Aluminum High Vacuum Angle Valve

D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m. Add L to the end of the part number when 3 m is desired, M when 1 m, and Z when 5 m. Example) -M9NL !

2–4

Minimum Auto Switch Mounting Stroke (mm) (mm) Auto switch model Auto switch model D-F7W Bore size (mm) D-A9V D-A9 D-F9W D-F9V D-F9WV D-M9 D-A7 D-F9BAL D-A7H D-A80H D-F7 Number of auto switch D-J79W D-A8 D-F7V D-J79C D-F7WV Bore size (mm) D-A79W D-F7LF D-P5DW D-F7BAL 5 15 15 10 2 pcs. 10 10 25 D-A73C D-A80C D-F7BAVL 12 to 25 Number of auto switch D-F7NT D-J79 5 15 15 5 1 ps. 10 10 25 D-F79F

Swivels

16-12 1-5/16-12 113.0 mm 91.0 mm 63.0 mm 41.3 mm UN/-2B UN-2B A B C D Part Number A B C D Wrench Flats Dia.

ZP

N 10 D Model A B C D E Y q Pad dia.

2 Phase Stepper Motor/Without Motor Brake Series LXP

E 3.5 2 5 1 34 44 52 Section F detail (Scale: 2/1) 120 90 4-M6 x 1 Section C 30 D Refer to page 300 for mounting.

CXWM/CXWL

and D-A8. ( mm) Note 1) The dimensions show D-A7 and D-A8. ( mm) Ht 15 Hs 12.5 Hw 23 Auto switch model Auto switch model D-A7, D-A80 D-F7, D-J79, D-J79W, D-F7W, D-F79F, D-F7BAL, D-F7NTL D-A7H, D-A80H D-A73C, D-A80C D-F7V, D-F7WV, D-F7BAV D-J79C Hv 10.5 Ht 15 Hw 23 D-A7, D-A80 D-F7, D-J79, D-J79W, D-F7W, D-F79F, D-F7BAL, D-F7NTL D-A7H, D-A80H D-A73C, D-A80C D-F7V, D-F7WV, D-F7BAV D-J79C 15

Air Slide Table

Reed auto switch: D-A9, D-A9V Solid state auto switch: D-M9(A), D-M9W D-M9 Compact auto switch D-A9 5 Air Slide Table MXQ Series Functional Options ' With buffer mechanism Protects workpieces and tools by eliminating impact at the extension stroke end Buffer unit is auto switch capable.

7ND9071en

T6...T4 Gc II 3 D Ex tc IIIC T90 C Dc II 3 D Ex ic IIIC T90 C...T120 C Dc Ui 24 V II 3 G Ex ic IIC T6...T4 Gc II 3 D Ex tc IIIC T90 C Dc II 3 D Ex ic IIIC T90 C...T120 C Dc Ui 32 V, Ii 380 mA, Pi 5.32 W, Ci 5 nF, Li 10 H.

CL

(#1+#5+#11) CLAC50SCLA50, #5 (#1+#5+#11) CLAC63SCLA63, #5 (#1+#5+#11) CLAC80SCLA80, #5 (#1+#5+#11) CLAC100SCLA100, #5 (#1+#5+#11) 3.1-40 Fine Lock Cylinder/Double Acting Single Rod Series CLA Double Clevis/CLAD CL MLGC CNA CB CV/MVG (mm) Stroke range (mm) Bore (mm) B B1 BN CX BP A BQ C GB CD GC CZ GD D GL E GR F H1 GA AL CXW W/o rod boot W/ rod boot +0.3 +0.1 40 50 63 80 100 60 70 86 102

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

) (in) D-B5 D-B6 D-C7 D-C80 D-C73C D-C80C D-B5 D-B6 D-C7 D-C80 D-C73C D-C80C D-B59W D-H7 D-H7C D-H7W D-H7BAL D-H7NF D-B59W D-H7 D-H7C D-H7W D-H7BAL D-H7NF D-H7LF D-G59 D-K59 D-H7LF D-G59 D-K59 Auto switch model Auto switch model B 0.42 0.31 0.52 0.51 0.56 0.83 B 0.86 0.59 0.76 0.85 0.75 1.20 A 0.94 0.78 1.00 1.23 1.13 1.58 A 0.94 0.78 1.00 1.23 1.13 1.58 B 0.50 0.39 0.60 0.59 0.64 0.91 B

Fieldbus System

Note 5) When Without SI Unit (SD60) is specified, With DIN rail (D) cannot be selected.

VQ5000

VQ 5 0 0 5 1 D-sub connector kit with cable (3 m) Series Manual override 5 VQ5000 Non-locking push type (Tool required) Locking type (Tool required) Nil B VV5Q51-0503FD2 1 set VQ5100-5 2 sets VQ5200-5 2 sets VQ5300-5 1 set Manifold base part no. Valve part no. (Stations 1 and 2) Valve part no. (Stations 3 and 4) Valve part no.

Table of Contents

Minimum Stroke for Auto Switch Mounting (mm) Applicable auto switch No. of auto switches mounted D-A9, D-A9V D-M9, D-M9V D-F9W, D-F9WV 5 5 5 1 pc. 10 5 10 2 pcs.

Vacuum Pad

> > > > > > /5 /5 Gasoline/Gas oil /5 > > /5 /5 Benzene/Toluene > > > > 5 5/> > > > > > Alcohol /5 /5 /5 /5 /5 Ether > > Ketone (MEK) /5 /5 /5 5 5 Ethyl acetate > > > > > > 5 > > Water /5 /5 5/> > > Organic acid Organic acid of high concentration Organic acid of low concentration 5/> 5/> > > 5 5 > > > > > > 5 > > > > > > > Strong alkali > > > > > > > Weak alkali > > = Excellent -

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

12.7 11 3 28.1 [35.1] P R1 15 R2 M5 x 0.8 (P, R1, R2 port) 21 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors L plug connector (L): 10-SYJ5 23-L-M5 3 4 5 M plug connector (M): 10-SYJ5 23-M-M5 3 4 5 DIN terminal (D, Y): 10-SYJ5 23-M5 M8 connector (WO): 10-SYJ5 23-WO-M5 3 4 5 3 4 5 D Y Approx. 300 (Lead wire length) Applicable

CL

MLU 40 50 63 80 100 125 140 160 Bore size (mm) Bore size (mm) Auto switch model CA-L06 CA-L05 CA-L10 CA-L04 CA-L08 Foot style Rod side 40 50 63 80 100 125 140 160 ML1C CS1-L12 CS1-L14 CS1-L16 D-A5/A6/A59W D-F5/J5/F5NTL D-F5W/J59W D-F5BAL/F59F D-A3/A44 D-G39/K39 D-B5/B6/B59W D-G5/K59/G5BAL D-G5W/K59W D-G59F/G5NTL D-A3C/A44C D-G39C/K39C D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W D-Y7WV D-Y7BAL CA1

CM2

D-G39A D-K39A D-A44A D-H7lW D-H7BAL D-H7lF D-C73C D-C80C D-B5 D-B6 D-H7l D-H7C D-B59W D-G5NTL Bore 20 25 32 40 A B 5(3) 5(3) 6(4) 11 A 6(4) 6(4) 7(5) 12 B 0(0) 0(0) 0.5(0) 5.5 A 0.5(0) 0.5(0) 1.5(0) 6.5 B 3(1) 3(1) 4(2) 9 A 4(2) 4(2) 5(3) 10 Hs 69.5 72 75.5 79.5 B 6(4) 6(4) 7(5) 12 Hs 60 62.5 66 70 A 7(5) 7(5) 8(6) 13 Hs 25 27.5 31 35 B 0(0) 0(0) 1(0) 6 Hs 22.5 25 28.5 32.5 A 1(0) 1(0) 2

Cylinder with Lock

Operating Range [mm] D-P3DWA> Auto switch model Bore size 32 40 50 63 80 100 D-M9/M9V D-M9W/M9WV D-M9A/M9AV 4 4.5 4.5 4.5 5 6 Switch mounting bolt1 D-Y59/Y69 D-Y7P/Y7V D-Y7W/Y7WV D-Y7BA 5.5 5.5 7 7.5 6.5 5.5 D-F5/J59 D-F5W/J59W D-F5BA/F5NT D-F59F 3.5 4 4 4.5 4.5 4.5 D-G39/K39 9 9 9 10 10 11 D-P3DWA 3 4.5 4.5 5 5 5.5 D-P4DW 4 4 4 4.5 4 4.5 D-A9/A9V 7 7.5 8.5 9.5 9.5

LEC-OM07605CN

(1) LECSS2-T P+DP+CG3G4 G3G4 P+D P+D P P+ C C G3 D (3) (1) G4 5m 5 m (12) 1.

NCA1

X B 5 S T D. R O D T H R E A D S T D.