Modular Type Regulators Series AR

piping Dimensions Model Standard specifications Optional specifications Square type pressure gauge Digital pressure switch Round type pressure gauge Round type pressure gauge (with color zone) P1 P2 A B Note 1) C D K F J H J H J H J H J AR10 AR20(K) AR25(K) AR30(K) AR40(K) AR40(K)-06 AR50(K) AR60(K) 12.5 11 M5 x 0.8 58 M18 x 1 13 0 26 26 25 1/16 Note 2) 28 27.8 26.5 28.5 2 1/8, 1/4 40 94

CV/MVGQ

Allowable Kinetic Energy RS Q G 40 50 63 100 80 Bore size (mm) RS H A 2.4 J 4.4 J 7.8 J 20.5 J 11.7 J Allowable kinetic energy RZQ Solenoid Valve Specifications V308 Applicable solenoid valve model MI W S Coil rated voltage 100/200 VAC (50/60 Hz), 24 VDC JIS Symbol Allowable voltage CEP1 15 to 10% of the rated voltage Class B or equivalent (130C) Coil insulation CE1 50 Hz 8.5 VA Inrush 60

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

1 ("," (23 MM *" ML NN $+, -& DA DB U R H V T L CV C ' ()" J K Q E B ' ()" G MVGQ TA TB S A ' ()" 4" 5," + +"/ 00."* (23 6 1 7"/" 8 MVGQM, MVGQL Common Dimensions $%%& B C DA G GA H J K L MM ML NN Q R S T V W X YY YL Z -,.09-" -"/,* !0-!" !"

Compact Guide Cylinder

x P (Plug) GA JC PD C + Stroke FB FA K J G A + Stroke [mm] Bore size Standard stroke A C D FA FB G GA GB GC GD H J JC K L MM ML NN Nil TN TF 20 (16 x 2) 20, 30, 50 100, 150 38 27.5 8 7.5 3 22 12.5 7.5 11 83 11 3 11 14 M4 x 0.7 10 M4 x 0.7 25 (20 x 2) 39.5 28 10 8.5 3 26 12 7.5 11 93 13 4.5 13 17 M5 x 0.8 12.5 M5 x 0.8 32 (25 x 2) 25, 50, 100 150, 200 44.5 30 12 11.5 3 32 15 7.5 13

Process Valve

Note 1) Note 2) Note 3) Note 4) Note 5) VNB VNB Specifications (Vacuum pilot type) Fluid Vacuum SGC 101 kPa to Atmospheric pressure Pilot pressure range Operating pressure range Pilot Solenoid Valve Specifications 101 to 47.9 kPa SGH Port size 6A to 25A 32A to 50A VO307-1 VO307D DZ1-Q Symbol (Vacuum pilot type) Pilot solenoid valve Note1) SF4--23 SF4D DZ-23-Q VNC Valve type Type N.C.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

L ZY O L ZF G H F ZP K J SP ZCUK B C E D I A 2 x 4.5 AMJ AMV AEP HEP Related Equipment A B C D E F G H I J K L Model ZFC050-02 ZFC050-23 ZFC050-04 ZFC051-01 ZFC051-03 58.5 12.75 12.75 2 3.2 4 33 25 10 10.5 10.5 12 8.5 13.75 58 12.5 12.5 1/8" 5/32" ZFC100-04 4 ZFC100-06 6 53.2 9.1 14.1 30 10 18 11.6 19.5 23 20 29 ZFC101-03 5/32" ZFC101-07 1/4" ZFC200-06 6 ZFC200-08 8 67 15.5 17.5 34 14 22

C92

40 22 24 32 32 33 44 52 64 12 16 20 20 46 60 70 85 G1/8 G1/4 G1/4 G3/8 M10 X 1.25 M12 X 1.25 M16 X 1.5 M16 X 1.5 13,5 15,5 17 17 58 64,5 77 80,5 M6 M6 M8 M8 10 14 18 18 5 7 8 8 23 27 30 31 11 11 14 14 74 84 90 98 17 19 24 24 10 10 10 10 32 40 50 63 C95 C92 CA1 C92KB-Stroke W CS1 Bore size (mm) AM D EE G H KK J K KW M N S SW VD WH ZZ B 22 24 32 32 30 32 40 40 12 16 20 20 G1/8 G1/4 G1/4 G3

Ionizer

Warning j) Avoid using in a place where static electricity is discharged to the body. 1. Do not drop, bump or apply excessive impact (10 G or more) while handling. k) Avoid using in a place where a strong high frequency occurs. Even though it does not appear to be damaged, the internal parts may be damaged and cause malfunction. 2.

Solid State Auto Switches

Weight (g) Auto switch model 60 D-P74-376 Dimensions (mm) Indicator light Connector size M12 13.6 14 SMC 5 32 500 44.5 2 x 2 x 6 Counterbore depth 2.4 2 x 3.4 through 5 6 4 20 Most sensitive position 16 1648 Heat Resistant Reed Auto Switch D-B30(J)/31(J)/35(J) Refer to SMC website for the details of the products conforming to the international standards.

Air Filter

AF-OMX0052-C PRODUCT NAME Air Filter MODEL / Series / Product Number AF20-(F,N)01(F,N)02(B,C)(-2,6,C,J,L,R,Z)-D AF30-(F,N)02(F,N)03(B,C,D)(-2,6,8,J,L,R,W,Z)-D AF40-(F,N)02(F,N)04(B,C,D)(-2,6,8,J,L,R,W,Z)-D AF40-(F,N)06(B,C,D)(-2,6,8,J,R,W,Z)-D AF50-(F,N)06(F,N)10(B,C,D)(-2,6,8,J,L,R,W,Z)-D AF60-(F,N)10(B,C,D)(-2,6,8,J,L,R,W,Z)-D Contents Page 1. Safety Instructions 2-7 2.

Compressed Air Preparation Filter

With bowl guard C2SFm-CJ-D C3SFm-J-D C4SFm-J-D Polycarbonate, Stainless steel Normally closed (N.C.)

Stroke Reading Cylinder and Counter

36 23 SR6 40 18 3 23 M8 x 1.25 70 36 18 7 2 x M5 x 0.8 4 x M5 x 0.8 74 20 (Port size) Thread depth 10 114 + Stroke 31 145 + Stroke 2 D-X 653 CEP1 Series Dimensions: 20 4 x 5.5 Foot type: + 0.05 + 0.02 4 (Positioning pin hole) CEP1L20 Stroke 40 6 13.5 25 6 85 68 22.5 4.5 57.5 40 36 52 Rod side flange type: CEP1F20 Stroke + 0.05 + 0.02 4 (Positioning pin hole) + 0.05 + 0.02 4 (Positioning

Mist Separator

Bowl assembly / auto drain for AFM40-D Option symbol Semi-standard symbol 6 J 6J Semi-standard: (Standard) Semi-standard: J Piping port Piping port (4) Part No. (4) Part No. thread ty pe thread ty pe Rc Rc C4SF-J-D C4SF-D G G C4SFF-J-D NPT C4SF(-Z)-D NPT C4SFN-J(Z)-D Appearance and part No.

Membrane Air Dryer

.: 8 or 5/16 inch 16 23 IN OUT 14 Bracket (G) (Accessory: B) B D Purge air discharge tubing port for dehumidification Applicable tubing O.D.: J (NPT threads: K inch) Purge air for Purge air for dehumidification dehumidification (Maintenance space 100 mm or more) Option: P Port size L A B C D E Model F G J H K IDG10, 10H IDG20, 20H Values inside [ ] are for NPT threads. 83 187 53 165 62 97

Micro Mist Separator

Bowl assembly / auto drain for AFD30-D Option symbol Semi-standard symbol 6 J 6J Semi-standard: (Standard) Semi-standard: J Piping port Piping port (4) Part No. (4) Part No. thread ty pe thread ty pe Rc Rc C3SF-J-D C3SF-D G G C3SFF-J-D NPT C3SF(-Z)-D NPT C3SFN-J(Z)-D Appearance and part No.

C95Series

. __ I -='.1' .J.. ~ ~ _.

CV/MVGQ

O.D. of cover : 1.7 mm Socket Coil ML2B Cover Hook For DC C J G5-S 3.

IDG

IN OUT Bracket (Accessory: B) (G) B D Purge air discharge tubing port for dehumidification Applicable tubing O.D.: J (NPT thread: K inch) Purge air for dehumidification Purge air for dehumidification (Maintenance space 100 mm or more) Option: P Port size L A B C D E Model F G J H K 97 224 8 119 [126] 5/16 114 249 10 147 [154] 3/8 IDG10/10H IDG20/20H Values inside [ ] are for NPT threads.

VXZ

Series VXZ22/23 Construction N.C. N.O.

Compact Manifold Regulator

ARJ AR425 to 935 L 1.25 P=12.5 5.25 7.5 ARX AMR 35 25 ARM ARM 5.5 ARP L Dimension L=12.5 x n+10.5 IR-A 1 23 2 35.5 3 48 4 60.5 5 73 6 85.5 7 98 8 110.5 9 123 10 135.5 Symbol L IR 11 148 12 160.5 13 173 14 185.5 15 198 16 210.5 17 223 18 235.5 19 248 20 260.5 Symbol L IRV 21 273 22 285.5 23 298 24 310.5 25 323 26 335.5 27 348 28 360.5 29 373 30 385.5 Symbol L VEX 31 398 32 410.5 33 423 34