3 Port Solenoid Valve Metal Seal Series VZ200 1

For lead wire length (1000 mm) Solenoid valve: VZ2150-5M0-015 pcs. Connector assembly: DXT170-80-4A-105 pcs. Crimping the Lead Wire and Socket Peel 3.2 to 3.7 mm of the tip of lead wire, enter the core wires neatly into a socket and crimp it with a special crimp tool. Be careful so that the cover of lead wire does not enter into the crimping part.

Magnet: D (Built-in), Mounting: F (Front Flange), Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 160mm, Thread: TN (NPT), Stroke: 100mm, Option: Cushion at Both Ends, Cylinder Switch Type: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Pre-wired Connector: L (3m Lead Wire)

Magnet: D (Built-in), Mounting: F (Front Flange), Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 160mm, Thread: TN (NPT), Stroke: 100mm, Option: Cushion at Both Ends, Cylinder Switch Type: M9B--Solid State , Gen. Purpose, 2 Wire, Horizontal, 0.5M, Lead Wire or Pre-wired Connector: L (3m Lead Wire)

(Or None in the Case of No Switch), Lock Unit Built-in Magnet: D (Built-in), Lock Unit Switch Type: M9PL--Solid State , Gen. Purpose, 3 Wire PNP, Horizontal, 3M

Magnet: Built-in, Mounting: Front Flange, Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 160mm, Thread: NPT, Stroke: 100mm, Option: Cushion at Both Ends, Cylinder Switch Type: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Pre-wired Connector: 3m Lead Wire, Number: -, Lock Unit Built-in Magnet: -, Lock

Magnet: Built-in, Mounting: Front Flange, Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 160mm, Thread: NPT, Stroke: 100mm, Option: Cushion at Both Ends, Cylinder Switch Type: M9B--Solid State , Gen. Purpose, 2 Wire, Horizontal, 0.5M, Lead Wire or Pre-wired Connector: 3m Lead Wire, Number: -, Lock Unit Built-in Magnet: -, Lock

Magnet: Built-in, Mounting: Front Flange, Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 160mm, Thread: NPT, Stroke: 1200mm, Option: Cushion at Both Ends, Cylinder Switch Type: No Switch, Lead Wire or Pre-wired Connector: 0.5m Lead Wire (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Lock

Magnet: Built-in, Mounting: Front Flange, Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 160mm, Thread: NPT, Stroke: 350mm, Option: Cushion at Both Ends, Cylinder Switch Type: J59W--Solid State, 2-color Indication, 2 Wire, 0.5M, Lead Wire or Pre-wired Connector: 0.5m Cord Length, M12-4 Pin Connector, Number: -, Lock Unit Built-in

Magnet: Built-in, Mounting: Front Flange, Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 160mm, Thread: NPT, Stroke: 350mm, Option: Cushion at Both Ends, Cylinder Switch Type: Y7PWV--Solid State, 2-color Indication, 3 Wire PNP, Vertical, Lead Wire or Pre-wired Connector: 5m Lead Wire, Number: -, Lock Unit Built-in Magnet: -

AR20-B to AR60-B

1500 200 400 600 800 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min (ANR) AR30(K)-B Rc3/8 AR40(K)-B Rc1/2 AR40(K)-06-B Rc3/4 0.6 0.6 0.6 0.5 0.5 0.5 Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 0 00 0 0 1000 2000 3000 4000 5000 0 1000 2000 3000 500 1000 1500 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow

HRX-OM-Q026

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-15 Connection of RS-232C HRSH Series 3.3 Installation 3-27 HRX-OM-Q026 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

AC Servo Motor Driver (MECHATROLINK-III type)

After removing the cause of the alarm or warning, the alarm or warning can be deactivated in any of the methods marked in the alarm / warning deactivation column. "6" of the figure, "B" of the alphabet, and "D" are displayed as follows. 6 B D 7.1 Alarms List This section provides list of alarms.

Series HAW Water Cooled Aftercooler 1

300 1000 3300 5700 8600 12000 18000 150 700 2500 5000 7000 10500 14000 2100 4300 5600 8000 11000 AM Misc.

Digital Flow Switches Series PF2A

(de-energized) 490 m/s2 in X, Y, Z directions 3 times each 1000 Vp-p, Pulse width 1 s, Rise time 1 ns Status LEDs Response time Hysteresis Power supply voltage Enclosure Operating temperature range Withstand voltage Insulation resistance Vibration resistance Impact resistance Noise resistance Note 1) For digital flow switch with unit switching function.

3

H C37 3/4 20 J Stainless steel D 200 VAC E 230 VAC 6 25A N.C.

Bag Filter

T2 T1 I 8 x D FGD FGE H G FGG P.C.D B E F FGA C A (mm) Applicable model G H I Part No.

PSxx-OML0002CN

5 V A/D 5(V)1(M)/(1(K)+1(M)) 4.995(V)0.555 V ) 29 ON-OFF ON () (P1LP1H P2LP2H)ON (29 ) () "digit" () 0 () SI ONOFF () "()" () "()" ON -12No.PS-OML0002CN-G ON () (n1Ln1H n2Ln2H)ON (29 ) "" 29 (0FF)(ON)(OFF) (ON) () 5R.D.(5) ( 01MPa 0.001MPa 1/1000 ) "()" () "F" () ripple -13No.PS-OML0002CN-G :79 Nm 0.50.7 Nm M35 L(2 ) A(ZS-38-A1) M35 L B(ZS-38-A2) A M35 L M35 L B M35 L -14No.PS-OML0002CN-G

HRX-OM-W032

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-13 Connection of RS-232C HRS Series 3.3 Installation 3-25 HRX-OM-W032 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly. Incorrect piping might cause leakage of supplied or drained fluid and wet surrounding area and facility.

PSxx-OMM0002CN

SI ONOFF -12No.PS-OMM0002CN-F () "()" () "()" ON "" ON () (n1L~n1H n2L~n2H) ON (26 ) "" 26 (OFF)(ON) (OFF)(ON)4 () 5%R.D.(5%) (0~1MPa 0.001MPa 1/1000) "()" () "F" "" "" () ripple -13No.PS-OMM0002CN-F 4 2.5 M3X5L(2 ) 0.5~0.7 Nm <> M3X5L ZS-24-AZS-24-D <> M3X5L ZS-35-A -14No.PS-OMM0002CN-F <> () A B <> () A B -15No.PS-OMM0002CN-F 12~14 Nm 17mm 17 mm () TU0425 ( 4 2.5

Electric Actuator with Integrated Guide Series LTF

36 LTF6EPH 4 to 500 to 390 40 LTF6ENH 8 to 500 to 390 44 LTF8FPL 12 to 1000 to 890 to 710 to 580 to 480 48 LTF8FNL 16 to 890 to 710 to 580 to 480 to 1000 71 34 LTF6EPF 2 to 300 to 230 38 LTF6ENF 6 to 300 to 230 42 LTF8FPH 10 to 500 to 440 to 350 to 290 to 240 46 LTF8FNH 14 to 500 to 440 to 350 to 290 to 240 52 LTF6EPH-K 20 to 500 to 390 56 24 LTF6ENH-K to 500 to 390 60 28 LTF8FPL-K to 1000