Series VCS ) 4 1/4 (8A) 3/8 (10A) 1/2 (15A) 1/4: 0.42 (0.93) 3/8: 0.40 (0.88) 1/2: 0.49 (1.08) 3 VCS3 14.4 (0.8) 0.5 (72) 5 1.0 (10) 24.8 (1.38) 0.2 (29) 7 145 (1450) 37.8 (2.10) 0.1 (14) 10 6.3 (0.35) 1.0 (145) 3 1/4 (8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) 10.8 (0.60) 1/4: 0.58 (1.28) 3/8: 0.55 (1.21) 1/2: 0.62 (1.37) 3/4: 0.78 (1.72) 1.0 (145) 4 15.3 (0.85) 0.7 (101) 5 1.0 (10) 4 VCS4 24.8 (1.38) 0.3 (
Compact Guide Cylinder Series MGC Front Face Mounting Flange/With Rear Plate MGClFl-l-R CL MLGC CNA CB CV/MVG CXW CXS CXT MX MXU MXS MXQ MXF MXW MXP Bore (mm) Stroke range (mm) MG J I B AP AO AN AM AL AK AJ AI AH AG AB AA A N M L K 20 25 32 40 50 75, 100, 125, 150, 200 44 25 106 22 M6 110 55 9 6.6 90 75 120 105 13 11 84 25 38 80 60 MGP 52 30 120 27 M8 125 65 9 9 100 84 136 120 13 15 89 32
Also, BBA2 is included when an auto switch alone is shipped.
Do not use in an atmosphere of corrosive gases, chemicals, sea water, water or water vapor or in an environment where such substances may adhere. 2. Provide shading in an environment where the product is exposed to the sunlight. 3. Do not use in an environment where a heat source is at a close distance. 4. Do not use in an environment where static electricity is a problem.
Y axis/Z axis Axis type Ball screw specifications Rolled ball screw (mm) 15, lead 5 15, lead 10 15, lead 20 16, lead 32 Symbol H A C J Y axis motor in-line mount Z axis motor in-line mount Z axis motor side mount Y ZB ZC 1 2 Stroke(mm) 1) Used for X axis in double and triple axis P&P. 2) Used for Y axis in double and triple axis P&P. 100 150 10 15 Motor specifications 950 1000 95 A0 Brake
10 10 90 42 27 45 31 49 190 10 10 80 35 35 62 39 66 190 10 10 65 30 39 68 43 72 190 10 10 50 24 49 83 53 87 Operating angle m: Value of the operating range Lm of a single auto switch converted to an axial rotation angle.
-01 G43-2-01 G43-4-01 G43-10-01 G43-10-01 G43-4-01 G43-10-01 Accuracy + 3% (full span) Courtesy of Steven Engineering, Inc. !
(packaged together) 50 80 650 F 40 550 G 10 300 H 4 200 J Filter (IN port) Nil Without filter F With filter Note) 100 Note) Flow reduction rate 50 L/min: 5% or less 100 L/min: 5 to 10% 150 L/min: 10 to 15% 80 600 K 40 500 L 10 250 M 4 150 150 Specifications Flow rate (L/min) [at 0.25 MPa] 50 100 150 Power consumption (W) 80 40 10 4 80 40 10 4 80 40 10 4 Type of actuation 2-position 2 port
Bore size/Stroke (mm) Bore size 6 10 15 20 25 32 Standard strokes 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 Applicable Auto Switches/Refer to page 15 for detailed auto switch specifications.
Applicable cable O.D. 6 to 8 Light/surge voltage suppressor (For DZ) Manual override (Non-locking push type) E Pilot port 12(P1), 10(P2) Port size: refer to table below C K (External pilot solenoid) P1 P2 J J B (Air operated) D 4 x 2 x 18 mouting hole 32 H F A Applicable flange Port 1, 2 Pilot port 12(P1), 10(P2) A Model B C D E F H J K Note) VNC5-32F VNC6-40F VNC7-50F 1 8 1 4 1 4 32 40
BDL (108.5) 10 4.6 10 34.3 101 74.5 35 5.5 28.1 12.7 ADDRESS No.
Applicable model Accessory AR10 AR20 AR25 AR30 AR40 AR40-06 AR50 AR60 AR10P-270AS AR20P-270AS AR25P-270AS AR30P-270AS AR40P-270AS AR40P-270AS Bracket assembly Note 1) AR50P-270AS Note 5) AR50P-270AS Note 5) Note 6) Note 6) AR10P-260S AR20P-260S AR25P-260S AR30P-260S AR40P-260S AR40P-260S Set nut G36-10-01 G36-10-01 G36-10-01 G46-10-02 G46-10-02 G46-10-02 G46-10-02 G27-10-R1 Round 1MPa Note
2 P (finger closing port) G I Auto switch mounting groove positions (2 locations) MHS2-16D MHS2-20D MHS2-25D 5 6.5 5 3 24 5 3 24 6 3 5 4.5 24 4 4 4 33 33 33 (mm) I 4 5 5 Model MHS2-16D MHS2-20D MHS2-25D G 25 27 28 FZ 3 3 5 FY 11 13 14.5 FX 12.5 14.5 17 CB 11 13 15 EC 10 12 14 EO 14 16 20 NB 5h9 6h9 6h9 DC 30 36 42 NA 8 10 12 DO 34 40 48 K 4 5 6 B 30 36 42 Q 6 7 8 J 10 12 14 AA 35 38 40 AB
Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).
Flow setting (3 step setting mode) Function setting (Function selection mode) Other functions [1000] 1000 L/min (PFMB7202) [F 1] OUT2 over current error The switch output (OUT2) load current has exceeded 80 mA. [ 10] 10 L/min (PFMB7201) [ 25] 25 L/min (PFMB7501) Do not use the product for flammable fluid. Fire or explosion can result.
A 40 44 B 20 22 C 9 10 D 22 24 E 59 66 F 33 34 G 24 25 H 30 40 J 36 46 K 6 9 M 45.5 50.5 N 69 76 VVXA31 VVXA32 17-3-108
20 CY 15 10 MG 0.1 10 CX 0.1 6 6 D-X 0.03 5 5 10 20 30 40 50 100 10 20 30 40 50 100 20Overhang L (mm) Overhang L (mm) Graph (4) V = Up to 800 mm/s (Up to 700 mm/s for 15, 20) Data CXSJM CXSJL Graph (3) V = Up to 600 mm/s CXSJM CXSJL 20 32 0.5 25 1 15 20 0.5 15 Weight m (kg) 10 0.1 10 0.1 6 6 10 20 30 40 50 100 5 10 20 30 40 50 100 5 Overhang L (mm) Overhang L (mm) Note) V = 700 mm/s for 15
10 to 32 Graph (3) V = 200 mm/s Graph (4) V = 400 mm/s 4 20 3 10 32 5 25 1 Weight m (kg) Weight m (kg) 32 20 25 0.5 1 20 15 0.5 15 10 CXSM CXSL CXSM CXSL 10 5 0.1 5 0.1 10 20 30 40 50 100 10 20 30 40 50 100 Overhang l (mm) Overhang l (mm) Graph (5) V = 600 mm/s Graph (6) V = 700 mm/s (800 mm/s for 10) 2 0.6 20 32 25 0.4 1 15 20 Weight m (kg) Weight m (kg) 0.5 15 0.2 10 10 CXSM CXSL CXSM
190 13 13 16 16 19 55 66 72 92 98 63 76 76 90 90 7.5 4 4 5 5 63 76 76 90 90 10 10 10 10 10 AMF150 AMF250 1/2 3/8, 1/2 AMF350 3/4 AMF150SAME, #1 AMF250SAME, #2 AMF350SAME, #3 4.6-31 Odor Removal Filter Series AMF Dimensions: AMF450 to AMF850 HAl AT IDl AMG AFF AMl M Dimensions with mounting bracket Model Port size (Nominal size B) A H B C D E F G I 221 J 25 K 10 L 14 N 90 O 55 P 110 Q 50
Option: Pressure gauge G15-10-01 How to Order NARM2000-4A2-N01G G15 P10 01 Symbol Units Nil MPa P PSI Common IN Individual IN IN M5 x 0.8 .39 (10) Max. pressure indication 10 150PSI (1.0MPa) .59 (15) IN OUT OUT *Pressure gauge for 30psig (0.2MPa) is not available.