Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

Weight Material: NBR, Mounting: A [g] qWeight Difference by Mounting Style [g] ZHP63BMNA-C6S 184 ZHP80BMNA-C6S 224 ZHP63UMNA-C6S 167 ZHP80UMNA-C6S 175 B C D E F G H 20 5 14 7 25 1 11 wWeight Difference by Material [g] For the ZHPA-00 (without ejector), weight shown above 12 g.

AMF

t V#6500 O.D.268 X I .D.225 X T3 1 pc. O.D.218 X I.D.175 X T3 1 pc. Gasket AL-62S AL63S 3 pcs. AL-31S y JIS B2401G35 5 pcs. O ring JIS B2401G35 1 pc. JIS B2401G35 3 pcs. JIS B2401G35 3 pcs.

ASD

ASD230F ASD330F/430F ASD530F/630F Applicable tube O.D. d L2 L2 L3 L3 M M D2 D2 L1 L1 L4 L4 H H (Width across flats) (Width across flats) D3 D3 A1 L5 L5 A1 A2 D1 D1 A2 T T Inch L4 L5 A1 A2 M MAX.

PA3000/5000/PAX1000

Printed in Japan. 1st printing September, 1999 D-SMC.L.A. P-80 (D)

Return Filter FH100 Series

(34) C D C C IN OUT IN IN OUT OUT E (Element removal dimension) Differential pressure indicator Differential pressure indication switch B DRAIN (mm) d A B C D E F Weight (kg) Model FH100-06 FH100-08 FH100-10 FH100-12 FH100-16 FH100-20 FH100-24 3/4 102 90 35 200 290 2.5 1 104 1 1/4 110 100 45 265 380 4.3 1 1/2 144 150 128 52 299 430 6.8 2 2 1/2 175 200 157 70 387 540 17.5 3 520

5 Port Air Operated Valve

The valve arrangement is numbered as the 1st station from D side. Under the manifold base part number, state the valves to be mounted in order from the 1st station as shown in the figure above. Refer to page 1520 for manifold options. 1519 VFA3000/5000 Series Manifold Options For base mounted Blanking plate assembly Mounting screw, gasket part no.

CRB1/Size: 10, 15, 20, 30

Vane style S D Single vane Double vane Size 10 15 20 30 Rotation angle Application Symbol Rotaion angle 90 180 270 90 100 90 180 270 90 100 Single vane Double vane Flange Brackets Part No. (Refer to p.1.1-6 for further information on specifications.) Ass'y part No.

NARM Series

A 1.18 (30) 1.61 (41) B 1.34 (34) 1.57 (40) C D E F G 136314 2.76 (70) 2.97 (75.5) .21 (5.4) .26 (6.5) .61 (15.4) .31 (8) 2.17 (55) 2.09 (53) .09 (2.3) .09 (2.3) NARM2500 43.5 136414 NARM3000 30 15 Precautions 0 35.3 70.6 106 Be sure to read before handling.

Lock: L (With Lock), Body Shape: D (Mounting Tap: 4xM10x1.5, Pin Hole: 2xø8H7), Mounting Surface: A (90° from Port Location), Bore Size: 50mm, Port Thread: TF (G), Guide Pin Diameter: 175 (17.5mm), Guide Pin Shape: D (Diamond Type), Clamp Arm Position: A (Same Direction as Port), Clamping Height: L (Low Type), Shim: None

Exhaust Cleaner for Vacuum Pump AMV Series

150 175 AMV3-10 AMV6-14 AMV15-20 AMV37-20 AMV75-30 AMV160-40 R1 R1 1/2 R2 R2 80 (3B) JIS 10K FF flange 100 (4B) JIS 10K FF flange 789

°C, Valve, Single, Non Plug-In, 4/5 PORT SOLENOID VALVE, 175 lb

°C, Valve, Single, Plug-In, 4/5 PORT SOLENOID VALVE, G40, 175 lb

°C, Valve, Single, Plug-In, 4/5 PORT SOLENOID VALVE, 175 lb

Lock: W/out Lock, Mounting Surface: D (90° Counter Clockwise from Port Side), Guide Pin Diameter: 175 (17.5mm), Guide Pin Shape: R (Round Type), Clamp Arm Position: D (90° Counter Clockwise from Port Side), Clamping Height: L (Low Type), Auto Switch: W/out Auto Switch (Built-in Magnet), Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs.

Lock: None, Body Shape: D (Mounting Tap: 4xM10x1.5, Pin Hole: 2xø8H7), Mounting Surface: A (90° from Port Location), Bore Size: 50mm, Port Thread: Rc, Guide Pin Diameter: 175 (17.5mm), Guide Pin Shape: D (Diamond Type), Clamp Arm Position: A (Same Direction as Port), Clamping Height: L (Low Type), Shim: None

Lock: None, Body Shape: D (Mounting Tap: 4xM10x1.5, Pin Hole: 2xø8H7), Mounting Surface: A (90° from Port Location), Bore Size: 50mm, Port Thread: Rc, Guide Pin Diameter: 175 (17.5mm), Guide Pin Shape: D (Diamond Type), Clamp Arm Position: A (Same Direction as Port), Clamping Height: L (Low Type), Shim: S (With 3mm Shims), Auto Switch: P4DW--Solid State, 2-color Indication, Magnetic Field

Lock: None, Body Shape: D (Mounting Tap: 4xM10x1.5, Pin Hole: 2xø8H7), Mounting Surface: A (90° from Port Location), Bore Size: 50mm, Port Thread: Rc, Guide Pin Diameter: 175 (17.5mm), Guide Pin Shape: D (Diamond Type), Clamp Arm Position: A (Same Direction as Port), Clamping Height: H (High Type), Shim: None, Auto Switch: P3DWA--Solid State, 2-color Indication, Magnetic Resist., 2 Wire,

Lock: None, Body Shape: D (Mounting Tap: 4xM10x1.5, Pin Hole: 2xø8H7), Mounting Surface: B (Same Side as Port Location), Bore Size: 50mm, Port Thread: Rc, Guide Pin Diameter: 175 (17.5mm), Guide Pin Shape: D (Diamond Type), Clamp Arm Position: A (Same Direction as Port), Clamping Height: L (Low Type), Shim: S (With 3mm Shims), Auto Switch: P3DWA--Solid State, 2-color Indication, Magnetic

°C, Valve, Single, Plug-In, 4/5 PORT SOLENOID VALVE, G40, 175 lb

°C, Valve, Single, Non Plug-In, 4/5 PORT SOLENOID VALVE, 175 lb