Vacuum System Peripherals: Series ZM 13-14-20 4.
Calculating Acceleration/deceleration conversion example using an actuator with a 8 [mm] lead with an acceleration of 3000[mm/sec2].
External Connection (P.20) for wiring. Refer to section 17.
Cautions for use in an interlock circuit When an auto switch is used for an interlock signal requiring high reliability, devise a double interlock system to avoid trouble by providing a mechanical protection function, or by also using another switch (sensor) together with the auto switch. Also perform periodic maintenance inspections and confirm proper operation. 9.
S + Stroke FX FZ Relief port 20, 25 F T H ZZ + Stroke Z + Stroke Standard port 20 to 32 FY 45 4-FD Relief port (32, 40) 40 (mm) FX 66 52 40 40 34 B 10.7 7.5 7.5 7.5 DL FT 22 17 17 13 B1 FD F AL FZ G H1 H2 E C2 K I HC H FY D B2 A MM Bore size 0 41 32 32 26 20-0.033 40 32 25 20 60 60 60 4 4 4 16 13 13 13 7 7 7 5 24 46.5 37.5 33.5 28 21 19.5 19.5 15.5 24 22 22 18 14 12 10 8 47.3 37 37 30 10
Cautions for use in an interlock circuit When an auto switch is used for an interlock signal requiring high reliability, devise a double interlock system to avoid trouble by providing a mechanical protection function, or by also using another switch (sensor) together with the auto switch. Also perform periodic maintenance inspections and confirm proper operation. 9.
rate measurement range l/min Integrated type Display unit Display unit (4ch) Sensor unit PF2W504(T) PF2W520(T) PF2W540(T) PF2W511 PF2W704(T) PF2W720(T) PF2W740(T) PF2W711 0.5 to 4 2 to 16 5 to 40 10 to 100 PF2W30 PF2W20 PF2W33 For Deionized Water and Chemicals For Deionized Water and Chemicals P. 44 Remote type Flow rate measurement range l/min Display unit Display unit (4ch) Sensor unit
5 q t t r u u i i r y y w !6 w Meter-in type Meter-out type Meter-out type Meter-in type Seal method: Face seal For G thread e o !3 !1 !0 !4 !2 !5 q t u i r y !7 w Meter-in type Meter-out type Component Parts No.
lhe sme a th drawings bdow Stroke adjusting shock absorber P s t H EEI o 6ll Bore size @ZRS nQ n32-tlllB 2.18 20 il 120.5 + 2 slrokes Bore size O4O, 50/RSfOlS-nLJB F 2-1tA o *14 *13.5 o2O > H 4dj!
lhe sme a th drawings bdow Stroke adjusting shock absorber P s t H EEI o 6ll Bore size @ZRS nQ n32-tlllB 2.18 20 il 120.5 + 2 slrokes Bore size O4O, 50/RSfOlS-nLJB F 2-1tA o *14 *13.5 o2O > H 4dj!
25, 32 40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16, 20 25, 32, 40 50, 63, 80 100 10, 16 20 25, 32 12, 16 20, 25 32, 40 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 20, 25 32, 40 50, 63 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50mm/s Piston speed Rubber
No 3000G 45-089 Stripper for round cable (2.0) can be used for a 2-wire type cable. 181 Applicable auto switch list Cylinder CDQSX CDBM2 CDM2X CDQ2X CDQS CDM2 CDG1 CDQ2 CDA2 CXSJ CDJ2 MGP MXQ Cylinder series MGF MXP MXS CDU REC CXS CYP CUJ 40/63/100 32 to 100 20 to 40 20 to 40 20 to 63 40 to 63 12 to 25 20 to 40 12 to 63 12 to 25 32 to 63 20 to 40 80/100 6 to 10 6 to 25 6 to 32 6 to 16 6
The switch does not have an explosion proof construction. If it is used in an environment where explosive gases are used, it may cause an explosive disaster. Therefore, never use it in such an environment. 2. Observe the specified fluid and ambient tempera ture range. The operating fluid temperature range is 0 to 85C, and ambient temperature range is 0 to 50C.
. 5 7 20 X20 Same as standard.
It converts air pressure to an equivalent hydraulic pressure, and this hydraulic pressure is used for operating an actuator, thus solving the problem that is associated with the compression characteristics of air.
Spatter cover Spatter cover Plug Prevention of tube releasing unconformity due to an inside intrusion or adhesion of the spatter. Prevention of tube releasing unconformity due to an inside intrusion or adhesion of the spatter. P. 5 KR P. 5 KRC1 KRP P. 5 Use to plug unused One-touch fittings.
Do not use in an environment where oil and chemicals are used. Maintenance Caution 1. Perform periodic inspection. 249
X 500 500 500 500 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 4 8 12 16 20 24 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 Mey 1500 1500 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 1000 1000 1000 1000 Wall L5 Y 500 500 500 500 0 0 0 0 4 8 12 16 20 24 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 60 Work load [kg] Work
T I N G I N D I C AT O R Red LED = Output is OFF Green LED = Output is ON 10 M 5 M S E T T I N G P O I N T 5 M N O Z Z L E T Y P E The detection nozzle should have an I.D. of between 1.0~2.0mm and 2mm in depth.
D-F9N(V)/D-F9P(V)/D-F9B(V) Applicable Actuator Series Grommet Series Bore size (mm) Series Bore size (mm) CDU MXS, MXQ 6, 10, 16, 20, 25, 32 6, 8, 12, 16, 20, 25 MXP CDQ2 32, 40, 50, 63, 80, 100 10, 12, 16 * MTS CDQS 12, 16, 20, 25 20, 25, 32, 40 CY1R MY1 16, 20 6, 10, 15, 20 ; MK MXW 8, 12, 16, 20, 25 12, 16 MK2 MXF 8, 12, 16, 20 32, 40, 50, 63 6, 10, 16 *Not available for series CDQP2