the nature of its construction, a lock-up cylinder has a play of approximately 0.5 mm to 1 mm in the axial direction.
Do not use in locations where static electric charges will be a problem. Consult with SMC regarding use in this kind of environment. 5. Do not use in locations where spatter occurs. There is a danger of spatter causing a fire. Consult with SMC regarding use in this kind of environment. 6.
It is also possible to manufacture a bidirectional lock-up cylinder. For details, refer to Made to Order on page 9-6-113. Due to the nature of its construction, a lock-up cylinder has a play of approximately 0.5 mm to 1 mm in the axial direction.
(Example) CUJ-M3 x 27L A A C B B D Axial mounting Side mounting For axial mounting Without Auto Switch For side mounting Model Mounting bolt CUJB4-4 -6 -8 -10 CUJB6-4 -6 -8 -10 -15 CUJB8-4 -6 -8 -10 -15 -20 CUJB10-4 -6 -8 -10 -15 -20 A B 21 23 25 27 22 24 26 28 33 22 24 26 28 33 38 22 24 26 28 33 38 C D Model Mounting bolt CUJB4-4 -6 -8 -10 CUJB6-4 -6 -8 -10 -15 CUJB8-4 -6 -8 -10 -15 -20
M1 Weight (g) 4 6 6 8 6 8 10 8 10 8 10 10 12 Applicable tubing O.D. d T H D1 D2 L1 L2 L3 Model AS121-M5-F04 AS121-M5-F06 AS221-01-F06S AS221-01-F08S AS221-02-F06S AS221-02-F08S AS221-02-F10S AS321-02-F08S AS321-02-F10S AS321-03-F08S AS321-03-F10S AS421-04-F10S AS421-04-F12S 16 17 17 18.5 17 18.5 21 18.5 21 18.5 21 21 22 13 13 34 31 54 50 52 86 81 93 88 154 146 21 21.5 25.5 26 M5 x 0.8 28.3
1 Thread size M5 01 02 03 04 M5 x 0.8 R R R R 1 8 1 4 3 8 1 2 M5 port only Note 1) AS221: Electroless nickel plated Note 2) AS221: Steel Note 3) Meter-in type: Black zinc chromated 15-9-8 2 Speed Controller with One-touch Fitting Elbow Type (Metal Body) Series AS Flow Rate and Effective Area AS321-03 AS421-04 AS221-01 AS221-02 AS121-M5 Model Tubing O.D. 12 10 10 8 6 8 4, 6 6, 8 Controlled
screw, use a watchmakers screwdriver with a handle of approximately 5 to 6 mm in diameter.
Dimensions/VXD2 Body Material: Aluminum, C37, Stainless Steel Grommet 3 A VXD2 Port size 04 (1/2) (With bracket) 300 U E C 7.5 1.6 7.5 1.6 5.5 T A b a B 5.5 OUT IN OUT IN M b a OUT IN 18 2 x P Port size d e (D) L K f J F I f 2 x P Port size d e Grommet (with surge voltage suppressor) C 300 U E A B T OUT IN M I J F 2 x P Port size L K (D) DIN terminal U V E Cable 6 to 12 30 G1/2 (44) 31.5
L O L G H F K J E D I A B C 2-4.5 A B C D E F G H I J K L Model 4 ZFC100-04 6 ZFC100-06 53.2 9.1 30 14.1 10 18 11.6 19.5 23 20 29 5/32" ZFC101-03 1/4" ZFC101-07 6 ZFC200-06 8 ZFC200-08 67 15.5 34 17.5 14 22 15.6 23.1 27 24 35 1/4" ZFC201-07 5/16" ZFC201-09 Element Replacement Element replacement procedure 1) Stop operation and reduce the filter's internal pressure to atmosphere. 2) Turn cover