Cooling Capacity: 018 (Cooling Capacity: 1700/1900W, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: Rc, Option: BJ (B + J)

Cooling Capacity: 018 (Cooling Capacity: 1700/1900W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: F (G w/PT-G Conversion Fitting Set), Option: BT (B + T)

Cooling Capacity: 018 (Cooling Capacity: 1700/1900W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: F (G w/PT-G Conversion Fitting Set), Option: M [Applicable to DI Water (Deionized Water) Piping]

1

6) Note 4) CKQ D-A7lH D-A80H 5 10 15 + 15 (n 2) (n = 4, 6) Note 4) CKZ2N D-A79W 10 15 10 + 15 (n 2) (n = 4, 6) Note 4) WRF Note 3) When n is an odd number, an even number that is one larger than this odd number is used for the calculation.

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H Caution 3.3 L 40 10 H Do not operate with the stroke adjusting unit fixed in an intermediate position.

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When stopping at an intermediate point, this cylinder first moves the piston past the intermediate point and then returns it. Confirm this distance of an extra travel (overrun) in Graph 3 on page 10-10-7 and use the cylinder in applications in which the overrun will not cause any problem. Dedicated seal kit: Refer to "Construction" on page 10-10-9. 3.

Part Number Description: 100MM CQ2 PART    Product Line: A   Product Line Description: ACTUATOR    Family Code: 515   Family Description: CQ2 COMPACT CYLINDER    Class Code: S1    Click here to report information errorImage shown may not match exact part number

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Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

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Note 1) Only type E (Reed switch) is applicable as an auto switch when mounting a housing of 10.

Air Slide Table

10 10 10 10 10 20 20 20 20 20 20 30 30 30 30 30 30 40 40 40 40 40 40 Stroke 50 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 11 150 150 Low thrust with high rigidity type MXQB 10 10 10 10 10 20 20 20 20 20 30 30 30 30 30 40 40 40 40 40 Stroke 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 53 150 150 Single side-ported type MXQC 10 10 20 20 30 30 Stroke

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Air suction filter 13-10-1 Series ZFA Using an ejector with a 2-stage nozzle, the ejector system can be used most efficiently. Air suction filter 13-10-4 Prevents problems related to vacuum circuits or airborne contaminants.

SY

The minimum order quantity is 10 pieces. Order in multiples of 10.

ZP

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

ZP

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

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A part z1 m1 = 20 x 3 x 4 x 2.7 x 10-6 = 6.48 x 10-4 (kg) Weight calculation m1 = a x b x c x Relative density IZ1 Inertial moment around Z1 axis IZ1 = {m1 (a2 + b2) / 12} x 10-6 = {6.48 x 10-4 x (202 + 32)/12} x 10-6 = 2.21 x 10-8 (kg.m2) = 2.21 x 10-8 + 6.48 x 10-4 x 16.42 x 10-6 = 0.20 x 10-6 (kg.m2) IA Inertial moment around Z axis IA =IZ1 + m1r12 x 10-6 z f2 z2 B part r2 = 23.5(mm)

Electric Actuator/Slider Type

Note 10) For an actuator with lock, add the power consumption for the lock.

CY1

an external stopper, etc.

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The drain pipe must have a minimum pipe bore of 10 mm, and a maximum length of 5 m (when installing an optional auto-drain).

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Series CY1L Size: 6, 10, 15, 20, 25, 32, 40 To ensure a permanent path Stable operation is possible, even with an eccentric load, by using ball bushings. When smoother operation is required, even with an eccentric load. Series CY1H Size: 10, 15, 20, 25, 32 The use of a linear guide facilitates a large load, large moment and high precision.

SQ1000/2000

Also, when wiring is not required for a station that is to be mounted with an option such as an individual SUP spacer, enter an "X".