SMC Corporation of America
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DIN rail ISA-5Part number L Number of stations ISA-5-1 73.0 1 ISA-5-2 135.5 2 ISA-5-3 173.0 3 ISA-5-4 210.5 4 ISA-5-5 248.0 5 ISA-5-6 285.5 6 Seal for extra station ISA-15 Threaded plug with seal ISA-12Piping type Part number Rc1/8 ISA-12-A : This is applicable in both G1/8 ISA-12-C piping specification C and F. -11No.PS-OMT0002-E 2 About this product Centralized lead wire ISA-21Bracket

Metric size Inch size Elbow type Universal type Port size 3.2 1/8" 5/32" 3/16" 5/16" 1/4" 3/8" 10 8 6 4 AS121FM-M5 AS131FM-M5 M5 x 0.8 AS221FM-01 AS231FM-01 R 1/8 AS221FM-02 AS231FM-02 R 1/4 AS121FM-U10/32 AS131FM-U10/32 10-32 UNF AS221FM-N01 AS231FM-N01 NPT 1/8 AS221FM-N02 AS231FM-N02 NPT 1/4 Specifications Speed control is easy, and uniform speed control is possible.

S070A-80A-1 S070B-80A-1 S070M-80A-1 Valve model S070B S070C Mounting screw No. AXT632-106A-1 AXT632-106A-2 Note) Each of the above part numbers is for two screws, which are to be ordered by 10 units. Order is accepted in 10 units.

bracket F Nil Without bracket SYJA 2 5 1 M5 Body ported Thread type Nil Rc G NPT NPTF SYJA 4 5 1 F N T Base mounted Port size Series Type of actuation Symbol Without sub-plate Nil Bore size Applicable series SYJA700 SYJA500 7 5 Normally open Normally closed 2 1 1/8 with sub-plate 01 SYJA500 SYJA700 1/4 with sub-plate SYJA700 02 How to Order Manifold Base Same manifolds as series SYJ500/700

When the fluid volume is 1 L/min or less, ERR16 is displayed and the thermo-con stops. The flow switch is built into the thermo-con.

Applicable model H G A B C J K E D F 16.5 MXS-AT6 5 MXS 6 7 10.5 2.5 21 19 8 5 M2.5 X 8 M5 X 0.8 MXS6, MXS8 26.5 MXS-AT6-X11 15 D 16.5 MXS-AT8 5 E E H MXS 8 M3 X 10 M6 X 1 8 12.5 3 25 9 6 22.5 26.5 MXS-AT8-X11 15 36.5 MXS-AT8-X12 25 5 G 20 MXS-AT12 MXS12 12 18.5 4 32 13 8 31 M4 X 8 M8 X 1 30 MXS-AT12-X11 15 B C 40 MXS-AT12-X12 25 24.5 MXS-AT16 5 F K K F A J MXS16 M5 X 10 M10 X 1 14 23 5 40

Note 2) Mounting thread for pressure gauge: 1/16 for AC10; 1/8 for AC20 to 30; 1/4 for AC40 to 60 Pressure gauge is not mounted and is supplied loose at the time of shipment.

VXD Symbol 2 VXZ VXS VXS 1 VXB When the valve is closed, flow is blocked from port 1 to port 2. However, if the pressure in port 2 is higher than port 1, the valve will not be able to block the fluid and it will flow from port 2 to port 1. VXE VXP Normally Closed (N.C.)

DC (+) 1 Flow direction OUT 2 2 DC () 3 OUT 1 4 6 Digital Flow Switch for Air Series PFA Dimensions (mm)/ Separate Type For Air 1in=25.4mm Scale: 70% PFA30m-A Display unit Panel mount 3 x 7.2 ( = 21.6) 41.8 40.3 8-M3 40 6.4 4.3 1 2 3 4 SMC FLOW SWITCH 35.8 19.4 40 UNIT RESET SET 5 6 7 8 Panel cutout dimensions 36 + 0.5 0 + 0.5 0 36 The applicable panel thickness is 1 to 3.2mm PFA30m-B Display

Inch size 1/8" 1/4" 5/32" 1/8" 5/32" 1/4" 5/16" 1/8" 5/32" 1/4" 5/16" 3/8" 1/4" 5/16" 3/8" 3/8" 1/2" Free flow 0.2 0.3 0.4 0.6 0.6 0.7 1.0 1.3 1.5 1.6 1.7 2.5 4.4 4.8 C values: Sonic conductance dm3/(sbar) Controlled flow 0.2 0.3 0.4 0.7 0.8 0.6 0.9 1.3 2.1 2.4 3.3 4.4 4.9 Free flow 0.3 0.4 0.2 0.3 0.3 0.4 0.4 0.3 0.3 b values: Critical pressure ratio Controlled flow 0.2 0.2 0.3 0.3 0.3

Flow Rate and Effective Area AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 3.2 6 8 10 12 3.2 6 4 6 8 10 4 4 8 10 12 Metric size 6 10 Tube O.D. 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 1/4" 3/16" 1/8" 5/32" 5/16" 1/4" 5/32" Inch size 3/8" 5/16" 3/16" 1/4" Flow rate flow Controlled (Free) l/min (ANR) 100 180 230 260 390 460 660 790 920 1580

1 20 400 10 70 0.01 2 40 6000 100 40 0.1 3 90 1000 20 1 4 10 +3 5 5 10 +7 6 0 < Cp 5 +10 7 5 < Cp 10 Cw 0.5 8 0.5 < Cw 5 9 5 < Cw 10 x Cp > 10 Cw > 10 > 5 [How to Perform a Test to Check the Performance] ISO 12500, which sets out the test method to be used in order to check the filter performance for each of the three kinds of contaminants, is indicated

41 50 59.5 79 96 1.5 1.5 2 2 4.5 5 6 7.5 9.5 11.5 14 16 4 4 6 6 7 8 11 14 19 24 30 36 3.2 4 5 5 7 8 11 13.5 16 20 22 24 5.5 7 10 10 13 17 22 27 32 41 46 55 5 5.5 7 7 8 9 13 15 18 24 38 42 0.5 0.5 0.5 0.5 0.5 0.5 0.75 1 1.25 2 2.5 3 19 54 123 123 1100 2500 4400 11000 18000 28000 54000 71000 0.01 0.01 0.02 0.02 0.05 0.07 0.16 0.31 0.58 1.08 2.7 4.7 Semi-standard Pneumatic: Up to 1 MPa Hydraulic

20 1 3 3 3 A mA mA mA Command signal Command signal Command signal VY11300 1 VY1400 1 VY1500 1 1 1 1 0.8 0.8 0.8 A port pressure (MPa) A port pressure (MPa) A port pressure (MPa) 0.6 0.6 0.6 0.4 0.4 0.4 0.2 0.2 0.2 VY130-5 VY140-5 VY150-5 0 1 2 3 4 5 0 1 2 3 4 5 0 1 2 3 4 5 V V V VY130-6 VY140-6 VY150-6 1 1 1 0 2.5 5 7.5 10 0 2.5 5 7.5 10 0 2.5 5 7.5 10 V V V VY130-7 VY140-7 VY150-7 2 2

m/Height 1 m)5 dB (A) 73 75 Alarm code list stickers 2 pcs.

Setting window (page 38) for details of parameters. -83No.EX-OMV0017-B (5) The parameter setting of the wireless slave(1) is complete.

Setting window (page 38) for details of parameters. -83No.EX-OMV0017-A (5) The parameter setting of the wireless slave(1) is complete.

BBA2: For D-A7/A8/F7/J7 Stroke range (mm) Bore size (mm) Stroke range 1 to 50 20, 25 32, 40, 50, 63, 80, 100 1 to 100 Part number: CLQB40-47D-B A 3 mm spacer is installed in standard cylinder CLQB40-50D-B. The B dimension is 79.5mm. The above stainless steel screw kit is used for water resistant auto switch type D-F7BAL when it is shipped mounted on a cylinder.

ABOUT REINSTALLATION . 3-7 Chapter 4 Operation/ Shutdown . 4-1 4.1 CHECK POINTS BEFORE OPERATION . 4-1 4.2 OPERATION . 4-1 4.3 STOP . 4-2 4.4 CAUTIONS FOR RE-START . 4-2 4.5 CHECK POINTS BEFORE RESTART . 4-2 4.6 CAUTIONS WHEN THE PRODUCT IS SHUT DOWN FOR AN EXTENDED PERIOD OF TIME . 4-2 Chapter 5 Checks and Maintenance . 5-1 5.1 DAILY INSPECTION . 5-1 5.2 REGULAR MAINTENANCE . 5-2 5.2.1