Body Size: 30, Type: A (Electro-Pneumatic Regulator Type), Pipe Thread: H (without Attachments), Port Size: 00 (without Attachments), Normally Open, Closed: D (N.O., Normally Open, Protocol: EC [EtherCAT®, (When Wireless Adapter is Connected, Wireless Base)], Unit: K (EXA1/ITV: Units Selection Function), Manual Override: G (Non-locking Push Type), Made to Order Option: X101 (Regulator and

Body Size: 30, Type: A (Electro-Pneumatic Regulator Type), Pipe Thread: H (without Attachments), Port Size: 00 (without Attachments), Normally Open, Closed: D (N.O., Normally Open, Protocol: EC [EtherCAT®, (When Wireless Adapter is Connected, Wireless Base)], Unit: M (EXA1/ITV: SI Unit Only), Manual Override: G (Non-locking Push Type), Made to Order Option: X101 (Regulator and Hub only)

Body Size: 30, Type: A (Electro-Pneumatic Regulator Type), Pipe Thread: H (without Attachments), Port Size: 00 (without Attachments), Normally Open, Closed: D (N.O., Normally Open, Protocol: PN [PROFINET, OPC UA (When Wireless Adapter is Connected: Wireless Base)], Unit: K (EXA1/ITV: Units Selection Function), Manual Override: G (Non-locking Push Type), Made to Order Option: X101 (Regulator

Body Size: 30, Type: A (Electro-Pneumatic Regulator Type), Pipe Thread: H (without Attachments), Port Size: 00 (without Attachments), Normally Open, Closed: D (N.O., Normally Open, Protocol: PN [PROFINET, OPC UA (When Wireless Adapter is Connected: Wireless Base)], Unit: M (EXA1/ITV: SI Unit Only), Manual Override: G (Non-locking Push Type), Made to Order Option: X101 (Regulator and Hub only

Body Size: 30, Type: A (Electro-Pneumatic Regulator Type), Pipe Thread: H (without Attachments), Port Size: 00 (without Attachments), Normally Open, Closed: D (N.O., Normally Open, Protocol: SA [Standalone (When Wireless Adapter is Connected: Wireless Remote)], Unit: K (EXA1/ITV: Units Selection Function), Manual Override: G (Non-locking Push Type), Made to Order Option: X101 (Regulator and

Body Size: 30, Type: A (Electro-Pneumatic Regulator Type), Pipe Thread: H (without Attachments), Port Size: 00 (without Attachments), Normally Open, Closed: D (N.O., Normally Open, Protocol: SA [Standalone (When Wireless Adapter is Connected: Wireless Remote)], Unit: M (EXA1/ITV: SI Unit Only), Manual Override: G (Non-locking Push Type), Made to Order Option: X101 (Regulator and Hub only)

Body Size: 40, Type: A (Electro-Pneumatic Regulator Type), Pipe Thread: H (without Attachments), Port Size: 00 (without Attachments), Normally Open, Closed: C (N.C., Normally Closed), Protocol: EC [EtherCAT®, (When Wireless Adapter is Connected, Wireless Base)], Unit: K (EXA1/ITV: Units Selection Function), Manual Override: G (Non-locking Push Type), Made to Order Option: X101 (Regulator

Body Size: 40, Type: A (Electro-Pneumatic Regulator Type), Pipe Thread: H (without Attachments), Port Size: 00 (without Attachments), Normally Open, Closed: C (N.C., Normally Closed), Protocol: EC [EtherCAT®, (When Wireless Adapter is Connected, Wireless Base)], Unit: M (EXA1/ITV: SI Unit Only), Manual Override: G (Non-locking Push Type), Made to Order Option: X101 (Regulator and Hub only

Body Size: 40, Type: A (Electro-Pneumatic Regulator Type), Pipe Thread: H (without Attachments), Port Size: 00 (without Attachments), Normally Open, Closed: C (N.C., Normally Closed), Protocol: PN [PROFINET, OPC UA (When Wireless Adapter is Connected: Wireless Base)], Unit: K (EXA1/ITV: Units Selection Function), Manual Override: G (Non-locking Push Type), Made to Order Option: X101 (Regulator

Body Size: 40, Type: A (Electro-Pneumatic Regulator Type), Pipe Thread: H (without Attachments), Port Size: 00 (without Attachments), Normally Open, Closed: C (N.C., Normally Closed), Protocol: PN [PROFINET, OPC UA (When Wireless Adapter is Connected: Wireless Base)], Unit: M (EXA1/ITV: SI Unit Only), Manual Override: G (Non-locking Push Type), Made to Order Option: X101 (Regulator and Hub

Body Size: 40, Type: A (Electro-Pneumatic Regulator Type), Pipe Thread: H (without Attachments), Port Size: 00 (without Attachments), Normally Open, Closed: C (N.C., Normally Closed), Protocol: SA [Standalone (When Wireless Adapter is Connected: Wireless Remote)], Unit: K (EXA1/ITV: Units Selection Function), Manual Override: G (Non-locking Push Type), Made to Order Option: X101 (Regulator

Body Size: 40, Type: A (Electro-Pneumatic Regulator Type), Pipe Thread: H (without Attachments), Port Size: 00 (without Attachments), Normally Open, Closed: C (N.C., Normally Closed), Protocol: SA [Standalone (When Wireless Adapter is Connected: Wireless Remote)], Unit: M (EXA1/ITV: SI Unit Only), Manual Override: G (Non-locking Push Type), Made to Order Option: X101 (Regulator and Hub only

Body Size: 40, Type: A (Electro-Pneumatic Regulator Type), Pipe Thread: H (without Attachments), Port Size: 00 (without Attachments), Normally Open, Closed: D (N.O., Normally Open, Protocol: EC [EtherCAT®, (When Wireless Adapter is Connected, Wireless Base)], Unit: M (EXA1/ITV: SI Unit Only), Manual Override: G (Non-locking Push Type), Made to Order Option: X101 (Regulator and Hub only)

Body Size: 40, Type: A (Electro-Pneumatic Regulator Type), Pipe Thread: H (without Attachments), Port Size: 00 (without Attachments), Normally Open, Closed: D (N.O., Normally Open, Protocol: PN [PROFINET, OPC UA (When Wireless Adapter is Connected: Wireless Base)], Unit: M (EXA1/ITV: SI Unit Only), Manual Override: G (Non-locking Push Type), Made to Order Option: X101 (Regulator and Hub only

Body Size: 40, Type: A (Electro-Pneumatic Regulator Type), Pipe Thread: H (without Attachments), Port Size: 00 (without Attachments), Normally Open, Closed: D (N.O., Normally Open, Protocol: SA [Standalone (When Wireless Adapter is Connected: Wireless Remote)], Unit: M (EXA1/ITV: SI Unit Only), Manual Override: G (Non-locking Push Type), Made to Order Option: X101 (Regulator and Hub only)

Table of Contents

OUT Standard specification Option Note) Water (Standard, up to 40C) Air (Standard, Dry) Turbine oil Vacuum (up to 1.3 x102 Pa) Carbon dioxide (CO2), Nitrogen gas (N2) Vacuum (up to 1.3 x101 Pa) (V, M) Non-leak (106 Pa m3/s or less) (V, M) IN N.O.

VXA21/22

OUT Standard specification Option Note) Water (Standard, up to 40C) Air (Standard, Dry) Turbine oil Vacuum (up to 1.3 x102 Pa) Carbon dioxide (CO2), Nitrogen gas (N2) Vacuum (up to 1.3 x101 Pa) (V, M) Non-leak (106 Pa m3/s or less) (V, M) IN N.O.

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

0.2 0.6 0.2 0.6 0.2 0.6 0.2 0.6 0.2 0.6 0.2 0.6 0.5 1.5 51 11 10 6.6 38 10 21 7 18 26 31 32 8 10 11 12 6.6 41 54 10 24 9 22 28 35 36 10 11 15 12 9 50 65 12 33 11 30 32 45 45 12 12 67 15 16 9 52 14 37 11 35 40 50 50 12 15 86 18 16 11 66 18 47 12.5 40 50 60 63 14 15 18 20 11 76 96 20 55 13.5 50 60 70 71 15 19 20 25 14 94 124 30 70 17 60 70 90 90 20 22.5 Single clevis with ball joint (CS) EN

CP95

) d1 I1 (min) 32 5 5.5 30 10.5 6.6 11 14 34 3.3 3 22 10 17 45 10 32.5 40 5 5.5 35 11 6.6 13 16 40 4.3 4 25 12 20 55 10 38 50 5 6.5 40 15 9 18 21 45 4.3 4 27 16 22 65 10 46.5 63 5 6.5 45 15 9 18 21 51 4.3 4 32 16 25 75 12 56.5 80 5 10 45 18 11 22 25 65 4.3 4 36 20 30 95 16 72 100 5 10 55 18 11 22 41 20 32 115 25 75 6.3 16 89 4 Mounting style (ES) Bore size (mm) d3 CN S5 K1 K2 I2 G1 G2 G3 EN

Cylinder with Lock

C DH7 E EN 0 0.1 ER (Max.)