7.4

VQ1000-FPG-C4M5-D: 6 sets Double check block 757 S0700 Series Construction Body Ported Construction 2(B) (A)4 S0716 2-Position Single r u e w q 3(R2) (R1)5 1 (P) t y i 2-Position Double S0726 2(B) (A)4 r u e w q 3(R2) (R1)5 1 (P) t y i 3-Position Closed Center S0736 r u e w q 2(B) (A)4 (R1)5 1 (P) 3(R2) t y i 4-Position Dual 3-Port Valve S07A6 r u e w q 2(B) 4(A) 5(R1) 3(R2) 1(P) N.C. + N.C

Stroke Reading Cylinder and Counter

2 r e y @4 @8 @0 !0 i @3 o @4 @8@7 u @2 r y CEP1 CE1 CE1 r @9 @2 CE2 !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 ML2B #8 12 40 to 63 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 #7 #6 !5 !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 Component Parts Component Parts Material Note No. Description Material Note No.

RB/RBL/RBQ

w e r t y u i o !

RSH/RS1H

8 q #8 $1 y Single acting, Spring extend (TL, TM) Double acting with spring (BL, BM) r $0 !1 !2 #7 #4 #7 @2 e #5 #3 @8 #7 #7 #1 @8 w 10-9-6 6 Heavy Duty Stopper Cylinder Series RSH/RS1H Construction Component Parts (For single acting) No.

RSH/RS1H

9 u #0 #6 t #8 q y $0 $1 20 r !1 e @2 !2 #7 #3 #1 32 w 50, 63, 80 Double acting (DL, DM) @3 !3 !5 #6 o @5 @4 i @1 @6 !0 @7 @9 !6 t u !7 !8 q #8 $1 y Single acting, Spring extend (TL, TM) Double acting with spring (BL, BM) r $0 !1 !2 #7 #4 #7 @2 e #5 #3 @8 #7 #7 #1 @8 w 10-9-6 6 Heavy Duty Stopper Cylinder Series RSH/RS1H Construction Component Parts (For single acting) No.

High Purity Fluoropolymer

After placing the tubing r in the holder assembly y, push it onto the insert bushing e until it stops and clamp it with the knob u. When tightening the tube r with the knob u, maintain uniform clearance on both sides of the holder. 3 q Lever y Holder assembly Caution r Tubing G When the tubing r is curved, straighten it out before using it.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

VN e Insert bushing When the tubing r is curved, straighten it out before using it. LVC The tubing r may slip if there is oil or dust, etc., on the holder assembly y. Remove the contamination using alcohol or another suitable cleaner. LVA Press the insert bushing e into the tubing r by turning the lever q.

CXS

5 t @0 @3 r !9 !8 @1 @2 w !4 !2 !5 t @0 @3 @4 @5 !9 !8 @1 @2 @6 !4 !2 !3 y !0 !1 e q @8!6 u !7 o i !3 y !0 !1 @7 r q @8 !6 u !7 o i CXSJM10 CXSJL10 !6 r !9 !8 @2 @9 !7 o i !6 @4 @5 !8 r !9 @2 @9 !7 o i Piston rod B-side piston Rod cover Piston rod B-side piston Rod cover Component Parts No. Description No.

MY2

3 e $2 q $0 #9 !8 u i o y !0 @8 @3 !1 $1 #0 r MY2H16 MY2HT16 $5 !4 @5 !9 @3 !5 #1 @4 $4 !2 $3 #3 #5 #6 @0 #4 #7 !

CXS

5 t @0 @3 r !9 !8 @1 @2 w !4 !2 !5 t @0 @3 @4 @5 !9 !8 @1 @2 @6 !4 !2 !3 y !0 !1 e q @8!6 u !7 o i !3 y !0 !1 @7 r q @8 !6 u !7 o i Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CXSJM10 CXSJL10 @9 !7 o i !6 r !9 !8 @2 @9 !7 o i !6 @4 @5 !8 r !

Series 10-, 21- AW-B Filter Regulator

R.

Vacuum Pad

Dimensions: Pad Unit ZP3P-20PTSF [Weight: 1.8 g] ZP3P-25PTSF [Weight: 2.2 g] 14 7 13 7 17.5 17 20 3 25 3 2 1.6 ZP3P-35PTSF [Weight: 4.7 g] ZP3P-50PTSF [Weight: 12.4 g] 20.5 10 20.5 10 22 19 35 4 50 4 3 4.5 Pad Mounting Dimensions 20PT/25PT 35PT/50PT R R 12.5 1.9 12 2.4 R R R R R R 10 7.5 3 13 10.7 4 R R R part has to be smooth with no corners. 2 ZP3P Series How to Order Vertical vacuum inlet

VHK

P port size SlA 04F 06F 08F 10F 12F 4 Knob color 6 VlA Blue Gray A port size 2 port valve 3 port valve (Standard) 8 10 04F 06F 08F 10F 12F 4 2 port valve 3 port valve R (Option) Red 12 6 M5 M5 X 0.8 8 10 VM/VR 01S 02S 03S 04S 1 8 1 4 3 8 1 2 R(PT) R(PT) 12 VH M5 R(PT) M5 X 0.8 01S 02S 03S 04S 1 8 1 4 3 8 1 2 R(PT) R(PT) R(PT) R(PT) R(PT) Standard 1(P): One-touch/2(A): One-touch 1(P): One-touch

V

R S Applicable Tube OD P Q R S 4 4 23.3 15.8 10.4 6 6 24.3 16.8 12.8 H O W T O O R D E R Z P R P A D H O R I Z O N T A L T Y P E W I T H O U T B U F F E R 6 6 24.3 16.8 12.8 8 8 26.2 18.7 15.2 8 8 26.2 18.7 15.2 ZPR P A D D I A M E T E R 02 2 04 4 06 6 08 8 10 10 13 13 16 16 20 20 25 25 32 32 40 40 50 50 M O U N T I N G T H R E A D P A D T Y P E Symbol Thread Dia 2~8 10~16 40~50 20~32 U Flat

VXA21/22

Refer to table q for configuration.

Rotary Table/

2 q @0 u !

Coolant Valve

When valve body closes When the power to the pilot solenoid valve is turned off (or when fluid is exhausted from the port 12(P1) of the air operated type), the pilot air under the piston is exhausted, and the return spring closes the valve element. t t e e i i r r Port 1 Port 2 q q N.O. u Component Parts No.

Series AP3500

q e r q e r q e r q e r w w w w 125 Process Gas Equipment / Diaphragm Valve Specific Product Precautions Be sure to read before handling.

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

Connection thread size Proper tightening torque (Nm) M R 1/8 7 to 9 R 1/4 12 to 14 H/DL L/LL R 3/8 22 to 24 R 1/2 28 to 30 KC Installation of Threads 3. Tightening tools Tighten with an appropriate wrench using the hexagon wrench flats on the body. Position the wrench on the base as close as possible to the threads.

MQQ

6 r t !3 w e q RE A B REC CX CY !5 !0 !1 !2 u y i o MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC MK(2) Material Note Component Parts RS Q G No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !