Exhaust Cleaner for Vacuum Pump AMV Series

150 175 AMV3-10 AMV6-14 AMV15-20 AMV37-20 AMV75-30 AMV160-40 R1 R1 1/2 R2 R2 80 (3B) JIS 10K FF flange 100 (4B) JIS 10K FF flange 789

LFE-OMZ0012

Remarks Weight Lead wire and M12 connector LFE-1-A3 Lead wire length: 3 m Approx. 175 g LFE-1-D Tapping screw 3 x 10, 4 pcs. Approx. 45 g Bracket LFE-2-D Tapping screw 3 x 10, 4 pcs. Approx. 70 g LFE-3-D Tapping screw 3 x 10, 4 pcs.

MGZ Series

freezing) Ambient and fluid temperature With auto switch 10 to 60C (14 to 140F) (with no freezing) Non-lube Lubrication 50 to 700mm/s (2 to 27.5in/s) Piston speed +1.4 0 +1.0 0 Stroke length tolerance to 250 , 251 to 1000 mm Rubber bumper Cushion JIS class 2 Thread tolerance 1/4 1/4 1/4 Port size Standard strokes Bore size (mm) Standard strokes (mm) Long strokes (mm) 75, 100, 125, 150, 175

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

Dimensions (mm) Recommended flow m3/min (ANR) Model Port size R Effective area (mm2) Weight (g) A B C 1 8 ANB1-02 15 10 51 22 ANB1-01 22 81 25 18 35 93 30 21 94 107 46 24 175 133 50 41 462 190 74 41 612 230 74 60 871 271 86 70 1.2 or less 2.7 or less 3.8 or less 7.0 or less 12.0 or less 20.0 or less 32.0 or less 45.0 or less 1 4 ANB1-03 35 3 8 ANB1-04 60 1 2 ANB1-06 90 3 4 ANB1-10 160 1

EXxx-OMN0029CN

DIN 4 F.E. 5 () -29No.EX-OMN0029CN-D (1)EX600-ED21 24 V() 2 0 V() 3 24 V() 4 0 V() 5 FE (2)EX600-ED31 0 V() 2 0 V() 3 FE 4 24 V() 5 24 V() 2 SI IP67 -30No.EX-OMN0029CN-D EX600-ED2EX600-ED3M12(5 ) 7/8 (5 ) () DC24 V 10 Class22 A DC24 V 108 A () DC24 V +10/-5 Class22 A DC24 V +10/-58 A 1 IP67() -1050 -2060 3585%RH() AC500 V1 FE DC500 V10 M FE 3(UL508) CE UL(CSA)RoHS 170 g 175

5 Port Air Operated Valve

3/8 10.0 [8.7] 0.48 [0.46] 3.0 [2.4] 8.3 0.40 2.2 Exhaust center 3 position 354 9.2 [3.0] 0.50 [0.49] 2.6 [0.85] 6.1 0.35 1.6 Pressure center Note 1) [ ]: Normal position Note 2) Values without bracket 1500 VFA1000/3000/5000 Series 5 Port Air Operated Valve Body Ported/Single Unit Construction: Body Ported 2 position single VFA1000 VFA3000, 5000 Symbol 2 position single VFA1000 t qe r q e

High Vacuum Angle Valve

How to Order [Option] q w y e u r t i XLAV M9N 16 A G G 1 o !

Aluminum High Vacuum Angle Valve

For details, consult your SMC sales representative. 419 B Aluminum High Vacuum Angle Valve Double Acting/Bellows Seal RoHS XLC/XLCV Series How to Order XLC M9N A 16 Flange size 16, 25, 40 XLC M9N A 50 1 Flange size 50, 63, 80, 100, 160 q t y w e r u XLC16 to 40 q Flange size w Flange type e Pilot port direction Rear flange surface Type KF (NW) K (DN) Applicable flange 16, 25, 40, 50, 63,

Magnet: D (Built-in), Mounting: D (Double Clevis), Style: Aluminum Tube, Bore Size: 50mm, Thread: TN (NPT), Stroke: 200mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewied Connector: L (3m)

Magnet: Built-in, Mounting: Double Clevis, Style: Aluminum Tube, Bore Size: 50mm, Thread: NPT, Stroke: 200mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewied Connector: 3m, Number: -

Magnet: Built-in, Mounting: Double Clevis, Style: Aluminum Tube, Bore Size: 50mm, Thread: NPT, Stroke: 250mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: K39--Solid State, Gen. Purpose, 2 Wire, Terminal, Lead Wire or Prewied Connector: -, Number: -

High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

Free Mount Cylinder

D-M9P D-M9NV D-M9B D-M9N D-M9PV D-M9BV Auto switch part no.

XM, XY

Fn (KF flange) (mm) Model A 79.5 106 119 149 178 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 64 84 95 118 142 H XYA-25 XYA-40 XYA-50 XYA-63 XYA-80 100.2 130 178 209 268 483 Stainless steel High Vacuum Angle/In-line Valve Double Acting/Bellows Seal XMC, XYC Series How to Order Angle type M9N A A 16 50 M9N XMC XMC Flange size 16, 25, 40

MHZ

Flat finger type 3 E Narrow type is not available for 6, 32 and 40.

MHZ

Flat finger type 3 E Narrow type is not available for 6, 32 and 40.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Fn (KF flange) (mm) Model A 79.5 106 119 149 178 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 64 84 95 118 142 H XYA-25 XYA-40 XYA-50 XYA-63 XYA-80 100.2 130 178 209 268 3 Stainless steel High Vacuum Angle/In-line Valve Double Acting/Bellows Seal Series XMC, XYC How to Order XMC XYC M9N A A 16 25 Angle type M9N In-line type 1 5 6 2 3 4

15

How to Order NZ MF 25 S LEF q e w Ball screw drive q Size w Motor mounting position e Motor type Nil In-line P (Right side/Left side) parallel 25 For LEFl25 32 For LEFl32 40 For LEFl40 Symbol Type NZ Mounting type Z NY Mounting type Y NX Mounting type X NW Mounting type W Symbol Type NV Mounting type V NU Mounting type U NT Mounting type T NM2 Mounting type M2 * Select only NZ, NY, NX or

e-Rodless Actuator

Refer to pages 5 and 6 for detailed selection procedures. 2 How to Select Series E-MY2 Moment / E-MY2C E-MY2C/M3 E-MY2C/M1 E-MY2C/M2 50 40 50 40 50 40 30 30 30 20 20 20 10 10 10 Moment (Nm) Moment (Nm) Moment (Nm) 5 5 5 E-MY2C25 E-MY2C25 4 4 4 3 3 3 E-MY2C25 2 2 2 E-MY2C16 E-MY2C16 E-MY2C16 1 1 1 0.5 0.5 0.5 100 200 300400500 1000 1500 100 200 300 400500 1000 1500 100 200 300 400500 1000

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

E (J) of the load.