Compact Electric Actuator Series LG1

C plane to A plane D plane to B plane 0.1 or less 0.1 or less Bottom mounting Top mounting Maximum work load (N) Repeatable positioning accuracy (mm) Horizontal Mounting position Stroke (mm) Motor output (W) Typical model Maximum speed (mm/s) Individual models Applicable controller model Feed screw 100 200 300 400 500 600 700 800 9001 0001 200 Ground ball screw lead 10mm Rolled ball screw

OMR0031

Controller USB cable Communication 120.3 120.3 mm mm 200 200 mm/s mm/s (type A to mini-B) cable 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN3 PC (PC is prepared by the user.) 20 - 4.4 CN4: Counter connector (option) Connect the controller to the Multi-counter (CEU5) using the counter cable (LATH3-). Refer to section 6.2 Counter plug wiring (P.24).

AC Servo Motor Driver (Pulse input type/Positioning type)

DI-1 Program Description SPN (1000) STA (200) STB (300) MOV (1000) TIM (100) MOV (2000) STOP Speed (Motor speed) Acceleration time constant Deceleration time constant Absolute move command Dwell command time Absolute move command Program end 1000[r/min] 200[ms] 300[ms] 1000[10STMm] 100[ms] 2000[10STMm] a) b) c) d) e) f) b) Acceleration time constant (200ms) c) Deceleration time constant (

HRX-OM-X084

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-9 Connection of RS-232C 3.3 Installation HRR Series 3-18 HRX-OM-X084 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Auto Switch Proper Mounting Position (mm) Auto switch model D-M9 D-M9W D-A9 Bore size A A B B 20 25 32 40 10.5 9.5 6.5 5.5 10.5 9.5 6.5 5.5 11.5 10.5 7.5 6.5 17.5 15.5 13.5 11.5 Note) The above-mentioned value is a guide for auto switch mounting positions for stroke end detection.

MLGC

MXQ MXF MXW MXP MG MGP MGQ MGG MGC MGF CY1 MY1 3.2-9 Series MLGC Proper Mounting Positions of Auto Switch (Stroke End) D-C7/C8 D-H7 D-B5/B6 D-G5/K5 D-B7/B8 D-G7/K7 Setting Positons of Auto Switch Mounting Height of Auto Switch (mm) (mm) Model D-B7/B8 D-B73C D-B80C D-G7/K7 D-K79C D-H7C D-G5/K5 D-G5lW D-K59W D-G5NTL D-B5/B6 D-B59W D-G5BAL D-G59F D-B5/B6 D-G5lW D-K59W D-G5BAL D-G59F D-B7/B8

MGC

MXQ MXF MXW MXP MG MGP MGQ MGG MGC MGF CY1 MY1 3.20-13 Series MGC Auto Switch Proper Mounting Position (Stroke End) D-C7, C8 D-H7 D-B5, B6 D-G5, K5 D-B7, B8 D-G7, K7 Auto Switch Mounting Position Auto Switch Mounting Height (mm) (mm) D-G5, K5 D-G5lW D-K59W D-B5, B6 D-B59W D-G5BAL D-G59F D-B7, B8 D-B73C D-B80C D-G7, K7 D-K79C D-H7C D-G5NTL D-C7, C8 D-H7 D-H7lW D-H7lF D-H7BAL Auto switch D-B7

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

L 285.5 21 273 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 Fitting blank plug KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 L A Dimensions (mm) Applicable fitting d Part number A L D D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32

Rotary Actuator

Single round shaft: ClRA1BT Double shaft (round shaft, with four chamfers): ClRA1BJ Double round shaft: ClRA1BK D D D H H H H UU UU M N 0 0.2 G D L 0 0.2 [mm] [mm] [mm] Size D (g6) H Size D (g6) G H M N UU L Size D (g6) H UU 30 8 25 50 15 36 63 17 41 80 20 50 100 25 60 30 8 6 25 10 8 75 7.8 50 15 11 36 20 15 118 14 63 17 13 41 22 17 139 16 80 20 15 50 25 20 167 19 100 25 19 60 30 25 202 24

CXS

D-A9 (Reed switch) D-F9W D-M9 (Solid state switch) D-M9V, D-F9WV D-A9V (Reed switch) D-M9V D-F9WV (Solid state switch) C3 CXSJ15 to 32 Bore size (mm) C2 Symbol Auto switch model A1 32 0.3 7.1 6.2 3.1 25 0.3 7.1 6.2 0.4 20 0.3 7.1 6.2 1.2 15 0.3 7.1 6.2 2.2 C1 A1 C1 C2 C3 D-F9W, D-M9 D-A9V, D-F9WV D-M9V D-A9 (Reed switch) D-F9W (Solid state switch) D-M9 D-A9V (Reed switch) D-F9WV (Solid state

CXS

D-A9 (Reed switch) D-F9W D-M9 (Solid state switch) D-M9V, D-F9WV D-A9V (Reed switch) D-M9V D-F9WV (Solid state switch) C3 CXSJ15 to 32 Bore size (mm) C2 Symbol Auto switch model A1 32 0.3 7.1 6.2 3.1 25 0.3 7.1 6.2 0.4 20 0.3 7.1 6.2 1.2 15 0.3 7.1 6.2 2.2 C1 A1 C1 C2 C3 D-F9W, D-M9 D-A9V, D-F9WV D-M9V D-A9 (Reed switch) D-F9W (Solid state switch) D-M9 D-A9V (Reed switch) D-F9WV (Solid state

3 Port Solenoid Valve Metal Seal Series VZ200 1

(Values at the initial period) VFN Base mounted JIS Symbol Solenoid Specifications Option Grommet (G), Plug connector (L), Plug connector (M), DIN terminal (D) 100, 200, 24 , 48 , 110 , 220 Electrical entry DC AC 50/60 Hz Coil rated voltage (V) 24, 6 , 12 , 48 Allowable voltage fluctuation (%) 15 to +10% of rated voltage Caution Coil insulation type Class E or equivalent (120C) (2) Temperature

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

It is already built-in to the rectifier circuit. 110 VAC 50/60 Hz [115 VAC 50/60 Hz] 3 4 220 VAC 50/60 Hz [230 VAC 50/60 Hz] Electrical entry D With connector DIN terminal DC specifications of type D and DO is only available with 12 and 24 VDC. Power saving circuit is not available in the case of D or DO type.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

from the D side.

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

0.02 End plate (PBT) (UL94-V0) End plate (PBT) (UL94-V0) 0.01 0.005 50 100 200 500 1000 2000 5000 10 20 Sound absorbing material (PVF) Sound absorbing material (PVF) Air flow (l/min (ANR)) Noise Level (Initial conditions) Case (PBT) (UL94-V0) Case (PBT) (UL94-V0) Hexagonal flats D Hexagonal flats D AN202 to 402 Condition: 0.5 MPa at inlet pressure of solenoid valve Measurement distance:

HEC_W-E

D Constant Setting range : 0.0 to 99.9sec Min. increment : 0.1sec Indicated content : D constant(Ex. : 0.0sec) Function : Sets differential time used for PID control. D C o n s t a n t M O D E < 0 . 0 s e c When 0 is set, this function becomes invalid. 8-8 Operation 7.

HRX-OM-W002

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-8 Connection of RS-232C 3.3 Installation HRR Series 3-18 HRX-OM-W002 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

VDW

Type 200 TI/ TIL VDW20 15A 1 PA Type 300 PAX VCW20 12 01A PB 17-2-77

Thermo-chiller

flow, r Power supply: 200 VAC 7 Standard Type Thermo-chiller Water-cooled 200 V Type Series HRS100/150 RoHS How to Order 100 W 20 HRS Cooling capacity Option 100 10 kW 150 15 kW Cooling method Note) This is a manual fluid fill port that is different from the automatic fluid fill port.

Industrial Filters

C F G D E F G D T F G D F F G E S F G E L F G E T F G G S F G G L Fluid name Applicable element type, material Nominal filtration accuracy (m) Fiber element Polypropylene 10 Industrial water Fiber element Polypropylene 20 Water for cleaning Fiber element Polypropylene 20 Water Fiber element Cotton 10 Fragrances Micromesh element Stainless steel 316 10 Hot water Micromesh element Stainless