MGC

75, 100, 125, 150, 350, 400, 450, 500, 600, 40 200, 250, 300 Ball bushing bearing 700, 800 MGCL 350, 400, 450, 500, 600, 50 700, 800, 900, 1000 Intermediate strokes and short strokes other than the above are produced upon receipt of order.

IDX-OM-W094

mm 600 mm 600 mm 600 mm 600 mm z z z 3.2.2 z z 7 7.3 z IDF-AB500 14 1 IDFA60/70/80/90 Series 3-2 IDX-OM-W094 3.2.3 z z z z z 60 z 65 65 z z z z z z z OUT IN (IN) (OUT) IN OUT IDFA60/70/80/90 Series 3-3 IDX-OM-W094 3.2.4 z 12mm 5m8mm z z z z SO O S IDFA60/70/80/90 Series 3-4 IDX-OM-W094 3.2.5 7.1 0.2m IDFA60-23 IDFA70-23 IDFA80-23 IDFA90-23 16AWG (1.25mm

IDX-OM-W093

mm 600 mm 600 mm 600 mm 600 mm 3.2.2 7 7.3 IDF-AB500 14 1 IDF60/70/80/90 Series 3-2 IDX-OM-W093 3.2.3 60 65 65 IN OUT (OUT) (IN) IN OUT IDF60/70/80/90 Series 3-3 IDX-OM-W093 3.2.4 12mm 5m8mm SO O S IDF60/70/80/90 Series 3-4 IDX-OM-W093 3.2.5 7.1 0.2m IDF60-20 IDF70-20 IDF80-20 IDF90-20 2) 12AWG (3.5mm 2) 10AWG (5.5mm 2) 16AWG (1.25mm 911 mm 1823 mm IDF60-30 IDF70-30 IDF80

IDX-OM-W026

mm 600 mm 600 mm 600 mm ( ) 600 mm IDF Series 2-1 2 1 IDX-OM-W026 2 2 2 2 6 6-3 IDF-AB500 14 1 IDF22E,IDF37E,IDF55E,IDF75E 2 2 3 50 50 OUT IN (IN) (OUT) IDF-BP317 1 IDF22E IDF-BP318 1 IDF37E IDF-BP325 1 IDF55E IDF75E 2 2 4 10mm IDF Series 2-2 2 2 IDX-OM-W026 2 2 2 5 6-1 IEC () AC200V 30mA 10A IDF75E 15A 216AWG,3 , 812 1.25 0.2m 30m M3 1.25-3 6.5mm M3 :0.63Nm

IDX-OM-U010

Necessary maintenance space Front: 600 mm Back: 600 mm Top: 600 mm Right side: 600 mm Left side: 600 mm Avoid locations where the ventilation grille is obstructed. Avoid locations where the air dryer will draw in high-temperature air discharged from an air compressor or other dryer.

IDX-OM-W095

mm 600 mm 600 mm 600 mm 600 mm 3.2.2 7 7.3 IDF-AB500 14 1 IDFC60/70/80/90 Series 3-2 IDX-OM-W095 3.2.3 60 80 80 IN OUT (IN) (OUT) IN OUT IDFC60/70/80/90 Series 3-3 IDX-OM-W095 3.2.4 12mm 5m8mm SO O S IDFC60/70/80/90 Series 3-4 IDX-OM-W095 3.2.5 7.1 0.2m IDFC60-23 IDFC70-23 IDFC80-23 IDFC90-23 16AWG (1.25mm 2) 14AWG (2.0mm 2) 911 mm 1823 mm IDFC60-23 IDFC70-23 IDFC80-23

IDX-OM-V020

Necessary maintenance space Front: 600 mm Back: 600 mm Top: 600 mm Right side: 600 mm Left side: 600 mm Avoid locations where the ventilation grille is obstructed. Avoid locations where the air dryer will draw in high-temperature air discharged from an air compressor or other dryer. Avoid pneumatic circuits where rapid pressure fluctuations or flow speed changes are generated.

XL-OMV0002

KF ) Fn J H B A G A mm A B C D E Fn G H J XLC-16 40 110 38 1 30 17 40 26 XLC-25 50 120 48 1 12 40 26 39 27.5 XLC-40 65 171 66 2 11 55 41 63 36 9 XL-OMV0002 4-2.162580,100,160 C E D C E E (KF ) (K ) Fn Fd J K H B A G A mm A B C D E Fn Fd G H J K XLC-50 70 183 80 31 10.5 75 52 77 29 10.5 XLC-63 88 209 100 39 11 87 95 70 76.5 36 9 XLC-80 90 250 117 45.5 11 114 110 83 105 44 9 XLC-100 108 317.5

ITV

Cable connector (4 wire) Right angle type Cable connector (4 wire) Straight type n50 4-7 Mounting hole 31 SMC PREGULATOR E SMC PREGULATOR E RESET 40 52 ITV2090 ITV2090 SET UNLOCK LOCK 84 100 12.5 M12 X 1 Cable connecting threads 1.6 12 (99) (11) SMC PREGULATOR E ITV2090 Rc(PT)1/4 VAC port OUT 2 G ATM (Atmospheric pressure) OUT (Set pressure) VAC (vacuum pressure) 19 n36 Flat bracket P3020114

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VKF (A) 2 (A) 2 VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts Description Material Note No.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

r e w q r e w q VG VP S070 VQ VKF N.C.

VCA

D U 25 Approx. 44 R C C R G1/2 E E G1/2 B B 2-P Port size A A D 2-P Port size (S) Port size G1/2 Compatible heavy duty cord Cable O.D. 6.8 to 10 L L K 2-M Thread depth 6 K 2-M Thread depth 6 (mm) Electrical entry P Port size B C Model A D E F K L M Grommet: G Conduit: C DIN connector: D Conduit terminal: T U 81 91.5 101 103.5 Q 98 101 104 104 R 36 44 53 55.5 S 68 71 74 74 Q 46 50 52 52 R

VQ7-6/7-8

Cylinder Speed Chart Cv factor Metal seal (Rubber seal) Cylinder bore size mm Cylinder speed mm/s Model 40 50 63 80 100 125 140 160 150 300 1.5 (1.7) VQ7-6 450 600 750 150 300 3.2 (3.2) VQ7-8 450 600 750 Pressure 0.5MPa, Load factor 50% Note) Use as a guide for selection, as cylinder speeds will vary depending on the piping equipment.

Digital Gap Checker

.: 600 kPa 1: Compared with the ISA2 with 0.2 MPa pressure gauge.

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

AS500/600 AS420 AS800/900 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Number of needle rotations Number of needle rotations Number of needle rotations 530 Series AS Speed Controller: Standard Type Large Flow In-line Type Construction: AS420/500/600 Construction: AS800/900 AS TMH ASD AS AS AS-FE

PSxx-OMG0001CN

-2No.PS-OMG0001CN-H / 1 1.5 *3) 3)1 1 -3No.PS-OMG0001CN-H () () () () -4No.PS-OMG0001CN-H () * UL UL1310 2 UL1585 2 UL * FG -5No.PS-OMG0001CN-H * 6 33 () () 30m30m DC(-)() * () CE 050 (5 ) -6No.PS-OMG0001CN-H * 2030 1 LCD * -7No.PS-OMG0001CN-H E DIN 0 1 3 0 NPN2 +15 V 1 NPN2 +420 mA C 2 NPN2 + 3 PNP2 +15 V 2 4 PNP2 +420 mA 5 PNP2 + A B D + 1 2 M SI 1 1 2 L

PFxx-OMP0001CN

6No.PF-OMP0001CN-F * 6 33 () 10 m DC(-)() -7No.PF-OMP0001CN-F * () () CE 050 -8No.PF-OMP0001CN-F * 1015 10 /23% 3 LCD * OUT -9No.PF-OMP0001CN-F / PFMB 7 7 A*8 *8 2 501 5500 L/min 102 101000 L/min *7 202 202000 L/min R Rc *7 N NPT F G*1 *1IS0228 5 M SI6 *5: 501 102 202 (SI) 04 1/2 *6:L/min 06 3/4 L 1 *4 (2m) OUT1 OUT2 A NPN NPN B PNP PNP C NPN (15 V) D NPN (420 mA) E*

PFxx-OMS0001CN

d. == 1 / ,/ ([F20](47 )) e. ( (53 )) f. -46No.PF-OMS0001CN-A [F20] [---] =00 = ON EEPROM 100 +100 OFF <> [F20] [iNP][] [iNP][-] [inP] [] [F20] GND 30 msec.

LEJ-OM004xx

Crean class Amount of Type Speed recommended vacuum (mm/s) ISO 14644-1 Fed.Std.209D aspiration 6 1000 10 5 100 20 4 10 30 6 1000 50 5 100 60 4 10 70 6 1000 20 5 100 30 4 10 50 6 1000 30 5 100 70 4 10 90 600 11-LEJS40 1200 600 *Please aspirate it from the port on both sides when aspirating 50/min(ANR). Please select "D" about the type. 11-LEJS63 1200 * Based on SMC test condition.

PSxx-OML0002CN

50 OUT2 FUNC DC(-) DC(+) OUT1 -E OUT2 PNP 1 Max.80 mA 1 V 1 k FUNC DC(-) DC(+) -F OUT1 PNP 1 Max.80 mA 1 V 12 V 300 24 V 600 50 OUT2 FUNC DC(-) -20No.PS-OML0002CN-G 1 1 1 1 ONOFF ON OFF ON P_1 H_1 [Pa] ON OFF [] -21No.PS-OML0002CN-G <> 1 [P_1][n_1] 1 1 -22No.PS-OML0002CN-G 2[P_2][n_2] (P1LP1H) P1L()P1H() (n1Ln1H) 1 -23No.PS-OML0002CN-G 2[F 0] [F]