VZ100/300/500

DXT201-19-1A Note With screw (For VZ52) Refer to pages 4-6-34 to 4-6-45 for manifold use.

Modular Type Filter Regulator Series AW

45 Symbol Polycarbonate Option Standard Relieving type 0.40 0.32 0.72 0.75 Note 1) Set the inlet pressure 0.05MPa or higher than the set pressure.

Shock Absorbers and Rate Controls

90,000 t5,000 25 45 2,700 15.5 0Eill3.0tllx3.5I.50 3.5 12,170 35,000 5,7i0,000 t5,000 15 45 2,700 20.0 0tffl3.0lllx5 1.50 5.0 t2-170 50,000 8,260,000 15,000 t6 45 1,700 24.0 0ff{I3.011x5.51.50 6.5 l2.tI0 65,00{ 10,750,000i5,000 2,700 30.0 0tl{l4.0lllx2 2.00 2.0 r2.170 34,000 r3,300.00025,000 50 0 ) 4,800 33.0 0tl{14.0l|l4 2.00 4.0 l2-170 68,000 16,000.000 25,000 35 65 4,800 40.0 0fftt4.0itx5

LEC-OM02904

(1) (1) (1) 46 (1) (1) (1) 47 50 1 (1) (1) (1) 51 2 (1) (1) (1) 52 82 /1 (2) 8A USB 8E USB 888 1. 30 2. 8 2 8 8.2 (25) 30 (30) (45) (46) 1(50) 2(51) OFFONCPU 8.1 (ALM) No.

Vacuum

Selection Graph 5: Adsorolion resoonse time 90 63 45 *, 27 < E ' " E 9 9 . 0 E --i 6.3 I ;4.s x \ ! 1 2 7 Eiector size determination by calculation: '1 .

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

LQ1L33-F LQ1L32-F LQ1L31-F LQ1L24-F LQ1L23-F LQ1L22-F LQ1L21-F VC 18.5 19.5 1/8" 16.5 14 15 27 VDW 21.5 22.5 1/4" L2 M 1/4 VQ 21.5 1/4" 23 23 VX2 17 20 35 (E) H 25 3/8" 25 L1 VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Class 2 to 5 25 VX3 3/8" 29 28 21 24 45

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

wire length) 60<61> 49<52.5> R1 R2 R1 R2 P P Cover diameter 1.5 Cross section 0.23mm2 < >: AC < >: AC 1.12-39 VQZ1000/2000/3000 Base Mounted Dimensions: VQZ2000 2 position single 0 1 01 02 Grommet(G): VQZ215 (R)lGl 300 84.5 (Lead wire length) 2-4.5Mounting holes 54.5 24 9 9 R4 13 A 4 B 2 15 34 SMC Cover diameter 1.6 Cross section 0.34mm2 R2 R1 5 1 P 3 Manual override 56 48 4 (54.5) 51 45

ZX

Other caution Caution It might not be possible to successfully pick a workpiece if a picking nozzle or a picking pad that is out of the applicable range is used. 13-2-45 45 Vacuum pad connection V port Series ZX Valve Unit: Type K1 Pilot exhaust PE port Vacuum switch (ZSE2) Vacuum switch (ZSE3) Configuration and combination Valve unit (K1) + Vacuum switch valve air supply PS port Vacuum supply

Vacuum

Selection Graph 5: Adsorolion resoonse time 90 63 45 *, 27 < E ' " E 9 9 . 0 E --i 6.3 I ;4.s x \ ! 1 2 7 Eiector size determination by calculation: '1 .

Specification: 11 (Clean Series, Vacuum Suction Type), Bearing Type: L (Ball Bushing Bearing), Bore Size: 15mm, Port Type: M5x0.8: 6-20mm Bore; Rc: 25-32mm Bore, Stroke: 40mm, Auto Switch: Y59A--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal

Bore Size: 10mm, Thread: ø6-ø20 Bore: M Thread; ø25,ø32 Bore: Rc 1/8, Stroke: 20mm, Auto Switch: Y59A--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 0.5M, Lead Wire or Prewired Connector: L (3m), Number: S (1 pc.)

Bore Size: 15mm, Thread: ø6-ø20 Bore: M Thread; ø25,ø32 Bore: Rc 1/8, Stroke: 100mm, Auto Switch: Y59A--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 0.5M

Bore Size: 10mm, Thread: ø6-ø20 Bore: M Thread; ø25,ø32 Bore: Rc 1/8, Stroke: 20mm, Auto Switch: Y59A--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 0.5M

Bore Size: 10mm, Thread: ø6-ø20 Bore: M Thread; ø25,ø32 Bore: Rc 1/8, Stroke: 20mm, Auto Switch: Y59A--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 0.5M, Lead Wire or Prewired Connector: L (3m)

Bore Size: 10mm, Thread: ø6-ø20 Bore: M Thread; ø25,ø32 Bore: Rc 1/8, Stroke: 35mm, Auto Switch: Y59A--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 0.5M

Bore Size: 10mm, Thread: ø6-ø20 Bore: M Thread; ø25,ø32 Bore: Rc 1/8, Stroke: 15mm, Auto Switch: Y59A--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 0.5M, Lead Wire or Prewired Connector: 0.5m [Or None in the Case of No Switch], Number: S (1 pc.)

Bore Size: 10mm, Thread: ø6-ø20 Bore: M Thread; ø25,ø32 Bore: Rc 1/8, Stroke: 30mm, Auto Switch: Y59A--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 0.5M, Lead Wire or Prewired Connector: L (3m)

Bore Size: 10mm, Thread: ø6-ø20 Bore: M Thread; ø25,ø32 Bore: Rc 1/8, Stroke: 40mm, Auto Switch: Y59A--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 0.5M

Bore Size: 20mm, Thread: ø6-ø20 Bore: M Thread; ø25,ø32 Bore: Rc 1/8, Stroke: 25mm, Auto Switch: Y59A--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 0.5M, Lead Wire or Prewired Connector: L (3m)

Bore Size: 20mm, Thread: ø6-ø20 Bore: M Thread; ø25,ø32 Bore: Rc 1/8, Stroke: 50mm, Auto Switch: Y59A--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 0.5M, Lead Wire or Prewired Connector: L (3m)