10

A water resistant type cylinder is recommended for use in an environment which requires water resistance. Lead wire length symbols: 0.5 m Nil (Example) M9NW 3 m L (Example) M9NWL 1 m M (Example) M9NWM 5 m Z (Example) M9NWZ Solid state auto switches marked with are produced upon receipt of order.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

For suction verification For leak testers Workpiece Leakage 3 2-Color Display Digital Flow Switch PF2M7(-L) Series IO-Link Compatible PF2M7mm-m-Lm-mmm p. 10 Supports the IO-Link communication protocol IO-Link is an open communication interface technology between the sensor/ actuator and the I/O terminal that is an international standard: IEC61131-9.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Q1 = M L2 = L2 + (3 x P) 3. L1 + (3 x P) L2 + (3 x P) 4. L2 = Q2 = M L1 = 5. Q2 = M 6.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

406 Series 10-SZ3000 PC Wiring System Plug-in Type Type 60GD [Option] An order cannot be placed with only the manifold part no.

LEF-OM002xx

10 to 300 701800 Note2) Stroke 30 to 930 20 to 620 10 to 300 801900 Speed range [mm/s] 30 to 780 20 to 520 10 to 250 9011000 30 to 660 20 to 440 10 to 220 10011100 Actuator specification 30 to 570 20 to 380 10 to 190 11011200 20 to 500 30 to 500 10 to 250 1000 Driver type LECPA Note2) Stroke 30 to 500 20 to 440 10 to 220 Speed 10011100 range [mm/s] 30 to 500 20 to 380 10 to 190 11011200

Slider Type Ball Screw Drive/11-LEFS Series

For details about fixing method, refer to Wiring/Cables in the Electric Actuators Precautions. o Actuator cable length Nil Without cable 1 1.5 m 3 3 m 5 5 m 8 8 m* LER Nil: Left LEH LEY -X5 !0 Controller/Driver type*1 A 10 m* 11LEFS 11LEFS C 20 m* !

Lightweight and Compact

(Front 1 m/Height 1 m)5 dB (A) 73 75 Alarm code list stickers 2 pcs.

Possible to transfer a workpiece at low-speed.

L1 = L1 = Q1 = M Q1 = M Q1 = M Q1 = M L1 = L1 = Q2 = M Q2 = M L2 = L2 = Q1 Q1 L1 L1 Size 10, 15 Size 20, 30, 40 Size 10, 15 Size 20, 30, 40 Size 10, 15 Size 20, 30, 40 (mm) (mm) (mm) Size Size Size 10 15 20 30 40 10 15 20 30 40 10 15 20 30 40 Thread Thread Thread M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 2.5 2.5 3.3 2.5 3.3 3.3

VQ4000

Note Conductor resistance /km, 20C 65 or less 1.5 m 3 m 5 m AXT100-DS25-015 Cable 25 cores x 24AWG 10 AXT100-DS25-030 Voltage limit VAC, 1 min. 1000 AXT100-DS25-050 L For other commercial connectors, use a 25 pins type with female connector conforming to MIL-C-24308. Note) The minimum bending radius for D-sub connector cables is 20 mm.

Rotary Table

deg) m(deg) 1 190 20.9 49 10 16.9 20 10 2 190 22.8 50 10 18.8 20 10 3 190 24.4 47 10 20.4 15 10 7 190 28.7 31 10 24.7 15 10 Operating range m: The value in which the auto switch operating range Lm is converted to axis rotating value.

MXS

My=1 X 9.8(10+30)/1000=0.39 A3=30 M=W(Ln+An)/1000 Corrected value for center position distance of moment An: Table 3 May=1 X 1 X 15.9=15.9 Mymax=15.9 K=1 g=1 a2=0.39/15.9=0.025 Mar=15.9(Same value as May) Calculate allowable static moment Ma (Nm) Ma=K g Mmax Work mounting coeficient K: Fig.3 Allowable moment coeficient g: Graph 2 Max. allowable moment Mmax: Table 4 a2=M / Ma Calculate load

HRX-OM-Y098

to 40 Cooling capacity2 kW 9 1 8 19 1 8 26 1 8 Heating capacity3 kW 1.5 1 4.5 1 6.5 1 Temperature stability 4 C CH1 0.1 CH2 0.5 Rated flow rate (Outlet) L/min 45 10 45 10 125 10 (0.43MPa) (0.45MPa) (0.45MPa) (0.45MPa) (0.45MPa) (0.45MPa) Pump capacity Maximum flow rate L/min 120 16 *12 130 16 *12 180 16 *12 Maximum lifting height m 50 49 55 49 68 49 0.10 0.10 0.10 0.10 0.10 0.10 Settable

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

rail 2 12 2-M2 x 0.4 depth 2.2 For rail mounting (mm) F Model AA Z S M J H MXP6-5 2 45 5 37 33.5 38 25 MXP6-10 9.5 60 10 47 48.5 53 35 8-8-15 15 Series MXP Dimensions: MXP10 2-M3 x 0.5, depth 3 Z 3 Metal stopper 2-M3 x 0.5, depth 5 V K 5 4 G Max. 5.5 Max. 3.5 N 20 M Stroke: S MXP10-10 A Piping port Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main

Vacuum Unit

6 p. 31 3 30 m ZK2 SC3 4 A Body gasket1 (10 pcs. per set) Construction !1 p. 31 Applicable nozzle size ZK2 BG5 A 4 For nozzle size 07, 10 6 For nozzle size 12, 15 1 Applicable type Release lever (10 pcs. per set) Construction !

33

Return port 0.02 0.02 2 2 0.00 0.00 0 2 4 6 8 10 12 14 16 0 2 4 6 8 10 12 14 16 Circulating fluid flow rate [L/min] Circulating fluid flow rate [L/min] Option (-T): High Pressure Pump Mounted HRSE -A-10-T 012 018 012 018 024 Option (-T): High Pressure Pump Mounted HRSE -A-20/23-T 0.3 0.3 Circulating fluid pressure [MPa] Circulating fluid pressure [MPa] Pump head [m] Pump head [m] 0.2 0.2

HRX-OM-W060

Pressure [MPa] 0.4 40 0.3 30 Usable flow rate range 0.2 20 Circulating fluid return 0.1 10 0 0 0 10 20 30 40 50 60 70 80 90 100 110 120 Circulating fluid flow [L/min] Fig. 8-9 Pump capacity(HRL100-A-20 CH1) 8.5.2 HRL200A20 CH1 0.6 60 0.5 50 Circulating fluid outlet Lifting head [m] Pressure [MPa] 0.4 40 0.3 30 Usable flow rate range 0.2 20 Circulating fluid return 0.1 10 0 0 0 10 20 30 40

VQZ1000/2000/3000

Manual Override How to Use L/M Plug Connector Caution Warning Attaching and detaching connectors Without an electric signal for the solenoid valve the manual override is used for switching the main valve. Locking type (Tool required) is available as an option.

CQS

10 12 16 20 5 6.5 8 10 14 15 18 20 7 10 12 14 4 4 5 5 5 5 8 10 * Refer to P.2.3-18 for detail of the rod end nut and mounting brackets.

CC

E101. 10-17-16

CNA

weight: m (kg) 63 50 50 40 30 50 40 30 CL1 40 20 20 MLGC 10 10 CNG 5 4 3 5 4 3 MNB 2 2 CNA 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 CNS Maximum speed: V (mm/s) Maximum speed: V (mm/s) CLS Graph (6) Graph (3) 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa 1000 1000 CLQ 100 500 400 300 500 400 300 80 MLGP 100 63 200 200 50 40 80 RLQ Load weight: m (kg) Load weight: m (kg) 100 100 63