XL-OMY0002

C D (KF) KF (K) KF G I H H V Fn Fd A C C U U M E V V A L E B K S H J M G A A A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114

Ejector Valve Unit, Series ZYY/ZYX

Manual override Non-locking push type Nil D E Push & turn locking type, screw driver operated Push & turn locking type, manually operated Light/Surge voltage suppressor For electrical entry types G, H, L, M Without light/surge voltage suppressor With surge voltage suppressor Note 2) Nil S Z R U With light/surge voltage suppressor With surge voltage suppressor (non-polar type) With light/surge

ZB-OM00301

2V Assy Assy 18 - No.ZB-OM00301 O Assy V Assy Assy V Assy Assy 19 - No.ZB-OM00301 1TK1-123 2 3 1VKJ 2 3 1 0.1 2 0.1 3 0.15 -0.2 2 20 - No.ZB-OM00301 () ( ) ONOFF () 0.1Nm 1 ON 0 ) () () 1 (PA) 0 (AR) () 21 - No.ZB-OM00301 AXT661-12 0.2~0.33mm 2 (1.7mm) ) DXT170-71-1 3.2~3.7mm (DXT170-75-1) 2 0.2~0.33mm (1.7mm) (ACB (1mm) 22 - No.ZB-OM00301 N.C. 300 600

Direct Operated Precision Regulator Modular Style Series ARP3000 1

Inlet pressure (MPa) Weather resistant NBR Diaphragm assembly e 1315510A Flow Characteristics Inlet pressure: 0.7 MPa Valve assembly Valve spring Valve mini Y packing O-ring O-ring Handle Set nut Brass, HNBR Stainless steel NBR NBR NBR Polyacetal Zinc die-casted r t y u i o !

Compact Electric Actuator Series LG1

MC NFB Servomotor HC-PQ Power supply Single phase 200VAC (Type A) or Single phase 100VAC (Type A1) C P U L1 U V V W Servo amp SM L2 W MR-CA E or MR-CA1 The length of the cable between the controller and servo amp is 2m or less.

HRX-OM-W038

Status (6): Alarm will be generated after 600 seconds that is set for "AS.23: Range over detection timer" after the circulating fluid temperature exceeds the threshold of "AS.04".

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

One-touch fitting 6 One-touch fitting 8 One-touch fitting Rc(PT)1/4 8 One-touch fitting 10 One-touch fitting Applicable series Type of actuation SY3000 2 position single (A) 4 (B) 2 1 SY5000 5 (EA) 3 (EB) 1 (P) 2 position double (A) 4 (B) 2 2 SY7000 5 (EA) 3 (EB) 1 (P) 3 position closed center (A) 4 (B) 2 3 Manual override 5 (EA) 3 (EB) 1 (P) 3 position exhaust center Nil: Non-locking push type E:

HRX-OM-O021

Status (6): Alarm will be generated after 600 seconds that is set for "AS.23: Range over detection timer" after the circulating fluid temperature exceeds the threshold of "AS.04".

V

R S E E N E X T P A G E Courtesy of Steven Engineering, Inc. !

A

I f a p re s s u re g re a t e r t h a n t h e s e t p re s s u re i s re a c h e d , t h e u n i t w i l l o p e n , c l o s i n g w h e n p re s s u re i s l e s s t h a n s e t pressure.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

E 4 A 3/5 3/5 4 A 4 A 4 A 4 A 2 B 2 B 2 B 2 B 2 B P 1 P 1 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

CRQ2 Angle adjusting screw Angle adjusting screw Angle adjusting screw MSQ MRQ 0 A R R 9 n Dot ot gl e A e n at at v n io a o gl io io ct dj o e re u n n gr a st di dj ra ra in y g u g 20in n n e st di st g k g in re u e e g of dj ct a di of of io e re e n gl ct n g k A k io n e e n ra y y gr n gr io o o at o o ot v v R e e 9 9 0 0 The rotation range under the adjustment of an angle at 60

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Note) If it is pressurized from the port indicated with the arrow, the shaft rotates in the clockwise direction. 11-7-42 Angle adjusting screw Angle adjusting screw 0 A R R 9 n ot ot gl e e n at at v io a o io io ct dj o re u n n gr st di ra ra in y g g in n n e di st g k g re u e e of dj ct a of of io e e n gl n g k A k n e e ra y y gr n gr io o o at o o ot v v R e e 9 9 0 44 Series CRA1

MGP

Note 6) Dimension E' cannot be less than the standard dimension E.

Cylinder with Lock Series CLS

m(kg) Load weight: m(kg) 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) 31

IDX-OM-W032

mm 600 mm 600 mm 600 mm 600 mm ( ) IDFA Series 2-1 2 1 IDX-OM-W032 2 2 2 2 6 6-3 2 2 3 50 50 OUT IN (IN) (OUT) 2 2 4 10mm IDFA Series 2-2 2 2 IDX-OM-W032 2 2 2 5 6-1 IEC AC230V [30mA 10AIDFA75E 20A] 216AWG 812mm 3 () 1.25mm 0.2m 30m M3 1.25-3 6.5mm M3 0.631Nm IDFA Series 2-2 2 3 IDX-OM-W032 2 2-3 () 2 () IDFA Series 2-3 2 4 IDX-OM-W032 3 / 3 / 3-1 INOUT

MGP

\E Support...

Vacuum Unit

Pressure sensor assembly: 3 m (With lead wire) Note Centralized wiring specification (Plug-in) Individual wiring specification: 300 mm (Connector assembly)4 Symbol C V None V Cannot be selected when e is N C1 V None None Cannot be selected when e is P or T L None V V Cannot be selected when e is N L1 None None V L2 None V None Cannot be selected when e is P or T L3 None None None 4 For the

HEC_W-E

This item is applicable U n i t N u m b e r M O D E < 0 only when multiple units are used. 2. Baud Rate B a u d R a t e M O D E < 1 2 0 0 b / s Setting range : 600, 1200, 2400, 4800, 9600, 19200b/s Indicated content : Baud rate (Ex. : 1200b/s) Function : Sets baud rate for communication. 3.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Contents No. q w e r t y u i o !0 !1 !2 !3 !